[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...

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[ Impact Wear Craters (Ehiasarian et al, Thin Soild Films 457 (2004) 270) ]
[ Conclusions • HIPIMS has been implemented successfully on industrial scale machines (cathode area >1200 cm2) with the help of an industrial size power supply • HIPIMS discharges produce metal ions charged up to 2+ for Ti, Cr and Nb • The metal ion-to-neutral ratio increases continuously as a function of peak power • Metal ion etching by HIPIMS promotes local epitaxial growth and improves the adhesion of coatings without incorporation of droplets • HIPIMS pre-treatment improves the corrosion performance due to defect-free interface of CrN/NbN nanoscale multilayer films produced in industrial scale machine ]
Page 1 and 2: [ High Power Impulse Magnetron Sput
Page 3 and 4: [ 100 Hz High Power Impulse Magnetr
Page 5 and 6: [ Plasma Composition -OES-Chromium
Page 7 and 8: [ Temporal Evolution of HIPIMS Plas
Page 9 and 10: ] [ Plasma Composition-Ion Current
Page 11 and 12: [ Ionisation of Cr in HIPIMS Cr 0 s
Page 13 and 14: [ Hauzer HTC 1000/4 ABS Batch Coate
Page 15 and 16: [ ]
Page 17 and 18: [ Interface - High Resolution-TEM (
Page 19 and 20: [ Coating Deposition (Ehiasarian et
Page 21 and 22: [ Corrosion Performance-CrN/NbN on
Page 23: [ Sliding Wear Resistance (Ehiasari
Page 27: [ HIPIMS Deposition Further Reading

[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...

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