Development Progress of high refractive LuAG for Hyper ... - Sematech
Development Progress of high refractive LuAG for Hyper ... - Sematech
Development Progress of high refractive LuAG for Hyper ... - Sematech
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SCHOTT Lithotec<br />
1 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
Status <strong>of</strong> High Index Lens Material<br />
´<br />
<strong>Development</strong> <strong>Progress</strong> <strong>of</strong> <strong>high</strong><br />
<strong>refractive</strong> <strong>LuAG</strong> <strong>for</strong> <strong>Hyper</strong> NA<br />
Immersion Systems<br />
Lutz Parthier, Gunther Wehrhan, Dietmar Keutel,<br />
Tilo Aichele, Marcus Ansorg<br />
SCHOTT Lithotec
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Outline<br />
� Current focus areas <strong>of</strong> <strong>Development</strong><br />
� <strong>Development</strong> Status<br />
� Absorption<br />
� Growth Technology<br />
� Stress Birefringence<br />
� Homogeneity<br />
� Roadmap<br />
� Summary and Outlook<br />
2 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec<br />
3 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
Status <strong>of</strong> High Index Lens Material<br />
Objective: Provide full size <strong>LuAG</strong>-Lens Blank in 2009<br />
Main activities focused on critical development areas:<br />
� Transmission: - Raw materials purity<br />
- Identification and elimination <strong>of</strong> process<br />
and handling contaminations<br />
- Crucible impurities reduction<br />
� Homogeneity<br />
� Czochralski Growth: - Flat Interface<br />
- Striation free growth<br />
� Alternative Growth: - Establish second growth method<br />
- Evaluation process window<br />
� Annealing Process: - Global stress relaxation
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Outline<br />
� Current focus areas <strong>of</strong> <strong>Development</strong><br />
� <strong>Development</strong> Status<br />
� Absorption<br />
� Growth Technology<br />
� Stress Birefringence<br />
� Homogeneity<br />
� Summary and Outlook<br />
4 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
New crucible quality meets the requirements and has no<br />
further considerable impact on the crystal quality<br />
Impurity<br />
E1<br />
Impurity<br />
E2<br />
Supplier<br />
1<br />
� The achieved purity <strong>of</strong> the crucible reduced the predominance <strong>of</strong> the crucible<br />
impurities on the crystal absorption!<br />
5 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
Supplier<br />
2<br />
Crucible Ir/Re<br />
Supplier<br />
3<br />
Supplier<br />
4<br />
Ir Ir Ir Re Ir<br />
Target<br />
>20x >20x >10 3.4x (0.15-0.8)x x<br />
>6 >6 >4 1.4 (0.05-0.2)x x
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Significant <strong>Progress</strong> in Raw Material Quality achieved<br />
Impurity Jan. 06 Dez. 06 Feb. 07 Feb. 07 Mrz. 07 Jan. 06 Mrz. 07 Nov. 06 Jan. 07 Sep. 07<br />
Element 6N 6N+ 6N 6N+<br />
E1 42x 16x 8.4x 4x (1.4-7)x 3.2x 1x 1.6x 1x 0.4x x<br />
E2 6x 6.4x
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
<strong>Progress</strong> in Transmission could be achieved, but<br />
Improvement behind Schedule<br />
Transmission [%]<br />
90<br />
80<br />
70<br />
60<br />
50<br />
40<br />
30<br />
20<br />
10<br />
7 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
0<br />
New Champion - after charge transfer<br />
New Champion - as grown<br />
Old Champion - after charge transfer<br />
Old Champion - as grown<br />
T theor. [%]<br />
Sample thickness 10mm!<br />
190 240 290 340 390 440 490<br />
Wavelength [nm]<br />
� Absorption reduced from 0.20cm -1 to 0.11cm -1 (about 80% internal<br />
Transmission), but not meeting target: 0.05cm -1<br />
� However remarkable absorption @ 256nm was still observed and is<br />
impacting the absorption at @193nm significantly!<br />
� Impurity elements causing the absorption are well known
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Al 2 O 3 raw material limiting transmission currently,<br />
contamination sources have to be eliminated<br />
Crucible<br />
grade<br />
� Instead <strong>of</strong> a <strong>high</strong>er purity <strong>of</strong> both crucible and Lu 2 O 3 , the absorption <strong>of</strong> the<br />
crystal is not improved adequately<br />
� Purity level <strong>of</strong> Al 2 O 3 raw material seems to dominate the absorption loss<br />
� Based on <strong>high</strong> resolution chemical analysis (GDMS) a root cause analysis<br />
indicated further impurity sources (e.g. insulation ceramics in the hot zone<br />
