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For Micro-, Nano- <strong>and</strong> Vacuum Applications<br />

<strong>Scan</strong> & <strong>Motion</strong> <strong>Systems</strong> <strong>Systems</strong><br />

<strong>Motion</strong> & <strong>Scan</strong>


Network<br />

Customized solutions<br />

Experts in Photonics<br />

Market leader<br />

Consulting<br />

30 years experience<br />

High quality products<br />

Project-related support<br />

Professional test equipment<br />

Supplier<br />

Experts in Europe! Laser 2000 is located close to Munich. We are<br />

driven by global thinking <strong>and</strong> local action. To meet the individual market <strong>and</strong> customer<br />

needs we have subsidiaries <strong>and</strong> offices across Europe. Direct offices in Paris<br />

<strong>and</strong> Bordeaux, in Madrid, Gothenburg <strong>and</strong> Stockholm, together with affiliated<br />

companies in Great Britain, Belgium <strong>and</strong> the Netherl<strong>and</strong>s insure international<br />

proximity to our customers.<br />

For more than 30 years, Laser 2000 has supplied you with solutions matching even<br />

your most dem<strong>and</strong>ing applications. We cooperate with global leaders to supply<br />

„customer-specific solutions from a single source”. Photonics is our passion <strong>and</strong><br />

profession alike. We are avid promoters of optical technologies <strong>and</strong> are always on<br />

the cutting edge of technology, products <strong>and</strong> application options.<br />

We rely on innovation, highest quality <strong>and</strong> in particular on the knowledge, creativity<br />

<strong>and</strong> enthusiasm of our employees. An excellent team of university educated<br />

physicists <strong>and</strong> engineers coupled with long experience support you in selecting<br />

ideal solutions. Our passion for the fascinating world of photonics is the basis of<br />

our thinking <strong>and</strong> actions. It is also our basis for insuring best customer satisfaction<br />

as a leading player on the European market for optical technologies in the photonics<br />

century.<br />

2


ALIO Industries<br />

Company Profile........................................................................................................................ Page 6<br />

Hybrid Hexapods <strong>and</strong> Tripods................................................................................................. Page 7<br />

X, XY- <strong>and</strong> Z-Axis...................................................................................................................... Page 8<br />

XYZR-Axes (with Rotation axis).............................................................................................. Page 9<br />

Aperture-Tables....................................................................................................................... Page 10<br />

Rotational Axes........................................................................................................................Page 11<br />

ALIO <strong>Systems</strong> Engineering in Europe................................................................................... Page 12<br />

Vacuum Solutions................................................................................................................... Page 13<br />

Laser 2000 GmbH<br />

Company Profile...................................................................................................................... Page 14<br />

Resonant <strong>Scan</strong>ners................................................................................................................. Page 15<br />

Lincoln Laser<br />

Company Profile...................................................................................................................... Page 16<br />

<strong>Scan</strong> Heads.............................................................................................................................. Page 17<br />

Polygonal <strong>Scan</strong>ners................................................................................................................ Page 18<br />

Galvanometer <strong>Scan</strong>ners......................................................................................................... Page 19<br />

Optical Modules...................................................................................................................... Page 20<br />

Polygonal Mirrors................................................................................................................... Page 21<br />

OptoSigma<br />

Company Profile...................................................................................................................... Page 22<br />

Controllers............................................................................................................................... Page 23<br />

Software................................................................................................................................... Page 24<br />

Actuators.................................................................................................................................. Page 25<br />

Linear Stepper Motor Stages................................................................................................. Page 26<br />

Stepping Motor Rotation Stages........................................................................................... Page 27<br />

Motorized Goniometers......................................................................................................... Page 28<br />

Vacuum Compatible Stages................................................................................................... Page 29<br />

Ultrasonic Driven Products.................................................................................................... Page 30<br />

Sigma Fine Piezo Stages........................................................................................................ Page 31<br />

TEM Messtechnik<br />

Company Profile...................................................................................................................... Page 32<br />

Fields of Activity..................................................................................................................... Page 33<br />

Automated Alignment <strong>and</strong> <strong>Scan</strong>ning System..................................................................... Page 34<br />

Piezo Drivers <strong>and</strong> Piezo Mirrors............................................................................................ Page 35<br />

Zaber Technologies<br />

Company Profile...................................................................................................................... Page 36<br />

About our Products................................................................................................................. Page 37<br />

Product Overview................................................................................................................... Page 38<br />

Zaber Catalogue...................................................................................................................... Page 39<br />

3


Custom Solutions<br />

Engineering<br />

your<br />

ideas!<br />

Customer specific solutions<br />

Your benefits<br />

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05<br />

Expertise <strong>and</strong> know how<br />

Experienced physicists, optical, mechanical <strong>and</strong> electrical engineers<br />

Design, integration, production<br />

From simple modules to complex systems<br />

Customer-specific modifications<br />

Delivery of non-st<strong>and</strong>ard solutions if required<br />

Selecting the right concepts <strong>and</strong> components<br />

Experience <strong>and</strong> overview regarding products <strong>and</strong> trends worldwide<br />

Applications <strong>and</strong> feasibility studies<br />

Definition of optimal process parameters in the laboratory<br />

4


Introduction<br />

<strong>Scan</strong> & <strong>Motion</strong> <strong>Systems</strong><br />

for Micro-, Nano- <strong>and</strong> Vacuum Applications<br />

You are now holding the latest catalogue from Laser 2000.<br />

This is an overview of the motorized products <strong>and</strong> systems<br />

we offer. Laser 2000 has, since the foundation in 1986, been<br />

one of the leading providers in the field of optical technologies.<br />

Many of our “classic” customers turn to us when in<br />

need of light sources, optical <strong>and</strong> opto-mechanical components<br />

as well as when in need of measurement instruments.<br />

Less well known is the vast <strong>and</strong> also very good portfolio of<br />

motorized components <strong>and</strong> systems. In many of the „classic“<br />

