Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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Outl<strong>in</strong>edc Magnetron Sputter<strong>in</strong>g DischargeElectron densityElectron energy distributionHigh power impulse magnetronsputter<strong>in</strong>g discharge (<strong>HiPIMS</strong>)Summary <strong>of</strong> earlier workExperimental apparatus and setupPlasma <strong>parameters</strong> <strong>in</strong> <strong>the</strong> <strong>HiPIMS</strong>dischargeElectron densityElectron energy distributionPlasma potentialSummary