Langmuir probe study of the plasma parameters in the HiPIMS ...

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SummaryWe discussed Langmuir probe measurements of theplasma parameters of the high power impulse magnetronsputtering discharge (HIPIMS)The electron densityroughly 1 – 3 orders of magnitude higher than in a dcmagnetron sputtering dischargeThe electron energy distribution function (EEDF)is Maxwellian-like during the pulseThe electron energyis below 1 V towards the end of the pulse probably due tohigh metal content in the discharge
AcknowlegdementsCan be downloaded athttp://www.raunvis.hi.is/∼tumi/hipims.htmlThe photographs were taken by Árni S. Ingason, Páll Sigurjónsson and Kristinn B. Gylfason.This work was partially supported by the Icelandic Research Fund the University of Iceland Research Fundand the Swedish Research Council.
Page 1 and 2: Langmuir probe study of the plasmap
Page 3 and 4: Planar dc Magnetron Sputtering Disc
Page 5 and 6: High Power Impulse Magnetron Sputte
Page 7 and 8: HiPIMS - Electron density - summary
Page 9 and 10: HiPIMS - ExperimentThe goal of this
Page 11 and 12: Plasma parameters - Langmuir probeA
Page 13 and 14: HiPIMS - Electron density10 19 axia
Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
Page 17 and 18: HiPIMS - Electron energyThe measure
Page 19: HiPIMS - Electron energyDuring the

Langmuir probe study of the plasma parameters in the HiPIMS ...

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