laser applications our customers need either moving<br />

light sources, moving samples, motion detectors or other<br />

components „in motion“. Thus arises a perfect synergy for<br />

this customer area. Laser 2000 has little by little, during many<br />

years, grown its ever larger portfolio of products <strong>and</strong> motorized<br />

systems. This portfolio we now partially present to you in<br />

this form. This portfolio covers both the very best solutions for<br />

applications in the range of accuracy up to a few micrometers<br />

as well as high-end systems for accuracy ranges in the low<br />

nanometer range.<br />

Typical applications for these products are for example:<br />

• Image processing<br />

• Life science applications<br />

• Metrology<br />

• Photovoltaics<br />

• The manufacture of semiconductors<br />

• Labs such as synchrotrons<br />

• Material processing<br />

• Laser marking<br />

This brief overview shows already to some extent that the<br />

applications for these products in no way are bound by the<br />

laser technique. Rather, it is becoming more <strong>and</strong> more obvious<br />

to us at Laser 2000 that entirely new market segments<br />

outside the area of laser techniques also can be addressed.<br />

We therefore particularly want to point out that this line of<br />

products are not intended „only“ for applications realized in<br />

the field of laser technology. We are happy to advice on other<br />

applications <strong>and</strong> work together with you to a solution.<br />

5


ALIO Industries<br />

Company Profile<br />

With our Partner ALIO Industries we offer motorized components<br />

<strong>and</strong> systems for high-end-applications with most dem<strong>and</strong>ing<br />

requirements on precision <strong>and</strong> dynamics. Depending<br />

on your application we can offer stepper motor, linear<br />

motor <strong>and</strong> ceramic servo motor solutions. As bearings we<br />

can offer air beared high precision axes as well as precise<br />

crossed roller bearing systems.<br />

ALIO Industries has special experience <strong>and</strong> knowledge in the<br />

design of ultra-high-vacuum systems for applications with<br />

up to 10 -12 mbar. With a complete portfolio, beginning with<br />

the motorized axes <strong>and</strong> all other required components as<br />

controllers, cables, feedthrough ports <strong>and</strong> software we can<br />

offer the perfect fit for your application.<br />

One key point of those applications is the usage of the right<br />

controllers. With high-end controllers from Delta Tau Data<br />

<strong>Systems</strong> Inc. we can achieve very complex motions of multiaxis<br />

systems <strong>and</strong> also achieve best accuracies <strong>and</strong> resolutions.<br />

The single axes <strong>and</strong> systems are measured <strong>and</strong> calibrated by<br />

either laser-interferometers or inductive capacitors. This way<br />

it is possible to get system information over the complete<br />

travel range in all degrees of freedom.<br />

The measured failures can be stored in the controllers, which<br />

allow us to also compensate the systematic failures with according<br />

axes. This can be used for example to compensate<br />

YAW-deviations with rotary axis, if necessary. Already built<br />

<strong>and</strong> sold systems allow us to offer a huge portfolio of designed<br />

<strong>and</strong> well performing systems. In many applications,<br />

still, custom solutions are the only way to get best performance,<br />

which meet exactly custom requirements in accuracy,<br />

size <strong>and</strong> price.<br />

We are looking forward to discuss these requirements with<br />

you. Typical applications <strong>and</strong> customers for our stages can<br />

be found in metrology, wafer production, life science <strong>and</strong><br />

many other markets. In the following you will find a short<br />

overview of some representative products.<br />

6


Hybrid Hexapods <strong>and</strong> Tripods<br />

Tripods allow you the Z-moves <strong>and</strong> also the tilt around two<br />

axes. Very often they are combined with XY linear stages to<br />

create 5-axis systems. With rotary axes on top or at the base<br />

we can even extend them to 6-axis-systems, so called hybrid<br />

hexapods. The fact, that they only are designed with three universal<br />

joints at the upper platform <strong>and</strong> three solid joints at the<br />

bottom make tripods mechanically order of magnitudes more<br />

precise than most hexapods. Hexapods are usually designed<br />

with six joints at the top <strong>and</strong> bottom which inherently is leading<br />

to higher tolerances. For this reason Tripods are in direct<br />

competition with hexapods with many advantages in almost<br />

all aspects.<br />

Advantages<br />

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More precise than any hexapod solution<br />

Larger translation-, tilt- <strong>and</strong> rotation ranges possible<br />

Larger loads possible<br />

Just as dynamic as hexapod systems<br />

Vector forward <strong>and</strong> inverse kinematics<br />

7


ALIO Industries<br />

X, XY- <strong>and</strong> Z-Axis<br />

Linear axes are available as X, XY, Z <strong>and</strong> also combined versions.<br />

Mechanically beared stages <strong>and</strong> also air beared solutions<br />

are available with different stroke length <strong>and</strong> motor versions.<br />

Different encoder solutions <strong>and</strong> controller versions<br />

will make sure to find the right choice between cost <strong>and</strong> per-<br />

formance. All stage systems can be purchased as ‘mapped’<br />

systems. This includes measurements with interferometers<br />

or capacitive sensors based in NIST st<strong>and</strong>ards. These measurements<br />

can be stored in the controller to compensate errors<br />

sources.<br />

Advantages<br />

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Many st<strong>and</strong>ard versions <strong>and</strong> OEM versions available<br />

Repeatability in the nanometer range<br />

Very good flatness<br />

5 nm encoder resolution possible<br />

Very long travel range possible<br />

8


XYZR-Axes (with Rotation axis)<br />

XYZ axes with additional rotational axis are called XYZR axes.<br />

The number, location <strong>and</strong> size of the axes, can be set as shown<br />

in the examples or according to your wishes. Up to 6 axes can<br />

be configured quickly <strong>and</strong> be controlled in synchronized mode.<br />

Precise measurements based on laser interferometry or with<br />

capacitive sensors allow to ‚map‘ the stages <strong>and</strong> compensate<br />

repeatable error contributors to provide a best performing<br />

system.<br />

Advantages<br />

01<br />

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Many st<strong>and</strong>ard versions <strong>and</strong> OEM versions available<br />

