[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
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[<br />
In conventional<br />
magnetron<br />
discharges:<br />
I = k U n<br />
n = 5..10<br />
<strong>HIPIMS</strong> exhibits<br />
n = 1!<br />
I-U Characteristic<br />
]<br />
n plasma =<br />
10 13 cm -3<br />
(Ehiasarian et al, Vacuum 65 (2002) 147)
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