[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
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[<br />
100 Hz<br />
<strong>High</strong> <strong>Power</strong> <strong>Impulse</strong> <strong>Magnetron</strong> <strong>Sputtering</strong><br />
200 Wcm -2 n pl = 10 13 cm -3<br />
]<br />
active arc<br />
suppression<br />
Target area > 400 cm 2
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