mirrors in motion

mirrors in motionpositioning and focusing laser beams

SCANLAB enablesSingle-Axis ModulesXY Scan ModulesSCANcube ®SCANgine ®intelliSCAN ®hurrySCAN ®hurrySCAN ® IISCANLAB‘s industry-proven galvano-This combination of two single-axisScan heads of this series integrateFeaturing a uniform housing format,Scan heads of this series are equippedmeter scanners and servo amplifiersmodules enables the deflection ofall scan components in a sealedthese compatible scan heads enablewith an innovative fully digitalare the core components for reliablelaser beams in two dimensions.ultra-compact housing.a broad range of applications. Theyservo electronics. Advanced statuslaser positioning systems.deliver excellent dynamics andsignals create new control andsuperior product quality.remote-diagnosis possibilities.Apertures in mm7, 10, 14, 20, 25, 30, 33, 50, 70 7, 10, 14, 20, 25, 30 7, 10 7, 10, 14 10

positioning and focusing laser beamshurrySCAN ® 20 / 25 / 30powerSCANvarioSCANOptical ComponentsMaximum dynamic performanceScan systems of this product lineThe modular design ofThese focusing devices dynamicallySCANLAB scan systems can be sup-and high laser power capability areenable new applications in the multi-powerSCAN 50 and 70 allows easyvary the focal length and therebyplied with a wide range of objec-delivered by these compatible scankW laser power range. Large workingexchange of individual components.extend XY scan heads into versatiletives and mirrors. Customer-specificheads. Their innovative design alsofields and volumes are achievable3D beam deflection systems. Thedesigns are available.includes air and water cooling.together with small spot diameters.varioSCAN FLEXenables a continuousvariation of the image field size.20, 25, 30 33, 50, 70 8 / 20, 16 / 40, 16 / 60, 16 / 80

and advanced controlRTC ® PC Control BoardsSCANLAB’s RTC ® PC interface boardsand the RTC ® standalone board areeasy-to-use, solutions for controllinglaser scan systems. Simple softwarecommands enable the RTC ® boardsto achieve synchronized, real-timecontrol of scan systems and lasers.Additional RTC ® features and optionsinclude: 2D and 3D image field correction Status signal evaluation Processing-on-the-fly functionalityfor moving objects Control of 3-axis scan systems Dual-head functionality for simultaneouslycontrolling two scan systems I/O extension for customer-specificsignals Optical fiber data interfaceLegend1 RTC ® PC interface board or RTC ® standalone board2 Digital interface board3 Digital or analog servo amplifier boards

for a wide range of applications.Application Matrix SCAN cube ® SCANgine ® hurrySCAN ®hurrySCAN ® IIintelliSCAN ® hurrySCAN ® powerSCAN Scan Head hurrySCAN ® 20 / 25 / 30withwithvarioSCAN 20 varioSCAN 40powerSCAN 33withvarioSCAN 40powerSCAN 50 / 70withvarioSCAN 60 / 80Entrance aperture [mm] 7 10 10 14 7 10 14 10 20 25 30 33 50 70 max. 8 max. 16 max. 16 max. 16Max. laserpower [W]Nd:YAG@1064 nm 100 150 150 250 100 150 250 150 4000 4000 4000 5000 - - 200 4000 / 4000 / 4000 4000 4000 / -CO 250 100 100 200 50 100 200 100 750 1000 1500 3000 5000 5000 200 750 / 1000 / 1500 2000 2000 / 2000Writing speed good quality 1000 640 300 220 1100 800 350 800 320 260 220 - - - - -[cps] (1) high quality 780 400 200 140 800 500 220 500 210 170 150 - - - - -Laser Materials ProcessingMarking Welding Coding Remote welding Cutting Drilling Scribing, deep-engraving Soldering Trimming Texturing Structuring Perforating Heat treatment Processing of curved surfaces Micro-machining RapidManufacturingStereolithography Laser sintering Rapid tooling Laser engraving Processing-on-the-fly Inspection, identification Large field scanning Precision display systems Material sorting Product individualizing MedicalSystemsBiomedical systems Ophthalmology Science and Research 06 / 2005 Information is subject to change without notice.(1) characters per second with single-stroke characters of 1 mm height, f = 160 mm F-Theta objective (f = 163 mm F-Theta objective for hurrySCAN 20 / 25 / 30)

system components for integratorsdynAXIS ® XS, dynAXIS ® S, dynAXIS ® M, dynAXIS ® LdynAXIS ® galvanometer scanners are high-performance rotary motorsfor optical applications. They consist of a motor section based on movingmagnet technology and a high-precision position detector (PD).The primary area of application is the fast and precise positioning of mirrorsfor the deflection of laser beams.The exceptional dynamics of SCANLAB’s dynAXIS ® scanners are the resultof more than twelve years of experience in developing and manufacturingscanners, scan systems and scan solutions for industrial use.The motor section of each dynAXIS ® is ideally matched to the inertial loadpresented by the mirror. The optimized rotor design is largely responsiblefor the favorable dynamic properties and resonance characteristics. Axiallypre-loaded precision ball bearings guarantee a backlash-free rotor assemblywith high stiffness and low friction. Special attention has been paid to longbearing lifetimes.The optical position detector system is characterized by high resolution, aswell as good repeatability and drift values. The scanners are equipped withheaters and temperature sensors (optional for dynAXIS ® XS). This allowstemperature stabilization for further enhancing long-term stability, evenunder fluctuating ambient conditions.SCANLAB provides all dynAXIS ® scanners with suitable mirrors and mirrorcoatings for all typical laser wavelengths. In addition to very good reflectionproperties, the mirrors are also optimized with respect to inertial load,stiffness and flatness.The high quality of SCANLAB’s galvanometer scanners enables error-freeoperation in long-term and continuous use. Comprehensive measurementson custom test benches assure that the highest level of quality is continuouslymaintained.

