Conference Program - LOPE-C 2011

SCIENTIFIC CONF. | THURSDAY-JUNE 30, 2011
Track 5
Novel Process Concepts (04:30 pm - 06:00 pm) | LOCATION HARMONIE E / LEVEL C2
05:40 pm A New Method for Substrate Transport in Vacuum Deposition and In-Line Processes
Mr Geert van der Zalm,
Bosch Rexroth, Business Development Manager, Germany
When a vacuum deposition process is combined with in-line transport, significant benefits in throughput can result compared to a cluster tool approach. The major
challenge in making this approach successful is to design a motion system that has low particle generation, is modular, able to deal with the high vacuum levels, and still
provides good serviceability. Traditional methods using conveyor belts, linear motors, or feedthrough couplings are not able to meet these challenges at an attractive cost.
With the patented Linear Motion System (LMS), Bosch Rexroth provides a unique method to address all these challenges. Based on an ?inverted linear motor?, its principle
is that magnet plates move in the vacuum environment, whereas the coils and measurement system are outside the vacuum. With proprietary coil control and sensor
algorithms, the magnet plates can be controlled very accurately and independently. This results in a transport system that is very flexible, has no moving cables and
virtually no maintenance requirements on the moving parts. By simply adding more coils and magnet plates, the system is expandable and modular. The Linear Motion
System has been successfully used in numerous applications for a.o. solar deposition and hard disk sputtering.
Main topics of the presentation are the discussion of the challenges of vacuum transport, an explanation of the physical principle behind this new technology, and a closer
look at a sample application.
06:00 pm SESSION END
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