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Application Compendium - Agilent Technologies

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A B<br />

Figure 5A-C. The topography (A) and surface potential (B) images of SRAM. The cross-section profiles along<br />

the directions indicated with white arrows in (A) and (B) are shown in the top and bottom parts of (C).<br />

at velec=10 kHz by optimizing servo gain<br />

parameters. The experimental protocol<br />

for KFM also includes a compensation<br />

of the occasional contribution to surface<br />

potential measurements from the probe<br />

and sample surroundings; which causes<br />

a dependence of surface potential on<br />

the probe-sample separation. This<br />

dependence is eliminated by finding the<br />

proper offset voltage. The optimization<br />

procedures for KFM measurements<br />

are described in more detail in 27 .<br />

In the single-pass KFM experiment<br />

one needs to select vmech and velec. A<br />

mechanical drive of the probe is typically<br />

done at vmech chosen near the first<br />

flexural resonance of the cantilever,<br />

whereas the electric servo loop is set<br />

either at much lower frequency or at<br />

the second or even third flexural mode.<br />

The following arguments are usually<br />

considered in the choice of velec. The<br />

electrostatic probe response is higher at<br />

the resonant frequencies, yet this also<br />

increases the possibility the cross-talk<br />

between different force interactions. The<br />

cross-talk is less probable when velec

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