Repeatability in the nanometer range<br />

Very high flatness<br />

5 nm encoder resolution possible<br />

Very long travel possible<br />

9


ALIO Industries<br />

Aperture-Tables<br />

To construct torsion-resistant with high aperture tables for<br />

accuracy <strong>and</strong> high dynamic range is one of the most difficult<br />

mechanical tasks. ALIO Industries has successfully designed<br />

several versions of aperture tables which are used success-<br />

fully in many applications. In addition to the st<strong>and</strong>ard solutions,<br />

the design can of course be re-optimized for your application.<br />

Advantages<br />

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Extremely rigid construction<br />

Repeatability in the nanometer range<br />

Very good flatness<br />

5 nm encoder resolution possible<br />

Various models <strong>and</strong> OEM versions available<br />

10


Rotational Axes<br />

Various sizes <strong>and</strong> performance classes of rotational axes can<br />

be chosen. Motor type, bearing type <strong>and</strong> also encoder type<br />

can be varied to find the best solution. The runout performance<br />

of these stages is superior in its class. Slow motion<br />

profiles are as well as high speed applications can be done<br />

with a suitable version out of the portfolio. Different sizes of<br />

trough holes allow the feed trough of cables or also light for<br />

optical applications.<br />

Advantages<br />

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Symmetrical arrangement of piezo motors possible<br />

High torque motors for high dynamic range available<br />

Bi-directional repeatability of +/- 0.2 arcsec possible<br />

Various models available<br />

OEM versions available<br />

11


ALIO Industries<br />

ALIO <strong>Systems</strong> Engineering in Europe<br />

With the new ALIO GmbH we offer also larger <strong>and</strong> more complex<br />

systems in Europe. Factory engineers from ALIO will<br />

support you from the design phase to the installation of the<br />

systems. The applications can vary from metrology to processing<br />

applications <strong>and</strong> can also include options like the de-<br />

sign of the optical path, installation of other components like<br />

laser, optics, optomechanical products or instrumentation<br />

tools. Multifunctional controllers <strong>and</strong> application software<br />

can be offered customized <strong>and</strong> also offered as st<strong>and</strong>ard versions<br />

with SDK´s <strong>and</strong> interfaces for other programming tasks.<br />

Advantages<br />

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Experienced engineers for metrology <strong>and</strong> processing applications<br />

Engineering of turnkey solutions as well as modular sub modules<br />

Easy communication with European partners<br />

Design, assembly <strong>and</strong> installation at customer’s facility as services<br />

Training of customers technicians <strong>and</strong> world wide support available<br />

12


Vacuum Solutions<br />

Almost all ALIO products can be offered as vacuum versions<br />

for up to 10 -12 mbar. Depending on your application requirements<br />

the components will be chosen to minimize outgassing<br />

<strong>and</strong> temperature variation. Thus we will use aluminum or<br />

stainless steel <strong>and</strong> also use different grease materials <strong>and</strong><br />

sometimes no grease to avoid any contamination. Motors, encoders<br />

<strong>and</strong> bearings will be chosen for the vacuum level discussed.<br />

As cable material we usually recommend Teflon ® cables.<br />

The feed through ports with all cables are offered<br />

additionally. Documentation of all cleaning <strong>and</strong> bake out procedures<br />

as well as vacuum sealed packaging allows you to install<br />

superior performing systems with least efforts on your side.<br />

Advantages<br />

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Variety of vacuum stages <strong>and</strong> systems available<br />

Design for down to 10 -12 mbar<br />

Delivery with feed through port <strong>and</strong> all cables<br />

Documentation of all cleaning <strong>and</strong> bake out procedures<br />

Vacuum sealed packaging<br />

13


Laser 2000 GmbH<br />

Company Profile<br />

14<br />

For more than 30 years, Laser 2000 has supplied you with<br />

solutions matching even your most dem<strong>and</strong>ing applications.<br />

We cooperate with global leaders to supply „customer-specific<br />

solutions from a single source”. Photonics is our passion<br />

<strong>and</strong> profession alike. We are avid promoters of optical technologies<br />

<strong>and</strong> are always on the cutting edge of technology,<br />

products <strong>and</strong> application options. Our employees have already<br />

successfully advised more than 14,000 customers <strong>and</strong><br />

sell products <strong>and</strong> solutions in 60 countries around the world.<br />

Laser 2000 is your expert in Europe for components <strong>and</strong> systems<br />

for Photonics, FiberOptics & Networks <strong>and</strong> Laser <strong>Systems</strong><br />

& Solutions.<br />

Our employees’ in-depth experience insures expert consulting<br />

in the area of material processing with short laser pulses<br />

<strong>and</strong> meets the highest dem<strong>and</strong>s for high-end lighting <strong>and</strong><br />

cameras for image processing.<br />

We supply not only st<strong>and</strong>ard components such as motors<br />

<strong>and</strong> motion systems for positioning optical tools <strong>and</strong> work<br />

pieces, but also high-end systems. These provide the highest<br />

precision in material processing <strong>and</strong> quality inspection with<br />

lasers or optical systems. Selected drive, bearing <strong>and</strong> control<br />

technologies provide you with the optimum positioning unit<br />

for your machines, from nanometer to coarse applications.<br />

We are your competent partner for the design, planning, setup<br />

<strong>and</strong> operation of fiber optic networks. Our products include<br />

a wide range of tools, measuring equipment <strong>and</strong> cleaning<br />

materials for processing <strong>and</strong> h<strong>and</strong>ling.<br />

The Laser 2000 Academy supports you with comprehensive<br />

training programs in the areas of optical simulation, optical<br />

measuring techniques, fiber optics <strong>and</strong> network technology<br />

<strong>and</strong> laser protection. In addition to our basic <strong>and</strong> special<br />

trainings, we also offer the option of individual seminars at<br />

your site.<br />

Our passion for the fascinating world of photonics is the basis<br />

of our thinking <strong>and</strong> actions. It is also our basis for insuring best<br />

customer satisfaction as a leading player on the European<br />

market for optical technologies in the photonics century.


