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Weiche Materie Poster: Do., 13:00–15:30 D-P343
Probing thin polymer films: A comparative GISAXS and GISANS investigation
P. Müller-Buschbaum 1 , S.V. Monkenbusch 2 , R. Cubitt 3 , M. Burghammer 4 ,
C. Riekel 4
1 TU München, Physik-Department E13, James-Franck-Str.1, 85747 Garching (Germany)
– 2 HASYLAB at DESY, Notkestr. 85, 22603 Hamburg (Germany) – 3 ILL, b.p.
156, 38042 Grenoble (France) – 4 ESRF, b.p. 220, 38043 Grenoble (France)
Future generations of microelectronic devices will require both, ever-decreasing critical
dimensions and shrinking tolerance on those dimensions. The rising costs and complexity
associated with lithographically created structures at the nanometer length scale
opened opportunities for alternative techniques. Following this track, self-assembly in
physical systems can play a key role in future technological applications.
Extremely promising candidates are nanostructured polymer films built up from diblock
copolymers. The typical dimensions of the microphase separation structures
are in the nanometer regime, yielding the desired nanostructured films [1]. These dimensions
are determined by the fundamental properties of the diblock copolymer and
can be adjusted by changing the total copolymer molecular weight while keeping the
molecular weight ratio between the blocks constant. In the case of a thin film, the solid
support is completely covered by the nanostructured polymeric layer. Alternatively, a
superstructure can be imposed, replacing the thin film geometry. As a typical example,
the initially continuous polymer film is replaced by an assembly of isolated polymer
droplets, called nano-dots. Inside the host structure of these nano-dots, the microphase
separation structure is present. Consequently, this type of system exhibits two characteristic
lateral lengths, the first given by the microphase separation structure and the
second resulting from the spacing of the nano-dots assembled upon the solid support.
With the advanced scattering technique of grazing incidence small-angle scattering
with synchrotron radiation and neutrons (GISAXS and GISANS) lateral lengths in a
regime from molecular to micrometer-sized are covered [2]. Thus the addressed range is
quite comparable to AFM or SEM, but the probed surface area is macroscopic instead
of microscopic.
[1] P.Müller-Buschbaum et al.; J.Phys.Condens.Matter 17, S363 (2005)
[2] P.Müller-Buschbaum, et al.; Appl.Phys.Lett. 88, 083114 (2006)