Chapter 5 Robust Performance Tailoring with Tuning - SSL - MIT

Magnitude, OPD/F x [µm/N]
Magnitude, OPD/T z [µm/Nm]
10 2
10 0
10 −2
10 2
10 0
10 −2
10 −4
10 −2
10 −2
10 0
Frequency (Hz)
(a)
10 0
Frequency (Hz)
(c)
10 2
10 2
Magnitude, OPD/F y [µm/N]
Norm. Cum. Var. [µm 2 ]
PSD [µm 2 /Hz]
10 5
10 0
10 −5
10 −10
1
0.5
0
10 10
10 5
10 0
10 −5
10 −2
10 −2
10 0
Frequency (Hz)
(b)
10 0
Frequency [Hz]
10 2
Nominal PT
Worst−Case PT
Figure 3-2: Comparison of nominal PT model (–) and PT model at worst-case uncertainty
vertices(- -): (a) frequency response function, Fx to σz (b) frequency response
function, Fy to σz (c) frequency response function, Tz to σz and (d) cumulative variance
and output PSD.
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(d)
10 2