Applications for Maskless E-Beam Lithography between ... - Sematech
Applications for Maskless E-Beam Lithography between ... - Sematech
Applications for Maskless E-Beam Lithography between ... - Sematech
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Summary<br />
• VSB E-<strong>Beam</strong> <strong>Lithography</strong> established in Dresden<br />
• Patterning Ready <strong>for</strong> Internal and External Customers<br />
• Use <strong>for</strong> 300mm applications <strong>for</strong> future device and technology<br />
learning<br />
• Use of FhG network and National / European funding <strong>for</strong><br />
process development<br />
• Process-learning <strong>for</strong> future mask-less litho tools<br />
• Strong potential <strong>for</strong> mask-less lithography in R&D<br />
Qimonda · Johannes Kretz · QD P RDC EBEAM · May 24, 2006 · Page 26 Confidential
Change language