Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
<strong>HiPIMS</strong> - Electron energyDur<strong>in</strong>g <strong>the</strong> <strong>in</strong>itial stages <strong>of</strong> <strong>the</strong>pulse Ar + ions dom<strong>in</strong>ate <strong>the</strong>dischargeLater <strong>in</strong> <strong>the</strong> pulse metal ionsbuild up and become <strong>the</strong>abundant ion speciesThe high metal content isexpected to cool <strong>the</strong> EEPFdue to electron impactexcitation and ionization <strong>of</strong><strong>the</strong> metal atoms, that havemuch lower excitationthresholds and ionizationpotential than <strong>the</strong> argonsputter<strong>in</strong>g gasFrom Bohlmark et al. (2006)From Ehiasarian et al. (2002)
Change language