Langmuir probe study of the plasma parameters in the HiPIMS ...

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HiPIMS - Electron density - summaryA monotonic rise in plasma densitywith discharge gas pressure(Gudmundsson et al., 2002)applied power (Alami et al., 2005)A linear increase in electron densitywith increased discharge current(Ehiasarian et al., 2008)The electron density depends on thetarget materialCr target gives higher density than Ti(Vetushka and Ehiasarian, 2008)The peak electron density travels awayfrom the target with fixed velocity(Gylfason et al., 2005)(After Bohlmark et al. (2005))
HiPIMS - ExperimentThe goal of this work was to determinethe temporal variation of theelectron energyplasma potentialIn particular determine the electronenergy distribution function (EEDF)
Page 1 and 2: Langmuir probe study of the plasmap
Page 3 and 4: Planar dc Magnetron Sputtering Disc
Page 5 and 6: High Power Impulse Magnetron Sputte
Page 7: HiPIMS - Electron density - summary
Page 11 and 12: Plasma parameters - Langmuir probeA
Page 13 and 14: HiPIMS - Electron density10 19 axia
Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
Page 17 and 18: HiPIMS - Electron energyThe measure
Page 19 and 20: HiPIMS - Electron energyDuring the
Page 21 and 22: AcknowlegdementsCan be downloaded a

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