Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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Plasma <strong>parameters</strong> - <strong>Langmuir</strong> <strong>probe</strong>A <strong>Langmuir</strong> <strong>probe</strong> was used to <strong>study</strong><strong>the</strong> temporal and spatial variation <strong>of</strong><strong>the</strong> <strong>plasma</strong> <strong>parameters</strong>electron densityelectron energy<strong>plasma</strong> potentialThe <strong>Langmuir</strong> <strong>probe</strong>made <strong>of</strong> a sta<strong>in</strong>less steel wire,200 µm <strong>in</strong> diameter and 5 mm longThe voltage and current was measuredwith a 12-bit A/D converterFor each voltage step <strong>the</strong> currentdrawn by <strong>the</strong> <strong>probe</strong> was measured as afunction <strong>of</strong> time
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