dynAXIS ® XSdynAXIS ® SdynAXIS ® MdynAXIS ® LMountingThe rotationally symmetrical flangefacilitates mounting. The scanner housingmust be electrically insulated fromthe machine structure. Mirror stops arealready integrated in the scanners. Themirror is directly bonded to the scanner’sshaft; the mirrors of the dynAXIS ® Mand dynAXIS ® L are attached via a mirrormount to the shaft.Type-Dependent Specifications dynAXIS ® XS dynAXIS ® S dynAXIS ® M dynAXIS ® LRotor inertia 0.023 g·cm 2 0.34 g·cm 2 1.2 g·cm 2 5.1 g·cm 2Torque constant 2.3 N·mm/A 7.5 N·mm/A 15 N·mm/A 24 N·mm/ACoil resistance 3.9 Ω 2.7 Ω 2.2 Ω 0.85 ΩCoil inductance 90 µH 165 µH 275 µH 300 µHMax. RMS current1.8 A 2.5 A 3.5 A 5 A(max. case temp. 50 °C)Peak current 6 A 10 A 10 A 15 AWeight 48 g 263 g 340 g 425 gwithout cable 22 g - - -Connector (1)SD-9 plugwith heater (1) SD-15 socket SD-15 socket SD-15 socket SD-15 socketInertial Loadrecommended 0.02 g·cm 2 0.35 g·cm 2 1.2 g·cm 2 8 g·cm 2maximum 0.05 g·cm 2 1.5 g·cm 2 6 g·cm 2 25 g·cm 2Recommended Aperture 7 mm 10 mm 14 mm 20 mm / 25 mmStep Response Time (with SSV30)(settling to 1/1000 of full scale, withrecommended inertial load)1% of full scale 0.23 ms 0.25 ms 0.40 ms 0.80 msDynamic Performance (with SSV30)Tracking error 0.13 ms 0.14 ms 0.22 ms 0.40 ms(1)optional for dynAXIS ® XSCommon Specifications(all angles are in mechanical degrees)Optical PerformanceMaximum scan angle ±12 °Nonlinearity< 0.4 % ptpOffset drift< 15 µrad/KGain drift< 50 ppm/KRepeatability5 µradPosition DetectorTypical PD output signal- differential mode –11 µA/°- common mode –140 µAPD supply voltage6.5 V - 11.5 VPD supply current35 mA - 60 mAHeater (1)Heater resistance120 ΩTemperature sensor resistance 1000 Ω @ 25 °C578 Ω @ 40 °CCable (1)InstallationActive TemperatureControl0.22 m longelectrically insulatedpossible (1)Operating Temperature 25 ± 20 °CElectrical Connections(with SSV30)Power supply voltageInput signalsOutput signalsLong-term drift over8 hours (with SSV30)with temperature stabilization(after warm-up)without temperaturestabilizationOperating Temperature(with SSV30)±(15+1.5) V DCalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mA3 status signals,TTL level< 0.6 mrad optical< 0.3 mrad opticalplus temperatureinducedgain andoffset drift25 ± 10 °CSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com10 / 2004 Information is subject to change without notice.

high speed in pocket sizeSCAN cube ® 7, SCAN cube ® 10The ultra-compact scan heads of the SCAN cube ® series deliverexcellent dynamics and superior SCANLAB product quality in aminimum-size package.The solid performance of these scan heads is made possibleby SCANLAB’s new, miniaturized servo amplifiers and industryprovendynAXIS ® galvanometer scanners.Sealed against water and dust, the SCAN cube ® ’s robust andexceptionally compact housing facilitates straightforward integrationinto production environments – even confined, difficultto-accesslocations. A wide variety of objectives can be usedwith these scan heads.Versions with analog or digital interfaces are available. Thedigital version can be simply controlled via an RTC ® PC interfaceboard or SCANLAB’s PC-independent RTC ® SCAN alone board.SCAN cube ® scan heads are ideally suited for solutions requiringvery high marking speeds and integration in confined spaces.Applications include coding in the packaging industry or themarking of electronic components – areas traditionally served byinkjet systems.Typical Fields of Application: Marking in the packaging sector Semiconductor industry Electronics industrytrue-to-scale

