Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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<strong>HiPIMS</strong> - Electron density10 19 axial position [mm]10 19 axial position [mm](a)(b)n e[m −3 ]10 1810 17r = 0 mmr = 20 mmr = 40 mmr = 60 mm10 160 50 100 150n e[m −3 ]10 1810 17r = 0 mmr = 20 mmr = 40 mmr = 60 mm10 160 50 100 15065 µs230 µsThe spatial variation <strong>of</strong> <strong>the</strong> electron density at 65 µs and230 µs from <strong>the</strong> <strong>in</strong>itiation for gas pressure <strong>of</strong> 5 mTorr.The pulse is 90 µs long and <strong>the</strong> average power 270 W and<strong>the</strong> target made <strong>of</strong> copperThe electron density is uniform along <strong>the</strong> radius <strong>of</strong> <strong>the</strong>discharge
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