Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ... Langmuir probe study of the plasma parameters in the HiPIMS ...
HiPIMS - Electron energyThe electron energy probability function (EEPF) under therace-track 100 mm below the target for an argon dischargeat 3 (dashed) and 20 (solid) mTorr with a copper target
HiPIMS - Electron energyThe measured EEPF is Maxwellian-like during the pulsehigh electron density leads to a Maxwellian-like low energypart of the EEPFthe depletion in the high energy part is due to the escape ofhigh energy electrons to the chamber walls and inelasticcollisions of high energy electronsThe EEPF is more broad at low pressure and early in thepulse
- Page 1 and 2: Langmuir probe study of the plasmap
- Page 3 and 4: Planar dc Magnetron Sputtering Disc
- Page 5 and 6: High Power Impulse Magnetron Sputte
- Page 7 and 8: HiPIMS - Electron density - summary
- Page 9 and 10: HiPIMS - ExperimentThe goal of this
- Page 11 and 12: Plasma parameters - Langmuir probeA
- Page 13 and 14: HiPIMS - Electron density10 19 axia
- Page 15: HiPIMS - Plasma potentialV pl[V]654
- Page 19 and 20: HiPIMS - Electron energyDuring the
- Page 21 and 22: AcknowlegdementsCan be downloaded a
<strong>HiPIMS</strong> - Electron energyThe measured EEPF is Maxwellian-like dur<strong>in</strong>g <strong>the</strong> pulsehigh electron density leads to a Maxwellian-like low energypart <strong>of</strong> <strong>the</strong> EEPF<strong>the</strong> depletion <strong>in</strong> <strong>the</strong> high energy part is due to <strong>the</strong> escape <strong>of</strong>high energy electrons to <strong>the</strong> chamber walls and <strong>in</strong>elasticcollisions <strong>of</strong> high energy electronsThe EEPF is more broad at low pressure and early <strong>in</strong> <strong>the</strong>pulse
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