SCAN cube ® 7SCAN cube ® 10OpticsSCANLAB precisely optimizes and tunesall optical components to one anotherto ensure maximum focus quality andstable process parameters. Optical componentsoffered by SCANLAB includeexceptionally compact objectives, as wellas objective adapters for standard objectives.Optics for various wavelengths,power densities, focal lengths and imagefields are available.Common Specifications(all angles are in optical degrees)Dynamic PerformanceRepeatabilityOffset driftGain driftLong-term drift over 8 hoursOptical PerformanceTypical scan angleGain errorZero offsetNonlinearityInterfaceAnalog versionDigital version< 22 µrad30 µrad/K80 ppm/K< 0.3 mradplus temperatureinducedgain andoffset drift±0.35 rad< 5 mrad< 5 mrad< 3.5 mrad±4.8 VXY2-100 standardOperating Temperature 25 °C ± 10 °CControlSCAN cube ® scan heads are equippedwith either an analog or a digitalstandard interface accessible via a25-pin D-SUB connector.They are easily controlled via SCANLAB’sRTC ® PC interface board or the PC-independentRTC ® SCAN alone board fromSCANLAB.QualityType-Dependent Specifications (all angles are in optical degrees)The high quality of SCANLAB’s scansolutions is the result of more than fourteenyears of experience in the developmentand manufacture of galvanometerscanners and scan systems. In addition,every scan system must first pass theSCAN check burn-in test before it isreleased for shipment to the customer.SCAN cube ® 7 SCAN cube ® 10Aperture 7 mm 10 mmBeam displacement 9.98 mm 13.09 mmDynamic PerformanceTracking error 0.14 ms 0.18 msOptical PerformanceSkew < 6 mrad < 1.5 mradStep Response Time(settling to 1/1000 of full scale)1% of full scale 0.25 ms 0.40 ms10% of full scale 0.90 ms 1.2 msTypical Speeds (1)Marking speed 2.5 m/s 2.0 m/sPositioning speed 12.0 m/s 7.0 m/sWriting speed (2)good writing quality 900 cps 640 cpshigh writing quality 600 cps 400 cpsPower Requirements±15 V DC,max. 2 A eachWeight (without objective) 650 g 1.9 kg(1)with F-Theta objective, f = 160 mm (2) single-stroke characters of 1 mm height±15 V DC,max. 3 A eachLegend1 Beam in2 Screws (M5 thread) *3 Flange *4 Alignment pins (4h6) *5 Connector6 Beam out* not includedSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com06 / 2005 Information is subject to change without notice.

universal and compatiblehurrySCAN ® II, hurrySCAN ® , SCAN gine ®These compact scan heads from SCANLAB provide optimalsolutions for nearly all challenges found in industrial lasermaterials processing. The mechanically and electrically intercompatiblescan heads have apertures ranging from 10 to14 mm and various levels of dynamics. High long-term stabilityand low drift values are ensured via integrated temperaturestabilization.A uniform housing concept as well as tight manufacturing andassembly tolerances bring high flexibility and certainty to thedesign and operation of laser materials processing systems. Thisalso enables speedy adaptation to individual customer requirements.The hurrySCAN ® II scan heads set new high-end performancestandards with their optimized combination of dynAXIS ®galvanometer scanners, mirror designs and high-performanceelectronics.The high quality of SCANLAB’s scan heads is the result of morethan 15 years of experience in the development and manufactureof galvanometer scanners and scan systems. In addition,each scan head must first pass the SCAN check burn-in testbefore it is released for shipment to the customer.Typical Fields of Application: Industry: marking, laser materials processing (e.g. deep engraving,drilling, ablation, cutting, welding), electronics production (e.g.trimming, drilling, structuring), microstructuring, rapid manufacturing,stereolithography Medicine Science and research

hurrySCAN ® IIhurrySCAN ®SCAN gine ®OpticsGalvanometer mirrors and objectiveswith optimized mounts are available forall typical laser types and image fields.ControlAll scan heads of these series areequipped with either analog or digitalstandard interfaces and are easily controlledvia SCANLAB’s RTC ® PC interfaceboards. All scan heads are optionallyavailable with an optical fiber data interface.Type-Dependent Specifications(all angles are in optical degrees) hurrySCAN ® II hurrySCAN ® SCAN gine ®Aperture 10 mm 14 mm 10 mm 14 mm 10 mm 14 mmBeam Displacement (dimension a) 12.56 mm 16.42 mm 12.56 mm 15.79 mm 12.56 mm 15.79 mmStep Response Time(settling to 1/1000 of full scale)1 % of full scale 0.25 ms 0.40 ms 0.35 ms 0.80 ms 0.80 ms 1.10 ms10 % of full scale - 1.60 ms 0.90 ms 2.20 ms 2.00 ms 2.60 msTypical Speeds (1)Marking speed 2.5 m/s 1.5 m/s 2.0 m/s 1.0 m/s 1.0 m/s 0.7 m/sPositioning speed 10.0 m/s 7.0 m/s 7.0 m/s 7.0 m/s 7.0 m/s 5.0 m/sWriting speed (2)good quality 800 cps 500 cps 640 cps 350 cps 300 cps 220 cpshigh quality 500 cps 340 cps 400 cps 220 cps 200 cps 140 cpsDynamic PerformanceTracking error 0.14 ms 0.24 ms 0.18 ms 0.42 ms 0.42 ms 0.55 msLong-term drift over 8 hours(after warm-up)< 0.6 mrad

