Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ... Langmuir probe study of the plasma parameters in the HiPIMS ...
SummaryWe discussed Langmuir probe measurements of theplasma parameters of the high power impulse magnetronsputtering discharge (HIPIMS)The electron densityroughly 1 – 3 orders of magnitude higher than in a dcmagnetron sputtering dischargeThe electron energy distribution function (EEDF)is Maxwellian-like during the pulseThe electron energyis below 1 V towards the end of the pulse probably due tohigh metal content in the discharge
AcknowlegdementsCan be downloaded athttp://www.raunvis.hi.is/∼tumi/hipims.htmlThe photographs were taken by Árni S. Ingason, Páll Sigurjónsson and Kristinn B. Gylfason.This work was partially supported by the Icelandic Research Fund the University of Iceland Research Fundand the Swedish Research Council.
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- Page 3 and 4: Planar dc Magnetron Sputtering Disc
- Page 5 and 6: High Power Impulse Magnetron Sputte
- Page 7 and 8: HiPIMS - Electron density - summary
- Page 9 and 10: HiPIMS - ExperimentThe goal of this
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- Page 13 and 14: HiPIMS - Electron density10 19 axia
- Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
- Page 17 and 18: HiPIMS - Electron energyThe measure
- Page 19: HiPIMS - Electron energyDuring the
SummaryWe discussed <strong>Langmuir</strong> <strong>probe</strong> measurements <strong>of</strong> <strong>the</strong><strong>plasma</strong> <strong>parameters</strong> <strong>of</strong> <strong>the</strong> high power impulse magnetronsputter<strong>in</strong>g discharge (HIPIMS)The electron densityroughly 1 – 3 orders <strong>of</strong> magnitude higher than <strong>in</strong> a dcmagnetron sputter<strong>in</strong>g dischargeThe electron energy distribution function (EEDF)is Maxwellian-like dur<strong>in</strong>g <strong>the</strong> pulseThe electron energyis below 1 V towards <strong>the</strong> end <strong>of</strong> <strong>the</strong> pulse probably due tohigh metal content <strong>in</strong> <strong>the</strong> discharge
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