Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ... Langmuir probe study of the plasma parameters in the HiPIMS ...
HiPIMS - Electron density - summaryA monotonic rise in plasma densitywith discharge gas pressure(Gudmundsson et al., 2002)applied power (Alami et al., 2005)A linear increase in electron densitywith increased discharge current(Ehiasarian et al., 2008)The electron density depends on thetarget materialCr target gives higher density than Ti(Vetushka and Ehiasarian, 2008)The peak electron density travels awayfrom the target with fixed velocity(Gylfason et al., 2005)(After Bohlmark et al. (2005))
HiPIMS - ExperimentThe goal of this work was to determinethe temporal variation of theelectron energyplasma potentialIn particular determine the electronenergy distribution function (EEDF)
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- Page 3 and 4: Planar dc Magnetron Sputtering Disc
- Page 5 and 6: High Power Impulse Magnetron Sputte
- Page 7: HiPIMS - Electron density - summary
- Page 11 and 12: Plasma parameters - Langmuir probeA
- Page 13 and 14: HiPIMS - Electron density10 19 axia
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- Page 17 and 18: HiPIMS - Electron energyThe measure
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- Page 21 and 22: AcknowlegdementsCan be downloaded a
<strong>HiPIMS</strong> - Electron density - summaryA monotonic rise <strong>in</strong> <strong>plasma</strong> densitywith discharge gas pressure(Gudmundsson et al., 2002)applied power (Alami et al., 2005)A l<strong>in</strong>ear <strong>in</strong>crease <strong>in</strong> electron densitywith <strong>in</strong>creased discharge current(Ehiasarian et al., 2008)The electron density depends on <strong>the</strong>target materialCr target gives higher density than Ti(Vetushka and Ehiasarian, 2008)The peak electron density travels awayfrom <strong>the</strong> target with fixed velocity(Gylfason et al., 2005)(After Bohlmark et al. (2005))
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