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Magnetic Oxide Heterostructures: EuO on Cubic Oxides ... - JuSER
Magnetic Oxide Heterostructures: EuO on Cubic Oxides ... - JuSER
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100 5. Results II: EuO integration directly on silicon<br />
the disappearance of EuSi 2 is still favorable and yields EuO, Si, and metallic Eu, altogether<br />
constituting a suited basis for further synthesis of high quality EuO by the Eu distillation<br />
condition. All EuSi 2 disappearance reactions show GEuSi dissol.<br />
2<br />
(T ) 2 × GEuO f (T ), thus being significantly<br />
more probable than the formation of EuO, given for orientation as dashed blue line<br />
in Fig. 5.10.<br />
In conclusion, the only remaining condition when metallic europium silicide may be formed<br />
is the initial stage of EuO synthesis with excess of Eu and an incomplete passivation of the Si<br />
surface. Our thermodynamic prediction clearly prohibits a formation of EuSi 2 during EuO<br />
synthesis and in case of a complete hydrogen passivation of the Si surface. In short: the H-Si<br />
(001) surface is suited to provide a silicide-free EuO/H-Si hybrid structure.<br />
Silicon dioxide reactions at the EuO/Si interface<br />
Silicon oxide dissolution during<br />
initialization of EuO (Eu-rich seed layer):<br />
0<br />
0<br />
temperature (°C)<br />
500 1000<br />
SiO 2<br />
1500<br />
6SiO 2 + 8Eu 4Eu 2 O 3 + 6Si<br />
6SiO 2 + 9Eu 3Eu 3 O 4 + 6Si<br />
6SiO 2 +12Eu 12EuO + 6Si<br />
ΔG reaction (T) (kJ/mol)<br />
-200<br />
-400<br />
-600<br />
-800<br />
EuO formation (for orientation)<br />
-1000<br />
0<br />
500<br />
1000<br />
temperature (K)<br />
Figure 5.11.: Resulting Gibbs free energies of EuO/Si interface reactions regarding SiO 2 in the initial<br />
growth stage of EuO (Eu seed layer).<br />
1500<br />
2000<br />
While employed as chemically stable dielectric in many semiconductor applications, our<br />
approach is the avoidance of polycrystalline SiO 2 at the Si surface in order to maintain a<br />
structurally sharp and chemically well-defined functional interface of EuO directly on Si.<br />
From the Ellingham diagram (Fig. 5.7) we have already derived that all Eu oxides phases are<br />
thermodynamically more stable than SiO 2 , and this is true for any temperature. However,<br />
residual SiO 2 from the Si wafer may be located on the Si (001) surface, and due to diffusion<br />
and surface defects SiO x may form even under EuO growth conditions. This renders an indepth<br />
thermodynamic analysis of SiO 2 disappearance and formation reaction at the EuO/Si<br />
interface very reasonable.<br />
First, we consider the Eu-rich start of EuO synthesis directly on top of the Si wafer. No<br />
oxygen is supplied for the Eu seed layer, and only disappearance of residual SiO 2 may occur,<br />
as compiled in Fig 5.11. We analyze disappearance reactions leading to all possible europium<br />
oxide valency phases: they are formed with almost comparable probability, but divalent EuO<br />
is thermodynamically most favorable (grey solid line) with the most negative GSiO dissol.<br />
2<br />
(300 K) ≈<br />
−280 kJ/mol. Remarkably, once oxygen supply initiates EuO synthesis, the EuO formation<br />
(blue dashed line) shows more than double the gain in Gibbs free energy and thus displaces<br />
any initial SiO 2 disappearance reaction. Therefrom, only in the initial stage of Eu deposition<br />
as a seed layer the SiO 2 disappearance is considerable, leading with the largest probability to