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Semrock Master Catalog 2018

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MaxLamp TM Mercury Line Filters<br />

Polarizers<br />

Mirrors NIR Filters<br />

Edge<br />

Filters<br />

Dichroic<br />

Beamsplitters<br />

Laser-line<br />

Filters<br />

Laser Diode<br />

Filters<br />

Notch<br />

Filters<br />

Lamp Clean-up<br />

Filters<br />

Mercury<br />

Line<br />

Common Specifications<br />

These ultra-high-performance MaxLamp mercury line filters are ideal for use with high-power<br />

mercury arc lamps for applications including spectroscopy, optical metrology, and<br />

photolithography mask-aligner and stepper systems. Maximum throughput is obtained by<br />

careful optimization of the filter design to allow for use in a variety of different applications.<br />

The non-absorbing blocking ensures that all other mercury lines, as well as intra-line intensity,<br />

are effectively eliminated.<br />

High transmission > 65% in the UV and > 93% in the Near-UV<br />

Steep edges for quick transitions<br />

Exceptional blocking over large portions of visible spectrum<br />

Property Value Comment<br />

Guaranteed Transmission<br />

253.7 nm > 65%<br />

365.0 nm > 93%<br />

Averaged over the passband, see table above<br />

Angle of Incidence<br />

0˚ ± 7˚<br />

Range of angles over which optical specifications are given for<br />

collimated light<br />

Cone Half Angle 10˚ For uniformly distributed non-collimated light<br />

Autofluorescence Ultra-low Fused silica substrate<br />

Outer Diameter<br />

Transmission<br />

and Passband<br />

253.7 nm > 65%<br />

244 - 256 nm<br />

365.0 nm > 93%<br />

360 - 372 nm<br />

UV<br />

Blocking<br />

OD avg<br />

> 6:<br />

200 - 236 nm<br />

OD avg<br />

> 6:<br />

200 - 348 nm<br />

Blue<br />

Blocking<br />

OD avg<br />

> 4:<br />

263 - 450 nm<br />

OD avg<br />

> 5:<br />

382 - 500 nm<br />

ACTUAL MEASURED DATA SHOWN<br />

Transmission (% and OD)<br />

100%<br />

50%<br />

10%<br />

OD 1<br />

OD 2<br />

OD 3<br />

OD 4<br />

OD 5<br />

OD 6<br />

200 250 300 350 400 450 500 550 600<br />

Wavelength (nm)<br />

254 nm filter<br />

25.0 + 0.0 / - 0.1 mm<br />

(or 50.0 + 0.0 / -0.1 mm)<br />

Red<br />

Blocking<br />

OD avg<br />

> 2:<br />

450 - 600 nm<br />

OD avg<br />

> 2:<br />

500 - 700 nm<br />

25 mm<br />

Diameter<br />

Part Number<br />

Black anodized aluminum ring<br />

Overall Thickness 3.5 mm + 0.1mm Black anodized aluminum ring<br />

Clear Aperture ≥22 mm (or ≥ 45 mm) For all optical specifications<br />

Surface Quality 80-50 scratch-dig Measured within clear aperture<br />

All other mechanical specifications are the same as MaxLine ® specifications on page 99<br />

Transmission (% and OD)<br />

Price<br />

50 mm<br />

Diameter Part<br />

Number<br />

Price<br />

Hg01-254-25 $455 Hg01-254-50 $1285<br />

Hg01-365-25 $355 Hg01-365-50 $1005<br />

100%<br />

50%<br />

10%<br />

OD 1<br />

OD 2<br />

OD 3<br />

OD 4<br />

OD 5<br />

OD 6<br />

200 250 300 350 400 450 500<br />

Wavelength (nm)<br />

365 nm filter<br />

550<br />

600<br />

650 700<br />

More<br />

106

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