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Chapter 5 Robust Performance Tailoring with Tuning - SSL - MIT

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∆E 2<br />

0.1<br />

0.05<br />

0<br />

−0.05<br />

−0.1<br />

iso seg 1<br />

z = 290.83µm<br />

iso seg 2<br />

−0.1 −0.05 0<br />

∆E<br />

1<br />

0.05 0.1<br />

(a)<br />

Uncertainty Bounds<br />

Test �y [kg] Source p1 p2 σHW<br />

# m1 m2 ∆L ∆U ∆L ∆U [µm]<br />

1 0.0 0.0 nominal HW -0.1 0.1 -0.1 0.1 290.83<br />

2 81.04 0.0 AO tune: iso-seg 1 -0.1 0.05 -0.62 0.1 346.47<br />

3 0.0 81.05 AO tune: iso-seg 2 0.05 0.1 -0.1 0.62 264.07<br />

(b)<br />

Figure 4-12: Isoperformance tuning, �p = � �<br />

E1 E2 : (a) uncertainty space and<br />

isoperformance contours, actual hardware parameters are denoted <strong>with</strong> black circle<br />

(b) table of hardware tests, uncertainty bounds and results.<br />

142

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