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Magnetic Oxide Heterostructures: EuO on Cubic Oxides ... - JuSER

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100 5. Results II: EuO integration directly on silicon<br />

the disappearance of EuSi 2 is still favorable and yields EuO, Si, and metallic Eu, altogether<br />

constituting a suited basis for further synthesis of high quality EuO by the Eu distillation<br />

condition. All EuSi 2 disappearance reactions show GEuSi dissol.<br />

2<br />

(T ) 2 × GEuO f (T ), thus being significantly<br />

more probable than the formation of EuO, given for orientation as dashed blue line<br />

in Fig. 5.10.<br />

In conclusion, the only remaining condition when metallic europium silicide may be formed<br />

is the initial stage of EuO synthesis with excess of Eu and an incomplete passivation of the Si<br />

surface. Our thermodynamic prediction clearly prohibits a formation of EuSi 2 during EuO<br />

synthesis and in case of a complete hydrogen passivation of the Si surface. In short: the H-Si<br />

(001) surface is suited to provide a silicide-free EuO/H-Si hybrid structure.<br />

Silicon dioxide reactions at the EuO/Si interface<br />

Silicon oxide dissolution during<br />

initialization of EuO (Eu-rich seed layer):<br />

0<br />

0<br />

temperature (°C)<br />

500 1000<br />

SiO 2<br />

1500<br />

6SiO 2 + 8Eu 4Eu 2 O 3 + 6Si<br />

6SiO 2 + 9Eu 3Eu 3 O 4 + 6Si<br />

6SiO 2 +12Eu 12EuO + 6Si<br />

ΔG reaction (T) (kJ/mol)<br />

-200<br />

-400<br />

-600<br />

-800<br />

EuO formation (for orientation)<br />

-1000<br />

0<br />

500<br />

1000<br />

temperature (K)<br />

Figure 5.11.: Resulting Gibbs free energies of EuO/Si interface reactions regarding SiO 2 in the initial<br />

growth stage of EuO (Eu seed layer).<br />

1500<br />

2000<br />

While employed as chemically stable dielectric in many semiconductor applications, our<br />

approach is the avoidance of polycrystalline SiO 2 at the Si surface in order to maintain a<br />

structurally sharp and chemically well-defined functional interface of EuO directly on Si.<br />

From the Ellingham diagram (Fig. 5.7) we have already derived that all Eu oxides phases are<br />

thermodynamically more stable than SiO 2 , and this is true for any temperature. However,<br />

residual SiO 2 from the Si wafer may be located on the Si (001) surface, and due to diffusion<br />

and surface defects SiO x may form even under EuO growth conditions. This renders an indepth<br />

thermodynamic analysis of SiO 2 disappearance and formation reaction at the EuO/Si<br />

interface very reasonable.<br />

First, we consider the Eu-rich start of EuO synthesis directly on top of the Si wafer. No<br />

oxygen is supplied for the Eu seed layer, and only disappearance of residual SiO 2 may occur,<br />

as compiled in Fig 5.11. We analyze disappearance reactions leading to all possible europium<br />

oxide valency phases: they are formed with almost comparable probability, but divalent EuO<br />

is thermodynamically most favorable (grey solid line) with the most negative GSiO dissol.<br />

2<br />

(300 K) ≈<br />

−280 kJ/mol. Remarkably, once oxygen supply initiates EuO synthesis, the EuO formation<br />

(blue dashed line) shows more than double the gain in Gibbs free energy and thus displaces<br />

any initial SiO 2 disappearance reaction. Therefrom, only in the initial stage of Eu deposition<br />

as a seed layer the SiO 2 disappearance is considerable, leading with the largest probability to

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