Resonant <strong>Scan</strong>ners<br />

Laser 2000 offers a high range of different scanners from subminiature<br />

scanners to wide angle <strong>and</strong> high frequency optical<br />

scanners. Frequencies of 10 Hz to 16 kHz, peak to peak angels<br />

from 5° - 70° <strong>and</strong> a bride range of mirror sizes are available.<br />

The scanners can be use in an intra-cavity Q-Switch in confocal<br />

microscopy, X-ray technology <strong>and</strong> quality inspection to<br />

name a few. Glass mirrors are st<strong>and</strong>ard. Metal mirrors, gratings,<br />

lenses, other optical attachments also drive electronics<br />

with different package regulation <strong>and</strong> power supply options<br />

are available.<br />

Advantages<br />

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Long life in high/low temperature operation<br />

High frequency stability<br />

Low power drive electronics<br />

Small site <strong>and</strong> low weight<br />

Rugged, no wearing parts<br />

15


Lincoln Laser<br />

Company Profile<br />

Lincoln Laser Company services a global clientele of OEMs in<br />

laser printing, medical imaging, film writing <strong>and</strong> many other<br />

specifically tailored laser scanning processes. Their reputation<br />

for unparalleled quality, customer support <strong>and</strong> flexibility is enabling<br />

Lincoln Laser to be a mainstay supplier to most of the<br />

world’s premier manufacturers of laser scanning equipment.<br />

David C. Lincoln <strong>and</strong> R<strong>and</strong>y Sherman began Lincoln Laser in<br />

1974 with a simple idea. The inspiration behind their endeavor<br />

was the desire to produce quality jigsaw puzzles with<br />

lasers. That original idea eventually led to the establishment<br />

of Lincoln’s leading laser scanning equipment.<br />

Today, Lincoln Laser is a growing organization custom-building<br />

laser scanning components <strong>and</strong> electro-optic subsystems<br />

for customers around the world. Applications of these<br />

customized systems include a revolutionary mammography<br />

machine <strong>and</strong> other medical imaging devices (OCT), barcode<br />

scanners, warehouse inventory, precision photocopying, laser<br />

printing, postal sorting, package h<strong>and</strong>ling, <strong>and</strong> inspection<br />

devices, to name a few. The uses of Lincoln’s technology are<br />

practically limitless. Along with every Lincoln Laser product<br />

comes a strongest support network in the industry. As one<br />

customer stated, „Lincoln Laser provides customer service<br />

<strong>and</strong> support beyond comparison.”<br />

Lincoln Laser‘s flexibility in Product Design, Specification<br />

Changes, Production Volumes, Delivery Requirements <strong>and</strong><br />

Re-Manufactured Products is unmatched in the industry. Our<br />

outst<strong>and</strong>ing quality, reliability, <strong>and</strong> flexibility assures delivery<br />

of precisely what you want, when you want it.<br />

„Deliver products <strong>and</strong> services that meet or exceed our customers’<br />

expectations while continuously striving for improvement<br />

in all areas.” At Lincoln Laser quality is a mindset, not just a department.<br />

Lincoln Laser is equipped with over forty years experience<br />

plus state of the art tools; mechanical CAD, finite element<br />

analysis, electronic CAD <strong>and</strong> optical/thin film coating software.<br />

Experienced Optical, Electronic <strong>and</strong> Mechanical engineers<br />

are prepared to assist <strong>and</strong> guide you in developing products<br />

to meet your needs.<br />

16


<strong>Scan</strong> Heads<br />

The portfolio includes X-Y galvanometer scan heads, polygonal<br />

scan heads <strong>and</strong> polygon/galvo scan heads. Galvanometer<br />

scan heads use an X-Y galvo pair <strong>and</strong> are very versatile <strong>and</strong><br />

can scan in a vector or raster format. The scan angle is variable<br />

which allows a variable size scan field. Polygonal scan<br />

heads produce a line scan <strong>and</strong> the scan angle is fixed. The<br />

major benefit of a polygonal scan head is it can be 100 times<br />

faster than a galvo scan head. Since printing <strong>and</strong> imaging<br />

require very fast scan rates polygonal scan heads are used in<br />

laser printers. With more powerful <strong>and</strong> faster lasers being<br />

used in material processing, often times, galvo scan heads<br />

are not fast enough.<br />

Advantages<br />

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XY Galvanometer scan heads<br />

Polygonal scan heads<br />

Polygon/galvo scan heads<br />

Available with driver/controller/OEM development of optics<br />

Variety of motors <strong>and</strong> polygons for highest precision for different applications<br />

17


Lincoln Laser<br />

Polygonal <strong>Scan</strong>ners<br />

These scanners are being offered in three versions. Aerodynamic<br />

air bearing design enables speeds of 6,000 - 50,000 rpm.<br />

Aerostatic air bearing designs for high performance applications<br />

require the ultimate in dynamic track <strong>and</strong> speed stability.<br />

These scanners operate at speeds ranging from 0 to<br />

30,000 rpm. As third option ball bearing designs are being<br />

used for low speed applications. Analog controllers paired<br />

with these scanners go down to 300 rpm <strong>and</strong> digital controllers<br />

go down to 0 rpm. The st<strong>and</strong>ard scanner sizes reach<br />

from 1 inch to 14 inch diameter. Own mechanical <strong>and</strong> electric<br />

hardware allow velocity stability <strong>and</strong> jitter down to 0.01 % for<br />

all scanners (speed <strong>and</strong> load dependent).<br />

Advantages<br />

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Three designs available: aerodynamic, aerostatic, ball beared<br />

