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A<br />
A<br />
B<br />
( 17.8 to 14.7 KHz )<br />
+5V<br />
+15V-IG<br />
F2 RESETTABLE FUSE<br />
IG_FUSED_POWER<br />
[14]<br />
4 56us TO 68us<br />
6us<br />
R170<br />
100K<br />
D33<br />
BAS16<br />
5<br />
U55C<br />
74AHCT04<br />
6<br />
RXE010<br />
R163<br />
TP80<br />
L5<br />
8.2mH<br />
THRU-HOLE<br />
+ C50<br />
10uF 25V<br />
IG<br />
TP93 MAXIMUM<br />
CURRENT<br />
=1.1 mA<br />
R183<br />
180 Volt Power Supply<br />
4<br />
C48<br />
IG_30KHZ_FOR_180V_ON_BUF<br />
[3]<br />
.01UF<br />
FROM FPGA<br />
SECTION<br />
180V IG Grid Pwr Sply<br />
+5V<br />
C226<br />
.1UF<br />
D<br />
9<br />
11<br />
U55D<br />
74AHCT04<br />
8<br />
U55E<br />
74AHCT04<br />
10<br />
U55F<br />
74AHCT04<br />
681<br />
C49<br />
.01UF<br />
B<br />
C<br />
1 2<br />
B<br />
D29<br />
2<br />
Q21 STTA106U<br />
MPSA44 D30<br />
A<br />
E<br />
R164<br />
STTA106U<br />
10K<br />
STTA106/U<br />
-13.4V<br />
180V_GAUGE_GRID ( 13D2)<br />
D32<br />
1.21K<br />
R184<br />
1N5955A<br />
+<br />
1M<br />
C51 180V<br />
C95<br />
.1UF 200v<br />
2.2uF-250VDC<br />
R321<br />
1M<br />
IG<br />
+13.4V<br />
13 12<br />
U52B<br />
3<br />
B<br />
A<br />
0V<br />
0.75V<br />
0V<br />
(8.6v)<br />
R322<br />
100K<br />
5 +<br />
6 -<br />
TLE2142<br />
7 IG_180V_MONITOR [15]<br />
( 13B1 )<br />
O TO 180V = 0 TO 8.6V<br />
TO 16<br />
BIT<br />
A/D<br />
3<br />
TP112<br />
-1.8V<br />
IG<br />
-13.4V<br />
+15VIN_IG L7<br />
56uH<br />
+15V-IG<br />
+<br />
C85<br />
10uF 25V<br />
IG<br />
C98<br />
.01UF<br />
R402<br />
121<br />
+15V-IG<br />
FIL1 FIL2<br />
(13D3) 180V_GAUGE_GRID<br />
IG<br />
FILAMENT<br />
FILAMENT_RET TO ION<br />
27V<br />
GA<br />
TUBE<br />
2 2<br />
[3] ION_GAUGE_ON<br />
IG<br />
<br />
[5]<br />
1mA<br />
IG<br />
emission IG<br />
(6.2v)<br />
1W<br />
1W<br />
EMISS_CURRENT<br />
IG_180V_MONITOR<br />
[14]<br />
IG<br />
( 13C3 )<br />
12<br />
I_SNS 5<br />
COMP<br />
7<br />
RT/CT<br />
8<br />
GND<br />
1<br />
OUT<br />
14<br />
V_REF<br />
10<br />
9<br />
PGND<br />
Vc 11<br />
S1GB<br />
C96<br />
xfmr<br />
.01UF<br />
D49<br />
J9<br />
T1<br />
L6<br />
1 3<br />
2 1<br />
1<br />
D46<br />
1<br />
2<br />
C84<br />
82uH<br />
2<br />
C97<br />
3<br />
+<br />
1000pF<br />
3<br />
4<br />
1N5361B<br />
47uF 50V<br />
R208<br />
SK14<br />
C90<br />
4<br />
D48<br />
+ 5<br />
1000pF<br />
C92<br />
5<br />
TP82<br />
SK14<br />
6<br />
470 / .5W<br />
6<br />
R186 100<br />
47uF 50V<br />
2 4<br />
CON6-MICROFIT<br />
R195 100<br />
D47<br />
TP81<br />
C78<br />
TP83<br />
.01UF<br />
1N5338B,5.1V<br />
R193<br />
C67 .1UF<br />
6.81K<br />
24.9K<br />
Q22<br />
1<br />
R171<br />
R185 U59<br />
IRF530<br />
R287<br />
R282<br />
24.9K<br />
10K TP56<br />
2.49K<br />
TP91<br />
R197<br />
R293 R288<br />
R200 R196 4.75K<br />
301<br />
1M 1M<br />
7.15K<br />
C81<br />
TP98<br />
1000pF<br />
UC3845D<br />
C82<br />
R204<br />
R203<br />
R292<br />
U46A<br />
.01UF<br />
1.0<br />
C231<br />
1.0<br />
24.9K<br />
LMC6772<br />
3 +<br />
150pF<br />
1<br />
2 -<br />
Ion Gauge Control<br />
IG<br />
1 ( freq ~ 166 KHz )<br />
1<br />
4 2 1 3<br />
~ 5 uS<br />
C<br />
15V<br />
XFMR T1 PIN OUT,<br />
TOP VIEW<br />
D44<br />
1 3<br />
TP111<br />
B<br />
0V<br />
4<br />
2<br />
3<br />
IG<br />
~ 1 uS<br />
8<br />
4<br />
3<br />
1<br />
2 1<br />
1 2<br />
C<br />
C<br />
8<br />
4<br />
D<br />
D<br />
E<br />
<strong>Thermo</strong> 355 River Oaks Pkwy, San Jose, CA 95134-1991<br />
ELECTRON CORPORATION<br />
Title<br />
SCHEM, PCB, SOURCE<br />
Size<br />
B<br />
Document Number<br />
70111-91050<br />
Rev<br />
F<br />
Date: Tuesday, August 30, 2005<br />
E<br />
Sheet 13 of 18
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