Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ... Langmuir probe study of the plasma parameters in the HiPIMS ...
Outlinedc Magnetron Sputtering DischargeElectron densityElectron energy distributionHigh power impulse magnetronsputtering discharge (HiPIMS)Summary of earlier workExperimental apparatus and setupPlasma parameters in the HiPIMSdischargeElectron densityElectron energy distributionPlasma potentialSummary
Planar dc Magnetron Sputtering DischargeFor a typical dc planar magnetron dischargepressure of 1 – 10 mTorra magnetic field strength of 0.01 – 0.05 Tcathode potentials 300 – 700 Velectron density in the substrate vicinity is 10 15 − 10 17 m −3low fraction of the sputtered material is ionized ∼ 1 %the majority of ions are the ions of the inert gasthe sputtered vapor is mainly neutral
- Page 1: Langmuir probe study of the plasmap
- Page 5 and 6: High Power Impulse Magnetron Sputte
- Page 7 and 8: HiPIMS - Electron density - summary
- Page 9 and 10: HiPIMS - ExperimentThe goal of this
- Page 11 and 12: Plasma parameters - Langmuir probeA
- Page 13 and 14: HiPIMS - Electron density10 19 axia
- Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
- Page 17 and 18: HiPIMS - Electron energyThe measure
- Page 19 and 20: HiPIMS - Electron energyDuring the
- Page 21 and 22: AcknowlegdementsCan be downloaded a
Planar dc Magnetron Sputter<strong>in</strong>g DischargeFor a typical dc planar magnetron dischargepressure <strong>of</strong> 1 – 10 mTorra magnetic field strength <strong>of</strong> 0.01 – 0.05 Tcathode potentials 300 – 700 Velectron density <strong>in</strong> <strong>the</strong> substrate vic<strong>in</strong>ity is 10 15 − 10 17 m −3low fraction <strong>of</strong> <strong>the</strong> sputtered material is ionized ∼ 1 %<strong>the</strong> majority <strong>of</strong> ions are <strong>the</strong> ions <strong>of</strong> <strong>the</strong> <strong>in</strong>ert gas<strong>the</strong> sputtered vapor is ma<strong>in</strong>ly neutral
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