For low speed to high speed (up to 50,000 RPM) available<br />

Polygon sizes from 1 inch to 14 inch diameter<br />

Own design allows stability <strong>and</strong> jitter down to 0.01 %<br />

Custom versions available on request<br />

18


Galvanometer <strong>Scan</strong>ners<br />

Galvanometers scanners feature a moving magnet design<br />

with optical position sensors. They can be offered as singleaxis<br />

units or two-axis scan modules. Different galvanometer<br />

models for aperture sizes ranging from 3 mm to 30 mm are<br />

available with different substrates <strong>and</strong> coatings for best optical<br />

performance. Furthermore these galvanometers are as<br />

well being used in addition with polygon scanners for Y-axis<br />

motion <strong>and</strong> compensation of optical errors due to objectives.<br />

For the control of the galvanometer scanners analog or digital<br />

drivers can be chosen depending on your requirements.<br />

Advantages<br />

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Single-axis units or two-axis modules<br />

7 Models for aperture sizes of 3 mm to 30 mm<br />

Variety of st<strong>and</strong>ard mirrors <strong>and</strong> coatings available<br />

Custom coatings on request<br />

Drivers <strong>and</strong> controllers available<br />

19


Lincoln Laser<br />

Optical Modules<br />

Complex scanning requirements in non-typical applications<br />

require very often custom modules. We offer contract manufacturing<br />

with experienced engineers for developing func-<br />

tional sub-modules <strong>and</strong> integration. Any performance increase<br />

of your existing system can also be discussed with us.<br />

Typical Applications<br />

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3D Robotic Vision<br />

3D coordinate measurement<br />

2D Inspection<br />

X-Ray film digitizer<br />

<strong>Scan</strong>ning microdensitometer<br />

20


Polygonal Mirrors<br />

Besides polygonal scanners the polygons are also offered as<br />

single items. The shapes are available as monogons, pyramidal<br />

mirrors <strong>and</strong> perpendicular mirrors. The number of facets<br />

range from 1 to up to 96. The diameter range reaches from<br />

30 mm to roughly 350 mm. These polygons are diamond machined<br />

from 5,052 <strong>and</strong> 6,061 aluminum alloys as well as copper.<br />

We offer conventionally polished polygonal mirrors for<br />

applications where low scatter is critical such as film or UV<br />

scanning applications. These mirrors are constructed of 6,061<br />

aluminum with an electro-less nickel overcoat.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

40 years experience <strong>and</strong> design <strong>and</strong> fabrication <strong>and</strong> quality control methods<br />

Mirror shapes: monogons, pyramidal mirrors <strong>and</strong> perpendicular mirrors<br />

The number of facets range from 1 up to 96<br />

The diameter ranges from about 20 mm up to about 300 mm<br />

Custom versions available<br />

21


OptoSigma<br />

Company Profile<br />

Sigma Koki has grown for over 30 years since its establishment<br />

in 1977. What they have been focusing on is to solidify<br />

their position as a leading company in Japan in Laser Related<br />

Components business, <strong>and</strong> as the company‘s second backbone,<br />

they have been working on the development, production,<br />

<strong>and</strong> sales of st<strong>and</strong>ardized Laser Subsystem Units.<br />

As a result, Sigma Koki has been able to supply valuable<br />

products to customers with consistent technical innovation<br />

based on the know-how <strong>and</strong> actual achievement gained from<br />

work in cooperation with leading Research <strong>and</strong> Development<br />

institutions.<br />

Sigma Koki has also been focusing on widely exp<strong>and</strong>ing its<br />

business fields from supplying products not limited to Semiconductor,<br />

FPD, Optical communication <strong>and</strong> Photovoltaic cell<br />

industries but also to Nanotechnology <strong>and</strong> Biotechnology industries<br />

in accordance with the development <strong>and</strong> expansion<br />

of laser applications. In various scenes of your „Life”, the<br />

technology of light is becoming indispensable.<br />

Furthermore, while setting their sights on being an integrated<br />

optical solution company, they have been providing products<br />

in a wide range from components for optical research<br />

<strong>and</strong> development to units <strong>and</strong> systems for industrial use.<br />

Sigma Koki contribute to development of the technology of<br />

light supporting your „Life”.<br />

Its group unified the global br<strong>and</strong> into „OptoSigma” as part<br />

of its global strategy on January 1, 2014. From now on, business<br />

development is performed to the global market by the<br />

„OptoSigma” br<strong>and</strong>, <strong>and</strong> the mission of optical solution company<br />

is attained.<br />

They continue to strive for steady growth of technological<br />

prowess <strong>and</strong> sales ability of Sigma Koki group by increasing<br />

their global br<strong>and</strong> awareness through their subsidiaries,<br />

OptoSigma Corporation, Shanghai Sigma Koki Co.,Ltd. <strong>and</strong><br />

OptoSigma Europe S.A.S., which opened in April, 2014.<br />

22


Controllers<br />

A variety of OptoSigma controllers in various versions allow<br />

you to choose a solution for best cost performance ratio both<br />

for laboratories <strong>and</strong> for industry applications. One <strong>and</strong> multiaxis<br />

control setups are also provided with master-slave configuration.<br />

You can control stages in open loop control as<br />

well as precise closed loop control. Programming several input<br />

<strong>and</strong> output ports is also possible. Additionally several<br />

drivers <strong>and</strong> h<strong>and</strong>held controls are available to match your<br />

requirements.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Variety of controllers <strong>and</strong> drivers for best cost/performance ratio<br />

1 - 8 axis controllers; joystick, h<strong>and</strong>held controls <strong>and</strong> master slave controllers available<br />

Closed <strong>and</strong> open loop control<br />

Programmable input <strong>and</strong> output ports<br />

Ethernet, RS232, USB <strong>and</strong> GB-IB interfaces<br />

23


OptoSigma<br />

Software<br />

Software solutions are available either for only controlling the<br />

stages <strong>and</strong> components from OptoSigma or as application<br />

software. The ready to use SG Comm<strong>and</strong>er software allows<br />

you to remotely control the axes with a PC/notebook or to use<br />

Excel for simple programming tasks. A LabView sample program<br />

is also available. Application software is recommended<br />

for OptoSigma systems. They allow you to use the measurement<br />

capabilities <strong>and</strong> control more complex systems like the<br />

automated collimation devices from OptoSigma. Even measuring<br />

distances <strong>and</strong> angles based on images is possible with<br />

these types of software. Trial versions are available.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Ready to use st<strong>and</strong>ard software available<br />

