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Figure 1. <strong>Chemical</strong>ly actuated micropumps with flow channels. (A) Exploded view of the micropumps and the flow channels. (B) Operation of<br />

the micropump. Cross-sections are shown that include the flow channel for transport, the diaphragm, and the lower compartment for the H2O2<br />

solution. First, the reservoir of the micropump is filled with a solution to be transported (top). When a H2O2 solution is transported in the controlling<br />

flow channel and reaches the lower compartment of the micropump, bubbles are produced, the diaphragm inflates, and the solution in the upper<br />

reservoir is injected into the upper flow channel (bottom).<br />

arrangement of components, including the flow channel network. 18<br />

Although there have been limitations in manipulation that is<br />

performed only through capillary action, even the complicated<br />

manipulation of solutions may be realized by coupling a programmed<br />

microfluidic network with chemically actuated microfluidic<br />

components.<br />

In a number of previous studies, gas bubbles produced by the<br />

electrolysis of water were used to produce a volume change that<br />

would mobilize a solution in a microflow channel. 24-29 This<br />

principle of operation is attractive for the realization of a chemically<br />

actuated micropump, because gas production is accompanied by<br />

many chemical reactions. In creating our device, we used the<br />

volume change of oxygen bubbles produced by the catalytic<br />

decomposition of H2O2. 26 To trigger the pumping action, a H2O2<br />

solution was transported and supplied to the micropumps by<br />

capillary action in a controlling flow channel. A network of<br />

controlling flow channels described on a chip could be used<br />

as a program to operate many micropumps cooperatively. In<br />

other words, the timing of the switching among pumps could<br />

be adjusted by changing the relative positions of the micropumps<br />

and the length or other dimensional parameters of the<br />

flow channels. In this paper we present the basic concept for<br />

a chemically actuated micropump and its programming and<br />

characterize the performance of the device.<br />

(24) Böhm, S.; Timmer, B.; Olthuis, W.; Bergveld, P. J. Micromech. Microeng.<br />

2000, 10, 498–504.<br />

(25) Suzuki, H.; Yoneyama, R. Sens. Actuators, B 2003, 96, 38–45.<br />

(26) Choi, Y. H.; Son, S. U.; Lee, S. S. Sens. Actuators, A 2004, 111, 8–13.<br />

(27) Satoh, W.; Shimizu, Y.; Kaneto, T.; Suzuki, H. Sens. Actuators, B 2007,<br />

123, 1153–1160.<br />

(28) Shimizu, Y.; Takashima, A.; Satoh, W.; Sassa, F.; Fukuda, J.; Suzuki, H.<br />

Sens. Actuators, B 2009, 140, 649–655.<br />

(29) Blanco-Gomez, G.; Glidle, A.; Flendrig, L. M.; Cooper, J. M. Anal. Chem.<br />

2009, 81, 1365–1370.<br />

EXPERIMENTAL SECTION<br />

Materials and Reagents. A thick-film photoresist (SU-8) was<br />

purchased from MicroChem, Newton, MA. A precursor solution<br />

of poly(dimethylsiloxane) (PDMS) (KE-1300T) was purchased<br />

from Shin-Etsu <strong>Chemical</strong>, Tokyo, Japan. A precursor solution of<br />

PVA-SbQ, SPP-H-13, was purchased from Toyo Gosei Kogyo,<br />

Chiba, Japan. H2O2, manganese dioxide, and poly(oxyethylene)<br />

sorbitan monolaurate (Tween 20) were purchased from Wako<br />

Pure <strong>Chemical</strong> Industries, Osaka, Japan. The enzymes and<br />

related reagents were obtained from the following commercial<br />

sources: horseradish peroxidase (HRP; 100 U/mg), lactate<br />

oxidase (LOD; 38 U/mg), and bovine serum albumin (BSA)<br />

from Wako Pure <strong>Chemical</strong> Industries, Osaka, Japan; glucose<br />

oxidase (GOD; 151 U/mg) and 25% glutaraldehyde (GA)<br />

solution from Sigma-Aldrich, St. Louis, MO; N-acetyl-3,7dihydroxyphenoxazine<br />

(Amplex Red) from AnaSpec, San Jose,<br />

CA.<br />

Basic Structure and Fabrication of the Microfluidic Devices.<br />

The devices were constructed by stacking two PDMS<br />

substrates on a glass substrate (Figure 1). Flow channels were<br />

formed with PDMS using a template formed with a thick-film<br />

photoresist (SU-8). The compartments for the pumps and solutions<br />

to be transported were formed in the lower and upper PDMS<br />

layers by punching.<br />

A critical part of each micropump was a circular compartment<br />

(diameter 2.5 mm) with a diaphragm. The diaphragm was formed<br />

by intercalating a 50 µm thick PDMS sheet between the two<br />

PDMS substrates. The lower part of the compartment was<br />

connected to a controlling flow channel for the transport of a H2O2<br />

solution. To form a MnO2 layer in the vicinity of the diaphragm,<br />

a droplet of water containing a suspension of MnO2 powder<br />

was put into the compartment that was then placed upside<br />

<strong>Analytical</strong> <strong>Chemistry</strong>, Vol. 82, No. 16, August 15, 2010<br />

6871

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