region <strong>of</strong> the growth station)<br />
8 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
Raw Material Grown Crystal [ppm]<br />
Impact<br />
Absorption<br />
Lu 2O 3 Al 2O 3 E1 E2 E3 E4 k 0 [cm -1 ]<br />
2006 mid 6N+ 6N 6x 8x 3x 40x 0.2<br />
05/07 <strong>high</strong> 6N+ 6N+ 4x 2x x 10x 0.12<br />
09/07 <strong>high</strong> 6N++ 6N+ 4x 1.5x x 19x 0.10
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Al 2 O 3 Impurity Analysis: Target Spec <strong>for</strong> each Process<br />
step at the Key Supplier will be defined soon<br />
Al(OH) 3 Al 2 (SO 4 ) 3 (NH 4 )Al(SO 4 ) 2 Al 2 O 3<br />
Status: Strong fluctuations <strong>of</strong> Fe<br />
New impurity target: is defined<br />
Improvement Potentials:<br />
1. Using <strong>high</strong>er purity acid<br />
2. Replace reaction Container by <strong>high</strong>er quality<br />
3. Using <strong>high</strong>er purity pre-product<br />
4. 2x recrystalization,<br />
Realization time: 3 -4 months<br />
9 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
1 2 3 4
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Availability <strong>of</strong> <strong>high</strong> purity Materials in all process steps<br />
are crucial <strong>for</strong> the Reduction <strong>of</strong> <strong>LuAG</strong> Absorption<br />
� Raw materials<br />
� Despite <strong>of</strong> a tightening <strong>of</strong> the specification Lu2O3 in required<br />
quality and sufficient quantity is available<br />
� Al2O3 purity improved, but not stable and insufficient; further<br />
improvement required and addressed at supplier<br />
� Introduction <strong>of</strong> additional Al2O3 purification process at Schott<br />
necessary to push progress<br />
� Crucible<br />
� Quality <strong>of</strong> crucible from alternative manufacturing process fulfils<br />
requirements<br />
� Surrounding materials<br />
� By GDMS analysis identified potential contamination sources in<br />
the hot zone regions have to be replaced or eliminated<br />
� Handling<br />
� Improved cleanliness over the complete process chain to<br />
keep impurity level <strong>of</strong> the raw materials<br />
10 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Outline<br />
� Current focus areas <strong>of</strong> <strong>Development</strong><br />
� <strong>Development</strong> Status<br />
� Absorption<br />
� Growth Technology<br />
� Stress Birefringence<br />
� Homogeneity<br />
� Summary and Outlook<br />
11 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Czochralski Growth Process -<br />
“Core free” growth is also demonstrated <strong>for</strong> <strong>LuAG</strong> crystal now<br />
12 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
<br />
No defect propagation<br />
and/or generation at<br />
interface transition<br />
<br />
� “Core free” growth <strong>of</strong> first “flat” Czochralski grown<br />
<strong>LuAG</strong> crystal with dia 80 mm and 160mm length<br />
YAG<br />
02/07
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Full demonstrator size <strong>LuAG</strong> crystal grown<br />
� Current available modified Czochralski growth station allows to grow<br />
crystal size up to 300mm in length and 80mm in diameter<br />
13 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Status Alternative Growth Process<br />
� Two new growth station <strong>for</strong> alternative growth process with two<br />
different material combinations (crucible – heater – insulation)<br />
designed and installed<br />
� First experiments carried out at station#1 show comparable<br />
results regarding transmission to the Czochralski grown<br />
crystals (using same raw material grade).<br />
� Process development started and supported by simulation<br />
� In both growth station <strong>high</strong> purity crucible made from different<br />
materials were used<br />
� Decision <strong>for</strong> growth method end <strong>of</strong> 2007<br />
14 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Outline<br />
� Current focus areas <strong>of</strong> <strong>Development</strong><br />
� <strong>Development</strong> Status<br />
� Absorption<br />
� Growth Technology<br />
� Stress Birefringence<br />
� Homogeneity<br />
� Summary and Outlook<br />
15 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
SBR as grown quality at Schott (flat interface YAG) is<br />
close to the target specification<br />
145<br />
149<br />
153<br />
157<br />
161<br />
166<br />
Evalu. Diameter: 65mm Evalu. Diameter: 40mm<br />
RMS: 2.89 nm/cm RMS: 0.73 nm/cm<br />
PV: 22.15 nm/cm PV: 1.83 nm/cm<br />
16 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