universal and compatiblehurrySCAN ® II 7The hurrySCAN ® II 7 provides outstanding dynamics forsystem integrators, making it the ideal choice for applicationsrequiring maximum scan speed and on-the-fly processing.Marking speeds well in excess of 1000 chars/s can be achievedin combination with appropriate lasers.The hurrySCAN ® II 7 utilizes SCANLAB’s new-generationdynAXIS ® XS galvanometer scanners and offers mechanicaland electrical compatibility with all other scan heads of thehurrySCAN ® II series.The high quality of SCANLAB’s scan heads is the result of morethan 15 years of experience in the development and manufactureof galvanometer scanners and scan systems. In addition,each scan head must first pass the SCAN check burn-in testbefore it is released for shipment to the customer.Typical Fields of Application: Applications requiring maximum writing speeds, e.g. processing-on-theflyin packaging industry Semiconductor industry Electronics industry

hurrySCAN ® II 7OpticsSCANLAB precisely optimizes and tunesall optical components to one anotherto ensure maximum focus quality andstable process parameters. Optics forvarious wavelengths, power densities,focal lengths and image fields areavailable.ControlThe hurrySCAN ® II 7 is equipped witheither an analog or a digital standardinterface and is easily controlled via aSCANLAB RTC ® interface board. TheRTC ® ’s processor performs vital stepssuch as micro-vectorization, coordinatetransformations and image fieldcorrection. The hurrySCAN ® II 7 isoptionally available with an optical fiberdata interface.Options The varioSCAN 20 extends thehurrySCAN ® II 7 into a three-axisscan system. The hurrySCAN ® II 7 is also availablewithout a housing as a scan module.Specifications (all angles are in optical degrees)ApertureStep Response Time(settling to 1/1000 of full scale)7 mm1% of full scale 0.30 ms10% of full scale 1.00 msTypical Speeds (1)Marking speedPositioning speedWriting speed (2)good qualityhigh qualityDynamic PerformanceTracking errorRepeatabilityLong-term drift over 8 hours(at constant ambient conditions)Offset driftGain driftOptical PerformanceTypical scan angleGain errorZero offsetSkewNonlinearityPower RequirementsInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionWeight (without objective)3.5 m/s15.0 m/s1100 cps800 cps0.11 ms< 22 µrad< 0.3 mrad< 30 µrad/K< 100 ppm/K±0.35 rad< 5 mrad< 5 mrad< 1.5 mrad< 3.5 mrad±(15+1.5) V DC,max. 3 A eachalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standard oroptical data transfer3 status signals peraxisTTL levelXY2-100 standard oroptical data transfer3 kgOperating Temperature 25 °C ± 10 °CLegend1 Beam in2 Screws (M6 thread) *3 Flange *4 Alignment pins (6 h6 ) *5 Mounting bracket6 Connectors7 Objective8 Beam out* not included(1) with F-Theta objective, f =160 mm(2) single-stroke characters of 1 mm heightSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com06 / 2005 Information is subject to change without notice.

smart scanningintelliSCAN ® 10The intelliSCAN ® 10 scan head is the first member of a new, digitally controlledgeneration of scan heads.Newly developed digital servo amplifiers control the industry-provendynAXIS ® S galvanometer scanners. Employing a high-performance controlalgorithm, these digital servos enable improved dynamics and markingquality as well as extensive possibilities for diagnosis and for communicationbetween the scan system and the customer‘s control computer.The intelliSCAN ® allows real-time monitoring of all important scan systemoperational states such as mirror positions and speeds, drive currents, supplyvoltage and temperature. As a result, processing operations can bemonitored, protocolled and modified if required – these abilities are especiallywelcome in safety-critical applications.The intelliSCAN ® creates new remote-diagnosis possibilities. It has thenecessary facilities to support software-querying from any location to determineaccumulated operating hours, serial number, date-of-manufactureand essential operational states. Thus, deviations can be quickly detectedand corrected.The product‘s electronics architecture also enables functionality extensionsvia firmware modification, such as the planned ability to change scan headdynamics during processing and thereby optimally adapt the scan head toparticular task requirements.

