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<strong>MEMS</strong> <strong>PRESSURE</strong> <strong>RELIEF</strong> <strong>VALVE</strong><br />
The <strong>MEMS</strong> Pressure Relief Valve (MPRV) is a safety<br />
device for pressurised system. The MPRV can be opened<br />
either actively by an electrical signal, or passively, by a<br />
burst membrane.<br />
<strong>MEMS</strong> products<br />
The MPRV also has a check valve closing again when the<br />
pressure returns to the nominal value.
<strong>MEMS</strong> pressure relief valve<br />
Key features<br />
• Redundant (2 inlets, 4 outlets)<br />
• Built in check valve<br />
• Small and low mass<br />
Note:<br />
The listed data represents specific Prisma programme<br />
requirements and can be changed upon request<br />
Demonstrated characteristics<br />
Operating media GN2 and inert gases<br />
Membrane burst > 10 bar<br />
Valve crack 6 bar<br />
Flow rate 1.7 mg/s at 6 bar<br />
MEOP 200 bar<br />
Burst pressure 500 bar<br />
Temperatures operating/non-operating 0–50 °C / -10–60 °C<br />
Leakage, external < 10 -6 scc/sec GHe at 10 bar<br />
Diameter, chip 12 mm<br />
Diameter, housing 25 mm<br />
Mass 90 gram<br />
Interface<br />
Tube 1/4 inch<br />
Diameter, outer 6.4 mm<br />
Diameter, inner 4.6 mm<br />
Length 10 mm<br />
Electrical interface Flying leads<br />
Supply voltage 28 V DC<br />
Material Stainless steel, 316L<br />
Sulphur content 0.005–0.015 %<br />
Status<br />
Lauched Prisma 2010<br />
Schematic figure of <strong>MEMS</strong> pressure relief valve<br />
www.sscspace.com/nanospace <strong>SSC</strong> March, 2011
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