Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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<strong>HiPIMS</strong> - Electron energyThe electron energy probability function (EEPF) under <strong>the</strong>race-track 100 mm below <strong>the</strong> target for an argon dischargeat 3 (dashed) and 20 (solid) mTorr with a copper target