intelliSCAN ® 10OpticsGalvanometer mirrors and objectiveswith optimized mounts are available forall typical laser types and image fields.ControlThe intelliSCAN ® is equipped with adigital interface and is easily controlledvia SCANLAB’s RTC ® 4 PC interfaceboard. Scan head diagnosis and all essentialconfiguration parameters arecontrolled via software commands.The intelliSCAN ® is optionally availablewith an optical fiber data interface.QualityThe high quality of SCANLAB’s scan solutionsis the result of more than twelveyears of experience in the developmentand manufacture of galvanometerscanners and scan systems. In addition,every scan system must first passthe SCAN check burn-in test before it isreleased for shipment to the customer.Preliminary Specifications(all angles are in optical degrees)ApertureBeam DisplacementStep Response Time(settling to 1/1000 of full scale)10 mm12.56 mm1% of full scale 0.35 ms10% of full scale 0.90 msTypical Speeds (1)Marking speedPositioning speedWriting speed (2)good qualityhigh qualityDynamic PerformanceTracking errorRepeatabilityLong-term drift over 8 hours(after warm-up)Optical PerformanceTypical scan angle2.0 m/s7.0 m/s640 cps400 cps0.18 ms< 22 µrad< 0.6 mrad±0.35 radLegendGain errorZero offsetSkewNonlinearityPower RequirementsInterfaceWeight (without objective)< 5 mrad< 5 mrad< 1.5 mrad< 3.5 mrad±15 V DC,max. 3 A eachor30 V DC, max. 3 AXY2-100 Enhancedor optical datatransfer2.7 kgOperating Temperature 25 °C ± 10 °C1 Beam in2 Screws (M6 thread) *3 Flange *4 Alignment pins (6h6) *5 Mounting bracket6 Connectors7 Objective8 Beam out* not included(1)with F-Theta objective, f =160 mm(2)single-stroke characters of 1 mm heightSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com08 / 2003 Information is subject to change without notice.

high performance meets high powerhurrySCAN ® 20, hurrySCAN ® 25These scan heads are designed to quickly and precisely deflectand position laser beams with powers up to the kilowatt range.With apertures of 20 and 25 mm, small spot sizes are achievedalong with large image fields.Stable operating conditions and high long-term stability areprovided by water cooling of the entrance aperture, electronicsand galvanometer scanners, supplemented by air cooling ofthe deflection mirrors. This also ensures reliable operation withapplications requiring high laser powers.The compact housing is dustproof and water spray resistant.Attachment provisions at the water-cooled beam entranceand at the beam exit ease installation of add-on componentssuch as focusing lenses and cross jets. The hurrySCAN ® 20 andhurrySCAN ® 25 are inter-compatible and can be controlled viaSCANLAB’s RTC ® PC interface boards.The high quality of SCANLAB’s scan heads is the result of morethan twelve years of experience in the development and manufactureof galvanometer scanners and scan systems. In addition,every scan system must first pass the SCANcheck burn-in testbefore it is released for shipment to the customer.Typical Fields of Application: Laser materials processing: welding, cutting, drilling, texturing,marking, hardening, deep engraving, microstructuring Rapid prototyping, rapid tooling 3D applications Processing-on-the-fly

hurrySCAN ® 20hurrySCAN ® 25OpticsGalvanometer mirrors and objectiveswith optimized mounts are available forall typical laser types and working fields.To optimally utilize standard objectives,the hurrySCAN ® 25’s two scan axeshave differing maximum scan angles.This results in an elliptical image fieldwith the larger semi-axis perpendicularto the entrance beam axis.Type-Dependent Specifications (all angles are in optical degrees)hurrySCAN ® 20 hurrySCAN ® 25Aperture 20 mm 25 mmBeam displacement (dimension a) 25.25 mm 29.88 mmDimension b 67.25 mm 72.00 mmOptical PerformanceTypical scan angle of scanner 1 ±0.35 rad ±0.26 radTypical scan angle of scanner 2 ±0.35 rad ±0.40 radTypical field size – ellipse (1), (2) - 80 mm x 130 mmTypical field size – square (1), (2) 90 mm x 90 mm 75 mm x 75 mmDynamic PerformanceTracking error 0.40 ms 0.50 msStep Response Time(settling to 1/1000 of full scale)1% of full scale 0.8 ms 0.9 ms10% of full scale 2.5 ms 3.2 msTypical Speeds (1)Marking speed 1.0 m/s 0.8 m/sPositioning speed 6.0 m/s 5.0 m/sWriting speed (3)Attachment ProvisionsThe housing’s beam entrance side providesa tight-tolerance beam entrancehole with a fine-pitched thread for attachingfocusing lenses and apertures.Additional threaded and non-threadedholes facilitate mounting of the scanhead and installation of fiber optic outputs.On the beam exit side, threaded holesare available for attaching add-on componentssuch as cross jets, illumination,distance sensors or thermal shields.good writing quality 320 cps 260 cpshigh writing quality 210 cps 170 cps(1) with F-Theta objective, f = 163 mm (2) limited by vignetting at objective (3) single-stroke characters of 1 mm heightOptions A varioSCAN can extend thehurrySCAN ® scan heads into 3D scansystems. These scan heads can be equippedwith an additional reference sensorsystem for automatic self-calibrationto obtain extremely high long-termstability.Common Specifications(all angles are in optical degrees)Dynamic PerformanceRepeatabilityOffset driftGain drift< 22 µrad< 25 µrad/K< 80 ppm/KLong-term drift over 8 hours < 0.3 mrad(constant ambient conditions)Optical PerformanceGain errorZero offsetSkewNonlinearityPower RequirementsInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionWeight (without objective)< 5 mrad< 5 mrad< 1.5 mrad< 2.1 mrad±(15+1.5) V DC,max. 6 A eachalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standard oroptical data transfer3 status signals per axisTTL levelXY2-100 standard oroptical data transferapprox. 5.8 kgOperating Temperature 25 °C ± 10 °CTypicalAir RequirementsTypicalWater Requirementsclean, filtered air20 l/min at ∆p < 2 bar5 l/min at∆p < 0.1 bar, p < 4 barLegend1 Beam in2 Mounting screws (M6 threads) *3 Flange *4 Alignment pins (6 h6 ) *5 Objective6 Beam outE Electrical connectorsA Connector for cooling airW Connector for cooling water* not includedSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com08 / 2003 Information is subject to change without notice.

