Effect of Wetting Time on CD Uniformity in Immersion Lithography
Effect of Wetting Time on CD Uniformity in Immersion Lithography
Effect of Wetting Time on CD Uniformity in Immersion Lithography
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
IBM Systems and Technology Group<br />
Analysis <str<strong>on</strong>g>of</str<strong>on</strong>g> <strong>CD</strong> Variati<strong>on</strong><br />
-<br />
- Interfield (AWLV)<br />
Raw Data<br />
Standardize<br />
Intrafield (ACLV)<br />
c<strong>on</strong>tributi<strong>on</strong>s<br />
c<strong>on</strong>tributi<strong>on</strong>s<br />
Scan directi<strong>on</strong><br />
<str<strong>on</strong>g>Wett<strong>in</strong>g</str<strong>on</strong>g> time<br />
Residual<br />
Illustrati<strong>on</strong>: Resist A / Topcoat TC1, 250 mm/s<br />
Plot <strong>CD</strong> distributi<strong>on</strong> versus wett<strong>in</strong>g times<br />
Top Top <strong>CD</strong><br />
-1<br />
-2<br />
0 1 2<br />
Pre-Wet <str<strong>on</strong>g>Time</str<strong>on</strong>g> (s)<br />
18 <str<strong>on</strong>g>Effect</str<strong>on</strong>g> <str<strong>on</strong>g>of</str<strong>on</strong>g> <str<strong>on</strong>g>Wett<strong>in</strong>g</str<strong>on</strong>g> <str<strong>on</strong>g>Time</str<strong>on</strong>g> <strong>on</strong> <strong>CD</strong>U - Kaushal Patel September 13, 2005<br />
3<br />
2<br />
1<br />
0<br />
3<br />
3<br />
Z = (Z 0 – Zs)e )e-t/ t/τ + Z<br />
Top <strong>CD</strong><br />
2<br />
1<br />
0<br />
-1<br />
-2<br />
0 0.2 0.4 0.6 0.8<br />
Post-Wet <str<strong>on</strong>g>Time</str<strong>on</strong>g> (s)<br />
+ Z s<br />
τ = 0.88s τ = 0.17s τ = 0.54s<br />
Top <strong>CD</strong><br />
2<br />
1<br />
0<br />
-1<br />
-2<br />
0 1 2<br />
Total-Wet <str<strong>on</strong>g>Time</str<strong>on</strong>g> (s)<br />
Pre-Wet <str<strong>on</strong>g>Time</str<strong>on</strong>g> Post-Wet <str<strong>on</strong>g>Time</str<strong>on</strong>g> Total-Wet <str<strong>on</strong>g>Time</str<strong>on</strong>g><br />
Fit<br />
© 2003 IBM Corporati<strong>on</strong>