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Chapter 5 Robust Performance Tailoring with Tuning - SSL - MIT

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Uncertainty Bounds<br />

Test �y [kg] Source p1 p2 σHW<br />

# m1 m2 ∆L ∆U ∆L ∆U [µm]<br />

1 0.0 0.0 nominal HW -0.5 0.5 -0.5 0.5 318.76<br />

2 156.77 0.0 AO tune: iso-seg 1 -0.218 0.183 -0.5 0.05 397.74<br />

3 0.0 134.12 AO tune: iso-seg 2 -0.715 0.41 -0.5 0.05 299.62<br />

4 0.0 69.23 AO tune over Piso1 -0.193 0.208 0.196 0.265 290.00<br />

∆ ρ 1<br />

0.5<br />

0.4<br />

0.3<br />

0.2<br />

0.1<br />

0<br />

−0.1<br />

−0.2<br />

−0.3<br />

−0.4<br />

−0.5<br />

iso seg 1<br />

z = 318.75<br />

1<br />

µm<br />

(a)<br />

z = 299.62<br />

2<br />

µm<br />

iso seg 2<br />

z 1 = 318.75 µm<br />

−0.5 −0.4 −0.3 −0.2 −0.1 0<br />

∆ E<br />

1<br />

0.1 0.2 0.3 0.4 0.5<br />

(b)<br />

Figure 4-13: Isoperformance tuning, �p = � �<br />

E1 ρ1 (a) uncertainty space and isoperformance<br />

contours, actual hardware parameters are denoted <strong>with</strong> black circle (b)<br />

table of hardware tests, uncertainty bounds and results.<br />

145

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