LabView sample program available<br />

Application software for systems available<br />

Excel can be used for collecting or processing data<br />

External measuring instrumentation can be integrated for collecting data<br />

24


Actuators<br />

Linear actuators can be chosen from a variety of versions. Different<br />

stroke lengths <strong>and</strong> motor technologies allow to motorize<br />

most of the manual stages <strong>and</strong> optic holders. Low cost DC<br />

motor versions allow high thrust force. Ultrasonically driven<br />

actuators allow fast, silent <strong>and</strong> precise motion. Stepper motor<br />

versions allow the best cost/performance ratio.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Different motor technologies<br />

Nearly all manual OptoSigma products can be equipped with a motorized actuator<br />

Software <strong>and</strong> controllers available<br />

OEM versions also with encoder on request<br />

Fast, silent <strong>and</strong> precise motion by ultrasonically driven actuators<br />

25


OptoSigma<br />

Linear Stepper Motor Stages<br />

Linear stages are available in a 2-phase stepper motor version<br />

as industry st<strong>and</strong>ard as well as in a 5-phase stepper motor<br />

version for very precise <strong>and</strong> smooth runs. These Linear<br />

stages are available in various travel ranges <strong>and</strong> with different<br />

force, payload <strong>and</strong> precision values.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Various travel ranges <strong>and</strong> sizes<br />

Various precision grades<br />

Combinable with several other motorized/manual stages<br />

Open <strong>and</strong> closed loop versions<br />

Custom versions on request<br />

26


Stepping Motor Rotation Stages<br />

OptoSigma offers 5-phase stepper motor rotation stages with<br />

different sizes <strong>and</strong> different bearing types for various precision<br />

levels. The different sized holes allow various optical applications<br />

<strong>and</strong> the addition of optical elements such as polarizers<br />

etc. High load capacities of up to 40 kg are achieved.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Various diameters <strong>and</strong> through holes<br />

Various precision grades <strong>and</strong> load capacities<br />

Combinable with several other motorized/manual stages<br />

Open <strong>and</strong> closed loop versions<br />

Custom versions on request<br />

27


OptoSigma<br />

Motorized Goniometers<br />

SGSP<br />

OSMS<br />

Two kinds of goniometers are available in X <strong>and</strong> XY versions<br />

with different footprints. You can mount the very stable<br />

OSMS version to an XY goniometer by yourself. It provides<br />

high precision <strong>and</strong> superior stiffness, accuracy <strong>and</strong> durability.<br />

The SGSP version can be ordered as X or XY version <strong>and</strong> uses<br />

a 5-phase stepping motor fitted with a crossed roller guide.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Various footprints <strong>and</strong> precision levels<br />

Combinable with several other motorized/manual stages<br />

OSMS-version also upside down usable<br />

Rotational center selectable for SGSP version<br />

Custom versions on request<br />

28


Vacuum Compatible Stages<br />

OptoSigma offers special linear <strong>and</strong> rotary stages for vacuum<br />

environments. These stages are made either of stainless steel<br />

or machined aluminum body. Vacuum rated motors, vacuum<br />

grease <strong>and</strong> Teflon coated cables allow using these stages in up<br />

to 10 -6 mbar vacuum. Also other products like large mirror<br />

mounts are available in vacuum suitable versions on request.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Only vacuum rated components used<br />

Vacuum sealed packaging<br />

Teflon coated cables <strong>and</strong> vacuum grease<br />

Compact slim body for space-saving<br />

Custom versions on request<br />

29


OptoSigma<br />

Ultrasonic Driven Products<br />

For very fast, silent <strong>and</strong> precise motion OptoSigma developed<br />

a new series of Ultrasonic products. Mirror holders, linear<br />

stages <strong>and</strong> actuators can be chosen as catalogue products.<br />

Custom OEM versions are also available. We recommend us-<br />

ing the OptoSigma controller for these products. The ultrasonic<br />

drive is very fast compared to Piezo technology. Additionally,<br />

friction of the drives is quite high, so that a stable position<br />

can usually be held also when power is off for transport, etc.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Fast, silent, precise motion<br />

Strong self friction<br />

Very compact design<br />

Selection between coarse <strong>and</strong> very fine adjustment<br />

OEM versions also with encoder on request<br />

30


Sigma Fine Piezo Stages<br />

A variety of piezo stages allow positioning with finest resolution<br />

<strong>and</strong> highest accuracy levels. Very high precision of the<br />

guides allow smallest Pitch, Yaw <strong>and</strong> Roll errors as well as<br />

other linear error contributors. Available products are X, XY, Z<br />

stages as well as an XY aperture stages <strong>and</strong> objective holders.<br />

The combination with digital sensors allow a high speed<br />

closed loop mode with readable resolution of 10 nm.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Available in X, XY, Z, XYZ, XY-aperture <strong>and</strong> objective holder setup<br />

Finest resolution (1 nm, open loop) <strong>and</strong> travel of up to 100 µm with highest accuracies<br />

High speed closed loop versions with additional digital sensors (10 nm resolution)<br />