high performance meets high powerhurrySCAN ® 30This scan head is designed to quickly and precisely deflect andposition laser beams with powers up to the kilowatt range.With an aperture of 30 mm, small spot sizes are achieved alongwith large image fields.Stable operating conditions and high long-term stability areprovided by water cooling of the entrance aperture, electronicsand galvanometer scanners, supplemented by air cooling ofthe deflection mirrors. This also ensures reliable operation withapplications requiring high laser powers.The compact housing is dustproof and water spray resistant.Attachment provisions at the water-cooled beam entrance andat the beam exit ease installation of add-on components suchas focusing lenses and cross jets. The hurrySCAN ® 30 offersmechanical and electrical compatibility with the hurrySCAN ® 20and hurrySCAN ® 25 and can be controlled via SCANLAB’s RTC ®interface boards.The high quality of SCANLAB’s scan heads is the result of morethan 15 years of experience in the development and manufactureof galvanometer scanners and scan systems. In addition,every scan system must first pass the SCANcheck burn-in testbefore it is released for shipment to the customer.Typical Fields of Application: Laser materials processing: welding, cutting, drilling, texturing,marking, hardening, deep engraving, microstructuring Processing of organic materials such as paper, textiles, foils, leather Rapid prototyping, rapid tooling 3D applications Processing-on-the-fly

hurrySCAN ® 30OpticsObjectives, varioSCAN devices andgalvanometer mirrors are available forall typical laser types and working fields.Attachment ProvisionsThe housing’s beam entrance sideprovides a tight-tolerance beamentrance hole with a fine-pitchedthread for attaching focusing lensesand apertures. Additional threaded andnon-threaded holes facilitate mountingof the scan head and installation of fiberoptic outputs.On the beam exit side, threaded holesare available for attaching add-on componentssuch as cross jets, illumination,distance sensors or thermal shields.ControlThe hurrySCAN ® 30 is equipped witheither an analog or a digital standardinterface and is easily controlled via aSCANLAB RTC ® interface board. TheRTC ® ’s processor performs vital stepssuch as micro-vectorization, coordinatetransformations and image fieldcorrection.Options A varioSCAN 40 or varioSCAN 40 FLEXcan extend the hurrySCAN ® 30 into a3D scan system. This scan head can be equippedwith an additional reference sensorsystem for automatic self-calibrationto obtain extremely high long-termstability.Specifications (all angles are in optical degrees)ApertureStep Response Time(settling to 1/1000 of full scale)30 mm1% of full scale 1.2 ms10% of full scale 4.5 msTypical Speeds (1)Marking speedPositioning speedWriting speed (2)good qualityhigh qualityDynamic PerformanceTracking errorRepeatabilityLong-term drift over 8 hours(after warm-up)Optical PerformanceTypical scan angleGain errorZero offsetSkewNonlinearityPower Requirements0.7 m/s4.5 m/s220 cps150 cps0.55 ms< 22 µrad< 0.6 mrad±0.35 rad< 5 mrad< 5 mrad< 1.5 mrad< 3.5 mrad±(15+1.5) V DC,max. 6 A eachLegend1 Beam in2 Mounting screws (M6 threads) *3 Flange *4 Alignment pins (6 h6 ) *5 Objective6 Beam outE Electrical connectorsA Connector for cooling airW Connector for cooling water* not includedInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionWeight (without objective)alternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standard oroptical data transfer3 status signals peraxisTTL levelXY2-100 standard oroptical data transfer5.8 kgOperating Temperature 25 °C ± 10 °CTypicalAir RequirementsTypicalWater Requirementsclean, filtered air20 l/min at ∆p < 2 bar5 l/min at∆p < 0.1 bar, p < 4 bar(1)with F-Theta objective, f =163 mm(2)single-stroke characters of 1 mm heightSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com06 / 2005 Information is subject to change without notice.

maximum-power laser scanningpowerSCANThe scan systems of the powerSCAN series enable positioningmultiple kilowatts of laser power onto a workpiece in just a fewmilliseconds. In combination with a varioSCAN, the laser beamcan be dynamically focused within working volumes, thusallowing non-flat workpieces to be processed.Apertures up to 70 mm allow small spot sizes and thereforehigh power densities even with large working distances. TheXY mirrors and the varioSCAN‘s optics are air cooled, whilethe scanners, electronics and varioSCAN are water cooled. Thisensures reliable operation with excellent long-term stability– even under challenging environmental conditions and withhigh laser powers.Each axis of powerSCAN 50 and powerSCAN 70 is individuallyimplemented as a sealed submodule – a calibrated and tunedunit containing a galvanometer scanner with a mirror and thescanner’s driver electronics. Thus, rapid exchangability ofindividual axes is ensured. Located in a separate sealed basemodule, the modularly-designed main electronics providefunctions such as a digital interface and the power managementsystem with comprehensive monitoring functions.Typical Fields of Application: Welding, cutting, drilling, hardening, perforating, texturing, surfacetreatment Laser processing of organic materials such as paper, textiles, foils, leather Rapid manufacturing: laser sintering, rapid tooling 3D applications, large field processing Processing-on-the-fly

