Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ... Langmuir probe study of the plasma parameters in the HiPIMS ...
Plasma parameters - Langmuir probeThe EEDF was determined fromthe Druyvesteyn formulag e (V ) = 2m ( ) 2eV 1/2d 2 I ee 2 A m dV 2The electron densityn e =∫ ∞0g e (E) dEThe effective electrontemperatureT eff = 2 3 〈E〉 = 2 ∫1 ∞Eg e (E) dE3 n e0The measured datawas filtered(Magnus and Gudmundsson, 2008)
HiPIMS - Electron density10 19 axial position [mm]10 19 axial position [mm](a)(b)n e[m −3 ]10 1810 17r = 0 mmr = 20 mmr = 40 mmr = 60 mm10 160 50 100 150n e[m −3 ]10 1810 17r = 0 mmr = 20 mmr = 40 mmr = 60 mm10 160 50 100 15065 µs230 µsThe spatial variation of the electron density at 65 µs and230 µs from the initiation for gas pressure of 5 mTorr.The pulse is 90 µs long and the average power 270 W andthe target made of copperThe electron density is uniform along the radius of thedischarge
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- Page 3 and 4: Planar dc Magnetron Sputtering Disc
- Page 5 and 6: High Power Impulse Magnetron Sputte
- Page 7 and 8: HiPIMS - Electron density - summary
- Page 9 and 10: HiPIMS - ExperimentThe goal of this
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- Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
- Page 17 and 18: HiPIMS - Electron energyThe measure
- Page 19 and 20: HiPIMS - Electron energyDuring the
- Page 21 and 22: AcknowlegdementsCan be downloaded a
Plasma <strong>parameters</strong> - <strong>Langmuir</strong> <strong>probe</strong>The EEDF was determ<strong>in</strong>ed from<strong>the</strong> Druyvesteyn formulag e (V ) = 2m ( ) 2eV 1/2d 2 I ee 2 A m dV 2The electron densityn e =∫ ∞0g e (E) dEThe effective electrontemperatureT eff = 2 3 〈E〉 = 2 ∫1 ∞Eg e (E) dE3 n e0The measured datawas filtered(Magnus and Gudmundsson, 2008)
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