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GaAs, InP, GaN

GaAs, InP, GaN

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Wlot grupy V<br />

NH3<br />

SiH4<br />

gaz nośny<br />

MOVPE<br />

Przepływ górny (gaz nośny)<br />

Wlot grupy III<br />

TMGa<br />

TMAl<br />

TMIn<br />

Cp2Mg<br />

Gaz nośny<br />

Reflektometria laserowa In-situ<br />

grafitowa podstawa<br />

pokryta SiC<br />

podłoże<br />

grzanie indukcyjne

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