OEM versions also with encoder on request<br />

Very compact design<br />

31


TEM Messtechnik<br />

Company Profile<br />

32<br />

The TEM Messtechnik GmbH is an innovative medium-sized<br />

company in Hannover. It was established in 1988 <strong>and</strong> changed<br />

to a GmbH (Ldt.) in 1998. The team of about 10 employees is<br />

headed by Dr. Thomas Müller-Wirts (CEO). The team around<br />

Dr. Thomas Müller-Wirts is specialized in converting scientific<br />

results <strong>and</strong> ideas into real-world applications.<br />

For many years, they have convinced with fundamental<br />

knowledge <strong>and</strong> innovative ideas. Numerous national <strong>and</strong> international<br />

references prove the cutting-edge <strong>and</strong> solutionoriented<br />

skills. The development process goes from the first<br />

idea to the production-ready solution <strong>and</strong> includes customer<br />

specific adaption of the st<strong>and</strong>ard products, new development<br />

at the electronic devices, analog <strong>and</strong> digital solutions,<br />

OEM-boards, modular systems or st<strong>and</strong>-alone devices.<br />

The development process goes from the first idea to the production-ready<br />

solution. It includes customer specific adaption<br />

of the st<strong>and</strong>ard products, the development of new electronic<br />

devices, analog <strong>and</strong> digital solutions, OEM boards, modular<br />

system or st<strong>and</strong>-alone devices. A focal point is on the high precision<br />

<strong>and</strong> fast regulators for the resonator length (or wavelength<br />

selection elements inside of the resonator) of tunable<br />

lasers <strong>and</strong> thus for the wavelength of the emitted light. The employed<br />

interferometric <strong>and</strong> spectroscopical wavelength sensors<br />

belong to the products of TEM Messtechnik as well as: PID<br />

regulators, lock-in regulators, RF modulation techniques, current<br />

sources, temperature controllers, scan generators, high<br />

voltage piezo amplifiers, photo diode amplifiers, automatic fiber<br />

couplers. The interferometrically controlled, 1,000 GHz<br />

mode-hop free tuning of DFB-laser diodes is an example for<br />

these activities.<br />

TEM Messtechnik right from the beginning aimed at the development<br />

of special solutions for scientific <strong>and</strong> industrial<br />

applications in physics, chemistry <strong>and</strong> medicine:<br />

• Measurement <strong>and</strong> control systems<br />

• Data recording <strong>and</strong> processing<br />

• Diode laser systems<br />

• Optoelectronics<br />

• Laser stabilization<br />

• High precision mechanics


Fields of Activity<br />

TEM Messtechnik’s main activities are in the following fields<br />

Laser Electronics<br />

• Diode laser drivers, laser diode modulators, scan generators,<br />

high voltage piezo amplifiers, temperature controllers<br />

• USB programmable all-in-one-systems<br />

• Customer specific solutions<br />

Optical Measuring Technique<br />

• Interferometric <strong>and</strong> atomic frequency references for<br />

tunable lasers<br />

• Single-mode <strong>and</strong> mode-hop detectors for tunable lasers<br />

• Position/polarization sensitive detectors<br />

• Lock-in detection<br />

• RF modulation techniques<br />

• Laser line width measurement tools<br />

• Distance sensors<br />

Control Engineering<br />

• High precision interferometrical frequency regulators<br />

for tunable laser<br />

• Laser power stabilization<br />

• Laser beam position/pointing stabilization<br />

• Automatic single-mode fiber coupler<br />

• Phase- <strong>and</strong> frequency control e.g. for pulsed lasers<br />

Development Service<br />

• Cstomer specific adaption of our st<strong>and</strong>ard products<br />

• Development of electronic devices<br />

• Analogue <strong>and</strong> digital solutions<br />

• OEM boards<br />

• Modular systems or st<strong>and</strong>-alone devices<br />

• From the first idea to the production-ready solution<br />

Automation<br />

• Development of extensive test devices <strong>and</strong> test st<strong>and</strong>s<br />

Measuring data recording <strong>and</strong> processing<br />

• Software for measuring data recording by means of micro<br />

controller <strong>and</strong> PC (e.g. AD-/DA converter, RS 232, USB<br />

Ethernet)<br />

• Software for real-time applications on micro controller<br />

68k, 8051-derivatives, AVR32), Programming in assembler,<br />

C++, visual basic <strong>and</strong> GB32<br />

• LabView drivers <strong>and</strong> virtual instruments<br />

Scientific <strong>and</strong> technical consulting<br />

• High competence consulting in the fields of: tunable<br />

lasers, interferometry, laser distance measurement,<br />

spectroscopy, sensor electronics, laser driver <strong>and</strong><br />

stabilization electronics, power supplies<br />

• Close relationship to universities <strong>and</strong> research institutions<br />

33


TEM Messtechnik<br />

Automated Alignment <strong>and</strong> <strong>Scan</strong>ning System<br />

TEM Messtechnik provides with the Aligna a fully automated<br />

high precision laser beam alignment <strong>and</strong> stabilization system.<br />

Due to the modular platform you can extend it for controlling<br />

up to four beams at all wave length. The system is<br />

scanning with stepper motors <strong>and</strong> piezo actuators. With the<br />

high control b<strong>and</strong>width it is possible to attenuate vibrations<br />

<strong>and</strong> fluctuations just as to compensate drifts. In addition the<br />

piezo scanners are used for very fast scanning application<br />

like trepan drilling or high precision material processing.<br />

Other applications are compensation of laser drifts at trepanning<br />

optics, switching of one laser between several applications<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

2D <strong>and</strong> 4D scanning with motorized <strong>and</strong> piezo actuators (position X,Y, angle X,Y)<br />

Self learning parameter settings<br />

High speed: up to 5 kHz servo b<strong>and</strong>width<br />

Fully automated high precision beam alignment<br />

Fully computer control (USB, serial, Ethernet) <strong>and</strong> fully autarkic operation<br />

