Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ... Langmuir probe study of the plasma parameters in the HiPIMS ...
HiPIMS - Power supply2000−2002502001503 mTorr5 mTorr10 mTorr15 mTorr20 mTorrV T[V]−400−600I T[A]100−800−1000−12000 20 40 60 80 100 120t [µS]3 mTorr5 mTorr10 mTorr15 mTorr20 mTorr500−500 20 40 60 80 100 120t [µS]The pulse generator was SINEX 2 from ChemfiltIonsputteringThe exact pulse shape is determined by the loadthe discharge formedit depends on the gas type and gas pressureThe average power was in the range 215 − 270 W, pulselength from 80 to 90 µs and repetition frequency was 50 Hz
Plasma parameters - Langmuir probeA Langmuir probe was used to studythe temporal and spatial variation ofthe plasma parameterselectron densityelectron energyplasma potentialThe Langmuir probemade of a stainless steel wire,200 µm in diameter and 5 mm longThe voltage and current was measuredwith a 12-bit A/D converterFor each voltage step the currentdrawn by the probe was measured as afunction of time
- Page 1 and 2: Langmuir probe study of the plasmap
- Page 3 and 4: Planar dc Magnetron Sputtering Disc
- Page 5 and 6: High Power Impulse Magnetron Sputte
- Page 7 and 8: HiPIMS - Electron density - summary
- Page 9: HiPIMS - ExperimentThe goal of this
- Page 13 and 14: HiPIMS - Electron density10 19 axia
- Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
- Page 17 and 18: HiPIMS - Electron energyThe measure
- Page 19 and 20: HiPIMS - Electron energyDuring the
- Page 21 and 22: AcknowlegdementsCan be downloaded a
<strong>HiPIMS</strong> - Power supply2000−2002502001503 mTorr5 mTorr10 mTorr15 mTorr20 mTorrV T[V]−400−600I T[A]100−800−1000−12000 20 40 60 80 100 120t [µS]3 mTorr5 mTorr10 mTorr15 mTorr20 mTorr500−500 20 40 60 80 100 120t [µS]The pulse generator was SINEX 2 from ChemfiltIonsputter<strong>in</strong>gThe exact pulse shape is determ<strong>in</strong>ed by <strong>the</strong> load<strong>the</strong> discharge formedit depends on <strong>the</strong> gas type and gas pressureThe average power was <strong>in</strong> <strong>the</strong> range 215 − 270 W, pulselength from 80 to 90 µs and repetition frequency was 50 Hz
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