Vacuum Gauges INFICON - Neyco

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CONTENTS : Vacuum Gauges Inficon - V1 Pirani Standard Gauge PSG050 / PSG051 ………………………………………………………………………………………… p : 3 Pirani Standard Gauge PSG100S / PSG101S …………………………………………………………………………………… p : 5 Pirani Standard Gauge PSG500 / PSG500S / PSG502S ……………………………………………………………… p : 8 Pirani Capacitance Diaphragm Gauge PCG400 / PCG410 ………………………………………………………………… p : 11 Penning Gauge PEG100 …………………………………………………………………………………………………………………………… p : 14 Inverted Magnetron Pirani Gauge MPG400 / MPG401 …………………………………………………………………… p : 16 Bayard-Alpert Pirani Gauge BPG400 ………………………………………………………………………………………………… p : 19 Bayard-Alpert Pirani Gauge BPG402-S ……………………………………………………………………………………………… p : 23 High Pressure Hot Ionization Pirani Gauge HPG400 ……………………………………………………………………… p : 26 Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge BCG450 ……………………………… p : 29 Vacuum Gauge Controllers VGC401 / VGC402 / VGC 403 ……………………………………………………………… p : 33 Gauge Measurement range (mbar) Accuracy (% of reading) Repeatability (% of reading) Flange Pirani Standard Gauge PSG050 / PSG051 5.10 -4 → 1000 16 KF Pirani Standard Gauge PSG100-S / PSG101-S 5.10 -4 → 1000 16 KF Pirani Standard Gauge PSG500 / PSG500-S /PSG502-S 5.10 -4 → 1000 Pirani Capacitance Diaphragm Gauge PCG400 / PCG410 5.10 -4 → 1500 1.10 -3 ± to 100 mbar 15% 5.10 -4 to 1.10 -3 ± 50% ± 100 to 1000 mbar 50% 1.10 -3 ± to 50 mbar 15% ± 50 to 950 mbar 15% ± 950 to 1050 2.5% ± 30% ± 30% ± 15% ± 15% ± 15% 10 -8 to 10 -2 ± mbar 15% 10 -2 ± to 50 mbar 15% 50 to 950 mbar ± 5% ± 950 to 1050 2.5% Penning Gauge PEG100 1.10 -9 → 1.10 -2 10 -8 to 10 -4 mbar Inverted Magnetron Pirani Gauge MPG400 / MPG401 5.10 -9 → 1000 10 -8 to 100 mbar Bayard-Alpert Pirani Gauge BPG400 5.10 -10 → 1000 10 -8 to 10 -2 mbar Bayard-Alpert Pirani Gauge BPG402-S 5.10 -10 → 1000 10 -8 to 10 -2 mbar High Pressure Hot Ionization Pirani Gauge HPG400 2.10 -6 → 1000 10 -5 to 1 mbar Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge BCG450 5.10 -10 → 1500 ± 2% ± 2% ± 2% ± 2% 16 KF / 16 CF-R 4 VCR / 8 VCR 16 KF / 16 CF-F 4 VCR / 8 VCR ± 5% 25 KF / 40 CF-R 25 KF / 40 KF 40 CF-R ± 5% 25 KF / 40 CF-R ± 5% 25 KF / 40 CF-R ± 5% / ± 30% 25 KF / 40 CF-F ± 5% 25 KF / 40 CF-R www.neyco.fr page 2
Pirani Standard Gauge PSG050 / PSG051 ADVANTAGES • Measurement range 5 x 10 -4 to 1000 mbar (3.75 x 10 -4 to 750 Torr) • Tungsten or platinum filament • Temperature compensated 0°C to 40°C • Constant filament temperature PSG050: • Aluminum sensing cell with tungsten filament • Excellent temperature compensation PSG050 1/8” NPT: • Stainless steel sensing cell with tungsten filament PSG051: • Stainless steel sensing cell with platinum filament and ceramics feedthrough • Well suited for corrosive processes and water vapor atmospheres OPERATING UNITS • Vacuum Gauge Controller VGC012 / VGC023 Ordering Information Vacuum Gauges Inficon - V1 www.neyco.fr page 3
Page 1: Vacuum Gauges INFICON
Page 5 and 6: Pirani Standard Gauge PSG100-S / PS
Page 7 and 8: Specifications Dimensions Vacuum Ga
Page 9 and 10: Ordering Information Dimensions Vac
Page 11 and 12: Pirani Capacitance Diaphragm Gauge
Page 13 and 14: Dimensions Vacuum Gauges Inficon -
Page 15 and 16: Specifications Dimensions Vacuum Ga
Page 17 and 18: Specifications Vacuum Gauges Infico
Page 19 and 20: Bayard-Alpert Pirani Gauge BPG400 V
Page 23 and 24: Bayard-Alpert Pirani Gauge BPG402-S
Page 25 and 26: Specifications Dimensions Accessori
Page 29 and 30: Vacuum Gauges Inficon - V1 Bayard-A
Page 33 and 34: Vacuum Gauge Controllers VGC401 / V

Vacuum Gauges INFICON - Neyco

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