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Tesi di MASTER in - surfacetreatments.it

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4.8. Concentrazione dei reagenti4.9.Modelli <strong>di</strong> cresc<strong>it</strong>a dei film4.10. I composti precursoriCap<strong>it</strong>olo c<strong>in</strong>que Low pressare Chemical Vapour depos<strong>it</strong>ion5.1.Premessa………………………………………………pages mo<strong>di</strong>fied…………………..445.2.Struttura del sistema5.3.Proce<strong>di</strong>mento della deposizione5.4.Valutazioni del sistema L.P.C.V.D.Cap<strong>it</strong>olo sei Precursori e Coat<strong>in</strong>gs via LPCVD6.1.Precursori………………………………………….. pages mo<strong>di</strong>fied…………………….556.2.S<strong>in</strong>tesi del precursore.6.2.1.Via Grignard.6.4.Conclusioni.

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