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Vacuum Gauges INFICON - Neyco

Vacuum Gauges INFICON - Neyco

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CONTENTS :<br />

<strong>Vacuum</strong> <strong>Gauges</strong> Inficon - V1<br />

Pirani Standard Gauge PSG050 / PSG051 ………………………………………………………………………………………… p : 3<br />

Pirani Standard Gauge PSG100S / PSG101S …………………………………………………………………………………… p : 5<br />

Pirani Standard Gauge PSG500 / PSG500S / PSG502S ……………………………………………………………… p : 8<br />

Pirani Capacitance Diaphragm Gauge PCG400 / PCG410 ………………………………………………………………… p : 11<br />

Penning Gauge PEG100 …………………………………………………………………………………………………………………………… p : 14<br />

Inverted Magnetron Pirani Gauge MPG400 / MPG401 …………………………………………………………………… p : 16<br />

Bayard-Alpert Pirani Gauge BPG400 ………………………………………………………………………………………………… p : 19<br />

Bayard-Alpert Pirani Gauge BPG402-S ……………………………………………………………………………………………… p : 23<br />

High Pressure Hot Ionization Pirani Gauge HPG400 ……………………………………………………………………… p : 26<br />

Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge BCG450 ……………………………… p : 29<br />

<strong>Vacuum</strong> Gauge Controllers VGC401 / VGC402 / VGC 403 ……………………………………………………………… p : 33<br />

Gauge<br />

Measurement<br />

range<br />

(mbar)<br />

Accuracy<br />

(% of reading)<br />

Repeatability<br />

(% of<br />

reading)<br />

Flange<br />

Pirani Standard Gauge PSG050 / PSG051 5.10 -4 → 1000 16 KF<br />

Pirani Standard Gauge PSG100-S / PSG101-S 5.10 -4 → 1000 16 KF<br />

Pirani Standard Gauge PSG500 / PSG500-S /PSG502-S 5.10 -4 → 1000<br />

Pirani Capacitance Diaphragm Gauge PCG400 / PCG410 5.10 -4 → 1500<br />

1.10 -3 ±<br />

to 100 mbar<br />

15%<br />

5.10 -4 to 1.10 -3 ±<br />

50%<br />

±<br />

100 to 1000 mbar<br />

50%<br />

1.10 -3 ±<br />

to 50 mbar<br />

15%<br />

±<br />

50 to 950 mbar<br />

15%<br />

±<br />

950 to 1050<br />

2.5%<br />

±<br />

30%<br />

±<br />

30%<br />

±<br />

15%<br />

±<br />

15%<br />

±<br />

15%<br />

10 -8 to 10 -2 ±<br />

mbar<br />

15%<br />

10 -2 ±<br />

to 50 mbar<br />

15%<br />

50 to 950 mbar ± 5%<br />

±<br />

950 to 1050<br />

2.5%<br />

Penning Gauge PEG100 1.10 -9 → 1.10 -2 10 -8 to 10 -4 mbar<br />

Inverted Magnetron Pirani Gauge MPG400 / MPG401 5.10 -9 → 1000 10 -8 to 100 mbar<br />

Bayard-Alpert Pirani Gauge BPG400 5.10 -10 → 1000 10 -8 to 10 -2 mbar<br />

Bayard-Alpert Pirani Gauge BPG402-S 5.10 -10 → 1000 10 -8 to 10 -2 mbar<br />

High Pressure Hot Ionization Pirani Gauge HPG400 2.10 -6 → 1000 10 -5 to 1 mbar<br />

Bayard-Alpert Pirani Capacitance Diaphragm Gauge<br />

TripleGauge BCG450<br />

5.10 -10 → 1500<br />

± 2%<br />

± 2%<br />

± 2%<br />

± 2%<br />

16 KF / 16 CF-R<br />

4 VCR / 8 VCR<br />

16 KF / 16 CF-F<br />

4 VCR / 8 VCR<br />

± 5%<br />

25 KF / 40 CF-R<br />

25 KF / 40 KF<br />

40 CF-R<br />

± 5% 25 KF / 40 CF-R<br />

± 5% 25 KF / 40 CF-R<br />

± 5% / ± 30% 25 KF / 40 CF-F<br />

± 5%<br />

25 KF / 40 CF-R<br />

www.neyco.fr page 2

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