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A<br />
A<br />
B<br />
1K<br />
2<br />
10K<br />
1<br />
2<br />
3 /ION_GA_IN_REGULATION_FPGA_IN<br />
[5]<br />
4<br />
LLIM=1.2V 3<br />
1<br />
4<br />
3 3<br />
+13.4V<br />
1.2V_REF1<br />
+13.4V<br />
+13.4V<br />
+13.4V<br />
+13.4V<br />
68.1K<br />
-13.4V<br />
+5V<br />
3<br />
2 +<br />
2<br />
U51B 21.5K 21.5K<br />
1<br />
AD712<br />
2 -<br />
.1UF<br />
5<br />
Q18B<br />
+<br />
C44<br />
Q18A<br />
7<br />
MAT01<br />
.47uF 50V<br />
MAT01<br />
6 -<br />
1 3 4 6<br />
[13]<br />
[13]<br />
R280<br />
10K<br />
MIN: 1.223V<br />
TYP: 1.235<br />
MAX: 1.247<br />
IG_CURRENT<br />
EMISS_CURRENT<br />
TP55<br />
4 8<br />
D24<br />
LM385-1.2<br />
R316<br />
6.81K<br />
R141<br />
R147<br />
4.75K<br />
TP57<br />
R156<br />
10K<br />
HLIM=4.3V<br />
R303<br />
6.81K<br />
C216<br />
1000pF<br />
R142<br />
10K<br />
R155<br />
10K<br />
R290<br />
10K<br />
R281<br />
C221<br />
.1UF<br />
C222<br />
2<br />
3<br />
-13.4V<br />
+13.4V<br />
+13.4V<br />
GAIN = 8.49<br />
-13.4V<br />
+13.4V<br />
+13.4V<br />
1 1<br />
.1UF<br />
2<br />
3<br />
8 4<br />
-<br />
+<br />
+13.4V<br />
R157<br />
R304<br />
511<br />
10.4V_REF [15]<br />
TEMP COMP<br />
LOG AMP<br />
C223 .01UF<br />
1.52V ~ 10mT<br />
Ion Gauge Pressure Readout Section<br />
6<br />
5<br />
8 4<br />
-<br />
+<br />
8 4<br />
-<br />
+<br />
8 4<br />
-<br />
+<br />
C208<br />
.01UF<br />
7<br />
U47B<br />
LMC6772<br />
R283<br />
6.81K<br />
1<br />
U44A<br />
OPA2277<br />
U51A<br />
AD712<br />
U47A<br />
LMC6772<br />
1<br />
C214<br />
150pF<br />
R285<br />
1K<br />
TP43<br />
2<br />
R284<br />
1K<br />
D25<br />
BAS16<br />
6.04K<br />
R140<br />
1<br />
3<br />
6.04K<br />
R145<br />
5<br />
1K<br />
R307<br />
R306<br />
10K<br />
R153<br />
187 3W<br />
1500 PPM<br />
B<br />
6.81K<br />
R305<br />
R301<br />
1K<br />
R302<br />
681<br />
1mA_REF<br />
ION_GAUGE_IN_REGULATION<br />
R294<br />
0.0<br />
+13.4V<br />
8<br />
4<br />
-13.4V<br />
-13.4V<br />
8<br />
5 +<br />
6 -<br />
4<br />
R295<br />
2.49K<br />
+5V<br />
D<br />
1M<br />
+13.4V<br />
U45B<br />
LMC6772<br />
7<br />
U38A<br />
74AHCT00<br />
8<br />
R296<br />
3<br />
2.53V~6.7E-4T<br />
+<br />
10K<br />
2 -<br />
R319<br />
6.04K<br />
R317<br />
6.04K<br />
R308<br />
TP72<br />
C205<br />
.01UF<br />
R320<br />
4<br />
+5V<br />
R5<br />
1K<br />
D8<br />
GRN LED<br />
"IG REG"<br />
IG_PRS_OK_FPGA_IN<br />
R286<br />
+5V<br />
10K<br />
R291<br />
1M<br />
R313<br />
+13.4V<br />
U45A<br />
LMC6772<br />
1<br />
C40<br />
.47uF 50V<br />
+13.4V<br />
8<br />
4<br />
-13.4V<br />
LOW PASS<br />
FILTER<br />
MANIFOLD_PRS_OK 5<br />
U52A<br />
OPA2277<br />
C<br />
+5V<br />
C<br />
R309<br />
10K<br />
ION_GAUGE_PRESSURE<br />
C206<br />
-13.4V<br />
.1UF<br />
C213<br />
[13]<br />
4<br />
ION GAUGE IN REGULATION FPGA IN<br />
U38B<br />
[5]<br />
2.6 E-7 T = 6.0V<br />
2.5 E-6 T = 5.0V<br />
2.4 E-5 T = 4.0V<br />
2.3 E-4 T = 3.0V<br />
2.2 E-3 T = 2.0V<br />
6<br />
74AHCT00<br />
+13.4V<br />
IG_FUSED_POWER<br />
IG PRS OK FPGA IN<br />
/VACUUM_OK_FPGA_IN<br />
[15]<br />
R230<br />
4.75K<br />
(3.38v)<br />
R229<br />
10K<br />
+5V<br />
R226<br />
221K<br />
D<br />
[2,5]<br />
TO 12-BIT<br />
A/D<br />
CONVERTER<br />
R227<br />
100K<br />
6<br />
5<br />
D<br />
8 4<br />
-<br />
+<br />
+5V<br />
R231<br />
1M<br />
IG<br />
+5V<br />
FPGA<br />
D<br />
START PULSE<br />
~4s<br />
D<br />
OR<br />
/180V IS ON FPGA IN<br />
/FOREPRESS CONVECTRON OK FPGA IN<br />
TURBO_AT_SPEED<br />
U63B<br />
LMC6772<br />
7<br />
+5V<br />
.1UF<br />
D<br />
COUNTER<br />
RS<br />
ION GAUGE SELF PROTECT<br />
BLOCK DIAGRAM<br />
/FUSED_IG_180V_PWR_OK_FPGA_IN<br />
START IG<br />
ION GAUGE ON OFF<br />
NOTES:<br />
1. Ion Ga Press. readout not valid unless IG is in regulation.<br />
2. IG is enabled if Turbo is at speed.<br />
R232<br />
10K<br />
C111<br />
[5]<br />
E<br />
<strong>Thermo</strong> 355 River Oaks Pkwy, San Jose, CA 95134-1991<br />
ELECTRON CORPORATION<br />
Title<br />
SCHEM, PCB, SOURCE<br />
Size B<br />
Document Number 70111-91050<br />
Rev<br />
F<br />
Date: Thursday, March 30, 2006<br />
Sheet 14 of 18<br />
E
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