Effect of Wetting Time on CD Uniformity in Immersion Lithography
Effect of Wetting Time on CD Uniformity in Immersion Lithography
Effect of Wetting Time on CD Uniformity in Immersion Lithography
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Objective<br />
IBM Systems and Technology Group<br />
1. Characterize the spatial distributi<strong>on</strong> <str<strong>on</strong>g>of</str<strong>on</strong>g> wett<strong>in</strong>g time<br />
2. Determ<strong>in</strong>e impact <str<strong>on</strong>g>of</str<strong>on</strong>g> short durati<strong>on</strong> wett<strong>in</strong>g <strong>on</strong> resist pr<str<strong>on</strong>g>of</str<strong>on</strong>g>iles<br />
– Correlate change <strong>in</strong> <strong>CD</strong> with wett<strong>in</strong>g time<br />
3. Assess c<strong>on</strong>tributi<strong>on</strong> <str<strong>on</strong>g>of</str<strong>on</strong>g> wett<strong>in</strong>g time <strong>on</strong> <strong>CD</strong> variati<strong>on</strong><br />
5 <str<strong>on</strong>g>Effect</str<strong>on</strong>g> <str<strong>on</strong>g>of</str<strong>on</strong>g> <str<strong>on</strong>g>Wett<strong>in</strong>g</str<strong>on</strong>g> <str<strong>on</strong>g>Time</str<strong>on</strong>g> <strong>on</strong> <strong>CD</strong>U - Kaushal Patel September 13, 2005<br />
© 2003 IBM Corporati<strong>on</strong>