34


Piezo Drivers <strong>and</strong> Piezo Mirrors<br />

TEM Messtechnik supplies a fast multi-channel high voltage amplifier<br />

in a compact design <strong>and</strong> different versions. They are especially<br />

developed for low-noise driving of piezoelectric actuators.<br />

Electronic filters serve to suppress mechanical resonance effects.<br />

Both gain factor <strong>and</strong> DC output level are individually user<br />

adjustable for each channel by means of potentiometers. By a<br />

second order filter at each amplifier resonances in piezo driven<br />

systems can be suppressed. Thus, servo loops show significantly<br />

better performance. A large variety of piezo mirror holders<br />

with diverse properties for different applications is available.<br />

Mirror holders with a combination of motorized <strong>and</strong> piezo actuators<br />

are used to combine the advantages of both techniques.<br />

Advantages<br />

01<br />

02<br />

03<br />

04<br />

05<br />

Resonances suppressed by electronics<br />

High speed (up to 10 kHz)<br />

Low noise<br />

Multi channels<br />

Flexible mirror sizes <strong>and</strong> properties<br />

35


Zaber Technologies<br />

Company Profile<br />

How Zaber got its start<br />

Zaber Technologies was founded in 1997 by a group of<br />

friends with diverse interests in electro-mechanical systems,<br />

programming, <strong>and</strong> physics. Back then, precision linear actuators<br />

all used DC motors with gearboxes <strong>and</strong> encoders, <strong>and</strong><br />

they required complicated motion control cards, bulky controllers,<br />

separate driver amplifiers, <strong>and</strong> special power supplies.<br />

Precision motion control was expensive, difficult to set<br />

up, <strong>and</strong> cumbersome to use.<br />

Where we are today<br />

Since the introduction of our first linear actuator, the T-LA28,<br />

we have exp<strong>and</strong>ed our offerings to include over 100 motion<br />

control products distributed worldwide. Researchers, engineers,<br />

distributors, systems integrators, <strong>and</strong> OEMs have<br />

come to appreciate our innovative products <strong>and</strong> excellent<br />

support. We continue to advance our in-house manufacturing<br />

processes allowing us to build, test, <strong>and</strong> ship most of our<br />

products within 3 - 5 business days.<br />

Zaber’s founders recognized the need for an inexpensive, integrated<br />

solution for motion control. They wanted to make<br />

motion control products that were easy to set up <strong>and</strong> ready<br />

to use right out of the box, so they created the world’s first<br />

precision linear actuator with a built-in controller. It was<br />

based on a stepper motor instead of a DC motor, gearbox,<br />

<strong>and</strong> encoder combination. The integration of all control <strong>and</strong><br />

drive electronics in the same package became the foundation<br />

of Zaber’s T-Series product line.<br />

36


About our Products<br />

Built-in controllers simplify your set-up<br />

Many of our devices are designed with built-in controllers<br />

<strong>and</strong> drivers (<strong>and</strong> some with encoders), which reduces your<br />

cost, overall device footprint, <strong>and</strong> cable clutter. Don’t want<br />

the integrated controllers? We have versions compatible with<br />

our external controllers too.<br />

The choice is yours: enjoy complete automation<br />

through computer control, or use manual control<br />

Zaber devices are perfect for automating your positioning<br />

needs. Our free software allows you to send single comm<strong>and</strong>s<br />

or complex sequences. Most models offer a manual<br />

control knob so that when you want to, you can position your<br />

device by h<strong>and</strong> as well. The speed varies depending on how<br />

far you turn the knob in either direction, <strong>and</strong> the computer<br />

will continue to track the device’s position throughout a manual<br />

move.<br />

Integrated motor, controller, <strong>and</strong> driver in a small package.<br />

We’ve got the accessories you need<br />

Most Zaber products use st<strong>and</strong>ard 15 V wall-mounted power<br />

supplies, <strong>and</strong> we offer suitable alternatives to match the input<br />

voltage in different regions around the world. Kit versions<br />

of Zaber products come complete with a power supply,<br />

a six-foot cable, <strong>and</strong> a serial port adaptor. Devices are also<br />

available for purchase without accessories. We can also help<br />

you choose the right cables, power supplies, or any other optional<br />

items. You can find a list of accessories for each device<br />

on our website, www.zaber.com.<br />

Control options include computer, joystick, <strong>and</strong> manual control knobs.<br />

The environment is important to us<br />

It’s important to us to minimize any negative impact we may<br />

have on the environment <strong>and</strong> on the health <strong>and</strong> safety of our<br />

communities. We are continually improving our devices to<br />

reduce the use of any hazardous substances, <strong>and</strong> our products<br />

are RoHS compliant. The packaging we use is recyclable<br />

in most regions. If you have any suggestions for how we can<br />

further reduce the environmental impact of our products or<br />

activities, we would be happy to hear from you!<br />

Most devices are available as kits containing common accessories required<br />

for set-up.<br />

37


Zaber Technologies<br />

Our products<br />

Automate precision positioning tasks quickly <strong>and</strong><br />

easily with Zaber products<br />

We offer an extensive line of computer-controlled linear actuators,<br />

linear stages, rotary stages, mirror mounts, motors,<br />

<strong>and</strong> other devices. Many of Zaber’s products have built-in<br />

controllers <strong>and</strong> can be daisy-chained <strong>and</strong> controlled from a<br />

single serial port. Whether you need a single device or want<br />

to seamlessly combine several units in a multi-axis set-up,<br />

Zaber’s motion control equipment is ideal for a broad range<br />

of precision positioning applications.<br />

Linear devices<br />

Linear actuators<br />

with built-in controllers<br />

Miniature linear stages<br />

with built-in controllers<br />

Multi-Axis devices<br />

Long-travel linear stages<br />

with built-in controllers<br />

Manual translation stages<br />

Tilt<br />

Joysticks<br />

Multi-axis systems<br />

with built-in controllers<br />

Gantry systems<br />

Optic mounts<br />

with built-in controllers<br />

Programmable joysticks<br />

Vacuum devices<br />

Rotary devices<br />

Controllers<br />

Vacuum stages <strong>and</strong> actuators<br />

with built-in controllers<br />

Rotary stages<br />

with built-in controllers<br />

Single axis stepper<br />

motor controllers<br />

Two-axis stepper<br />

motor controllers with I/O<br />

38


Detailed information in the Zaber Catalogue<br />

39


Passion<br />

for<br />

Photonics<br />

Service & Support<br />

Photonics<br />

FiberOptics & Networks<br />

Laser <strong>Systems</strong> & Solutions<br />

Academy<br />

Laser 2000 GmbH | Tel. +49 8153 405-0 | info@laser2000.de | www.laser2000.de

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