170<br />
174<br />
178<br />
182<br />
x [mm]<br />
186<br />
190<br />
194<br />
198<br />
203<br />
207<br />
211<br />
215<br />
72<br />
68<br />
64<br />
60<br />
55<br />
51<br />
47<br />
43<br />
39<br />
35<br />
31<br />
27<br />
23<br />
18<br />
14<br />
10<br />
6<br />
2<br />
y [mm]<br />
145<br />
149<br />
9,5-10,0<br />
9,0-9,5<br />
8,5-9,0<br />
8,0-8,5<br />
7,5-8,0<br />
7,0-7,5<br />
6,5-7,0<br />
6,0-6,5<br />
5,5-6,0<br />
5,0-5,5<br />
4,5-5,0<br />
4,0-4,5<br />
3,5-4,0<br />
3,0-3,5<br />
2,5-3,0<br />
2,0-2,5<br />
1,5-2,0<br />
1,0-1,5<br />
0,5-1,0<br />
0,0-0,5<br />
-0,5-0,0<br />
153<br />
157<br />
[nm/cm]<br />
161<br />
166<br />
170<br />
Defect<br />
174<br />
178<br />
182<br />
x [mm]<br />
186<br />
190<br />
194<br />
198<br />
203<br />
207<br />
211<br />
215<br />
72<br />
68<br />
64<br />
60<br />
55<br />
51<br />
47<br />
43<br />
39<br />
35<br />
31<br />
27<br />
23<br />
18<br />
14<br />
10<br />
6<br />
2<br />
y [mm]<br />
9,5-10,0<br />
9,0-9,5<br />
8,5-9,0<br />
8,0-8,5<br />
7,5-8,0<br />
7,0-7,5<br />
6,5-7,0<br />
6,0-6,5<br />
5,5-6,0<br />
5,0-5,5<br />
4,5-5,0<br />
4,0-4,5<br />
3,5-4,0<br />
3,0-3,5<br />
2,5-3,0<br />
2,0-2,5<br />
1,5-2,0<br />
1,0-1,5<br />
0,5-1,0<br />
0,0-0,5<br />
-0,5-0,0<br />
[nm/cm]<br />
Polariscopic<br />
picture
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Outline<br />
� Current focus areas <strong>of</strong> <strong>Development</strong><br />
� <strong>Development</strong> Status<br />
� Absorption<br />
� Growth Technology<br />
� Stress Birefringence<br />
� Homogeneity<br />
� Summary and Outlook<br />
17 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Enhanced growth process leads to further significant<br />
Improvement <strong>of</strong> Homogeneity – close to the final Spec<br />
� YAG flat interface dia. 80 mm – as grown (30mm thickness)<br />
Feb 2007<br />
Residuals (substr. Z36): PV = 1.16 E-6 dn<br />
RMS = 0.12 E-6 dn<br />
� Achieved 02/07: 0.12 ppm RMS @ dia. 80mm<br />
� Achieved 09/07 0.029 ppm RMS @ dia 45mm<br />
18 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
Sep 2007<br />
PV = 4.91E-7 dn<br />
RMS = 2.94E-8 dn
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Outline<br />
� Current focus areas <strong>of</strong> <strong>Development</strong><br />
� <strong>Development</strong> Status<br />
� Absorption<br />
� Growth Technology<br />
� Stress Birefringence<br />
� Homogeneity<br />
� Summary and Outlook<br />
19 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Summary and Outlook<br />
� Drawbacks and Highlights<br />
� Transmission progress behind schedule - requires strong ef<strong>for</strong>ts to<br />
meet the MS in Q1/08 ( A: 0.01cm-1 )<br />
� Absorption reduction requires additional measures especially <strong>for</strong><br />
Al2O3 addressed at supplier<br />
� Additional Al2O3 purification step at Schott shall secure the<br />
required improvement<br />
� Homogeneity<br />
� Stress birefringence and homogeneity progress is much faster<br />
than expected and close to the final target<br />
� All required equipment <strong>for</strong> yellow phase (growth and annealing) is in<br />
place and running or in acceptance process<br />
20 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Revised <strong>LuAG</strong> Roadmap: 1st Lens Blank in Q4/09<br />
� Realization <strong>of</strong> required improvement measures at Al 2O 3 raw material<br />
supplier delayed <strong>LuAG</strong> Roadmap by 3 months<br />
21 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007<br />
2006 2007 2008<br />
Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2<br />
Candidate <strong>LuAG</strong> found<br />
Feasibility Study<br />
Pre-<strong>Development</strong><br />
Crystal ∅ 80mm<br />
<strong>Development</strong> Production<br />
Crystal ∅ ~ 250mm<br />
Transmission / Durability will not to be showstopper<br />
LLE <strong>LuAG</strong> <strong>Development</strong> possible<br />
First promising Demo Sample<br />
First suitable <strong>LuAG</strong> Blank<br />
Decision <strong>for</strong><br />
growth method<br />
2009<br />
First good Demonstrator A=0.01 cm -1<br />
Optimistic<br />
Q3 Q4<br />
Realistic<br />
A≤0.005 cm -1
SCHOTT Lithotec Status <strong>of</strong> High Index Lens Material<br />
Acknowledgements<br />
<strong>LuAG</strong> <strong>Development</strong> at SCHOTT Lithotec - Participation and Funding<br />
� Canon Inc.<br />
� Carl Zeiss SMT AG<br />
� Nikon Corporation<br />
� SEMATECH<br />
22 4th Int‘l Symp.Immersion Lithography<br />
Keystone, CO, October 9, 2007