OpticsSCANLAB precisely optimizes and tunesall optical components to one anotherto ensure maximum focus quality andstable process parameters.Numerous optical configurations– specially developed for the varioSCANand matched to the powerSCAN – areavailable for various wavelengths, laserpowers and image fields or workingvolumes.Customers can easily self-install theseexchangeable optics sets to adapt thescan system for each of their applications.QualityThe high quality of SCANLAB’s scansolutions is the result of more than 15years of experience in the developmentand manufacture of galvanometerscanners and scan systems. In addition,every scan system must first pass theSCANcheck burn-in test before it is releasedfor shipment to the customer.Typical optical configurations powerSCAN 33 with varioSCAN 40powerSCAN 33with varioSCAN 40Specifications – powerSCAN 33(all angles are in optical degrees)ApertureBeam DisplacementStep Response Time(settling to 1/1000 of full scale)33 mm45.21 mm1% of full scale 1.3 ms10% of full scale 4.5 msTypical Processing Speed3 rad/sTypical Positioning Speed 18 rad/sDynamic PerformanceTracking errorRepeatabilityLong-term drift over 8 hours(after warm-up)Optical PerformanceTypical scan angleGain errorZero offsetSkewNonlinearityPower RequirementsInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionWeight0.75 ms< 22 µrad< 0.6 mrad±0.35 rad< 5 mrad< 5 mrad< 1.5 mrad< 2.1 mrad±(15+1.5) V DC,max. 4.5 A eachalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standardor optionally opticaldata transfer3 status signalsper axisTTL levelXY2-100 standardor optionally opticaldata transferapprox. 10 kgOperating Temperature 25 °C ± 10 °CTypical Air RequirementsTyp. Water Requirementsclean, filtered air,1.6 barmax. 4.5 barWavelength 10.6 µm 10.6 µm 10.6 µm 10.6 µm 1064 nm 1064 nmMax. Laser Power cwMax. Laser Power for 50% Duty Cycle2000 W4000 W2000 W4000 W2000 W4000 W2000 W4000 W2000 W4000 W2000 W4000 WImage Field Size (170 x 170) mm 2 (270 x 270) mm 2 (500 x 500) mm 2 (1.5 x 1.5) m 2 (130 x 130) mm 2 (250 x 250) mm 2Typical Processing Speed 0.8 m/s 1.0 m/s 2.0 m/s 6.0 m/s 0.7 m/s 1.0 m/sFocus Range in Z Direction ± 4 mm ± 5 mm ± 35 mm ± 75 mm ± 5 mm ± 5 mmFocus Diameter (1/e 2 ) 210 µm (M 2 =1) 275 µm (M 2 =1) 450 µm (M 2 =1) 1.3 mm (M 2 =1) 150 µm (M 2 =12) 200 µm (M 2 =12)Beam Expansion Factor 2.5 2.4 2.4 2.2 2.5 2.5Focal Length (414 ± 15) mm (515 ± 28) mm (850 ± 75) mm (2300 ± 500) mm (365 ± 18) mm (490 ± 32) mmpowerSCAN 33 with varioSCAN 40Legend1 Beam in2 Entrance aperture (water-cooled)3 varioSCAN 404 Clamping block (water-cooled)5 Base plate6 Beam out7 Galvanometer scannerE Electrical connectorsA Connector for cooling airW Connectors for cooling water

