Pushing the boundaries of the thermal conductivity of materials
Pushing the boundaries of the thermal conductivity of materials
Pushing the boundaries of the thermal conductivity of materials
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Time-domain Thermoreflectance (TDTR)<br />
data for TiN/SiO 2 /Si<br />
TiN<br />
SiO2 Si<br />
• reflectivity <strong>of</strong> a metal<br />
depends on<br />
temperature<br />
• one free parameter:<br />
<strong>the</strong> “effective”<br />
<strong>the</strong>rmal <strong>conductivity</strong><br />
<strong>of</strong> <strong>the</strong> <strong>the</strong>rmally<br />
grown SiO 2 layer<br />
(interfaces not<br />
modeled separately)