Langmuir probe study of the plasma parameters in the HiPIMS ...

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HiPIMS - Electron energyTemporal variation of the effective electron temperature100 mm below the target under the race-track (r = 40 mm)Argon discharge at 3 and 20 mTorr with a copper targetThe electron energy decreases with increased dischargepressure
HiPIMS - Electron energyDuring the initial stages of thepulse Ar + ions dominate thedischargeLater in the pulse metal ionsbuild up and become theabundant ion speciesThe high metal content isexpected to cool the EEPFdue to electron impactexcitation and ionization ofthe metal atoms, that havemuch lower excitationthresholds and ionizationpotential than the argonsputtering gasFrom Bohlmark et al. (2006)From Ehiasarian et al. (2002)
Page 1 and 2: Langmuir probe study of the plasmap
Page 3 and 4: Planar dc Magnetron Sputtering Disc
Page 5 and 6: High Power Impulse Magnetron Sputte
Page 7 and 8: HiPIMS - Electron density - summary
Page 9 and 10: HiPIMS - ExperimentThe goal of this
Page 11 and 12: Plasma parameters - Langmuir probeA
Page 13 and 14: HiPIMS - Electron density10 19 axia
Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
Page 17: HiPIMS - Electron energyThe measure
Page 21 and 22: AcknowlegdementsCan be downloaded a

Langmuir probe study of the plasma parameters in the HiPIMS ...

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