Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
<strong>HiPIMS</strong> - Plasma potentialV pl[V]6543210−1(a)0 50 100 150axial position [mm]r = 0 mmr = 20 mmr = 40 mmr = 60 mmV pl[V]6543210−1(b)0 50 100 150axial position [mm]r = 0 mmr = 20 mmr = 40 mmr = 60 mm65 µs230 µsThe spatial variation <strong>of</strong> <strong>the</strong> <strong>plasma</strong> potential at 65 µs and230 µs from <strong>the</strong> <strong>in</strong>itiation for gas pressure <strong>of</strong> 5 mTorr.The pulse is 90 µs long and <strong>the</strong> average power 270 W and<strong>the</strong> target made <strong>of</strong> copper
Change language