Effect of Wetting Time on CD Uniformity in Immersion Lithography
Effect of Wetting Time on CD Uniformity in Immersion Lithography
Effect of Wetting Time on CD Uniformity in Immersion Lithography
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IBM Systems and Technology Group<br />
Acknowledgment<br />
� IBM<br />
– Pushkara Rao Varanasi<br />
– Kurt Kimmel<br />
– George Gomba<br />
� ASML<br />
– Robert Watso<br />
– Bill Piers<strong>on</strong><br />
� Albany Nanotech Operati<strong>on</strong>s Team<br />
26 <str<strong>on</strong>g>Effect</str<strong>on</strong>g> <str<strong>on</strong>g>of</str<strong>on</strong>g> <str<strong>on</strong>g>Wett<strong>in</strong>g</str<strong>on</strong>g> <str<strong>on</strong>g>Time</str<strong>on</strong>g> <strong>on</strong> <strong>CD</strong>U - Kaushal Patel September 13, 2005<br />
© 2003 IBM Corporati<strong>on</strong>
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