Legend1 Beam in2 Entrance aperture (water-cooled)3 varioSCAN 604 Clamping block (water-cooled)5 Base plate6 Beam out7, 8 Submodules9 Base module with main electronicsD Fiber connector for optical datatransferP Power supply connectorA Connectors for cooling airW Connectors for cooling waterpowerSCAN 50with varioSCAN 60Specifications – powerSCAN 50(all angles are in optical degrees)ApertureBeam DisplacementStep Response Time(settling to 1/1000 of full scale)50 mm72.72 mm1% of full scale 1.5 msTypical Processing Speed2.5 rad/sTypical Positioning Speed 15 rad/sDynamic PerformanceTracking errorRepeatabilityLong-term drift over 8 hours(after warm-up)Optical PerformanceTypical scan angleGain errorZero offsetSkewNonlinearityPower RequirementsInput SignalsOutput SignalsWeight0.9 ms< 22 µrad< 0.6 mrad±0.35 rad< 5 mrad< 5 mrad< 1.5 mrad< 2.1 mrad±(24+1.5) V DC,max. 10 A each(20 A peak current)optical data transferor optionallyXY2-100 standard4 status signals,optical data transferor optionallyXY2-100 standardapprox. 29 kgOperating Temperature 25 °C ± 10 °CTypical Air RequirementsTyp. Water Requirementsclean, filtered air,1.5 bar to 2.0 barmax. 4.5 barpowerSCAN 50with varioSCAN 60ControlThe powerSCAN systems can be controlledvia a SCANLAB RTC ® interfaceboard.This facilitates straight-forwardimplementation of applications – evencomplex ones. powerSCAN 50 andpowerSCAN 70 scan systems areequipped with interfaces for datatransfer via optical fiber.The RTC ® board automatically performsall required computations, such asmicro-vectorization and image field correction,and synchronously controls thepowerSCAN, varioSCAN and laser.Processing-on-the-fly functionality isoptionally available.Typical optical configurations powerSCAN 50 with varioSCAN 60Wavelength 10.6 µm 10.6 µm 10.6 µm 10.6 µmMax. Laser Power cwMax. Laser Power for 50% Duty Cycle2000 W4000 W2000 W4000 W2000 W4000 W2000 W4000 WImage Field Size (400 x 400) mm 2 (600 x 600) mm 2 (800 x 800) mm 2 (1000 x 1000) mm 2Typical Processing Speed 1.3 m/s 2.0 m/s 2.7 m/s 3.2 m/sFocus Range in Z Direction ± 10 mm ± 40 mm ± 50 mm ± 100 mmFocus Diameter (1/e 2 ) 250 µm (M 2 =1) 375 µm (M 2 =1) 500 µm (M 2 =1) 600 µm (M 2 =1)Beam Expansion Factor 3.8 3.6 3.5 3.4Focal Length (750 ± 50) mm (1050 ± 90) mm (1350 ± 150) mm (1650 ± 250) mm

Options All powerSCAN systems can beequipped with an additionalreference sensor system for automaticself-calibration for applicationsrequiring extremely high long-termstability. The powerSCAN 33 can be equippedwith sensors for monitoringthe cooling air (standard forpowerSCAN 50 and powerSCAN 70). Beryllium mirrors are optionally availablefor maximized powerSCAN 33dynamic performance.powerSCAN 70Typical optical configurations powerSCAN 70 with varioSCAN 80Wavelength 10.6 µm 10.6 µm 10.6 µmMax. Laser Power cwMax. Laser Power for 50% Duty Cycle2000 W4000 W2000 W4000 W2000 W4000 WImage Field Size (440 x 440) mm 2 (1.0 x 1.0) m 2 (1.6 x 1.6) m 2Typical Processing Speed 0.9 m/s 2.0 m/s 3.2 m/sFocus Range in Z Direction ± 10 mm ± 75 mm ± 200 mmFocus Diameter (1/e 2 ) 220 µm (M 2 =1) 450 µm (M 2 =1) 650 µm (M 2 =1)Beam Expansion Factor 4.9 4.5 4.6Focal Length (860 ± 45) mm (1680 ± 200) mm (2440 ± 400) mmSpecifications – powerSCAN 70(all angles are in optical degrees)ApertureBeam DisplacementStep Response Time(settling to 1/1000 of full scale)70 mm98.2 mm1% of full scale 2.8 msTypical Processing Speed1.5 rad/sTypical Positioning Speed 12 rad/sDynamic PerformanceTracking errorRepeatabilityLong-term drift over 8 hours(after warm-up)Optical PerformanceTypical scan angleGain errorZero offsetSkewNonlinearityPower RequirementsInput SignalsOutput SignalsWeight1.6 ms< 22 µrad< 0.6 mrad±0.35 rad< 5 mrad< 5 mrad< 1.5 mrad< 2.1 mrad±(24+1.5) V DC,max. 10 A each(20 A peak current)optical data transferor optionallyXY2-100 standard4 status signals,optical data transferor optionallyXY2-100 standardapprox. 29 kgOperating Temperature 25 °C ± 10 °CTypical Air RequirementsMirrorsElectronicsTypical WaterRequirementsclean, filtered air,0.9 bar to 1.4 bar0.4 bar to 0.8 barmax. 4.5 barLegend1 Beam in2 Beam out3, 4 Submodules5 Base module withmain electronicsD Fiber connector foroptical data transferP Power supply connectorA Connectors forcooling airW Connectors forcooling waterpowerSCAN 70SCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com06 / 2005 Information is subject to change without notice.

new dimensions – optics in motionvarioSCAN, varioSCAN FLEXvarioSCAN dynamic focusing devices enable the laser focusto be moved quickly and precisely along the optical axis. This isachieved via an optical element driven by a high-performance,tilt-free linear motor.In XY scan systems, the varioSCAN can replace costly flat fieldobjectives. The varioSCAN is an exceptionally ideal solutionin applications for which standard flat field objectives areunavailable. The varioSCAN can also extend XY scan systemsinto 3D beam deflection systems. The laser focus is guidedalong the contour of the workpiece being processed, thusenabling processing in three dimensions. The varioSCAN FLEXadditionally allows continuously adjusting the image field sizeand working distance.Controlling both an XY scan unit and the varioSCAN is easilyachieved via SCANLAB’s RTC ® interface boards.SCANLAB offers optical configurations for a wide variety ofworking distances, image field sizes, beam diameters, wavelengthsand laser powers. For fiber-coupled lasers, SCANLABoffers the varioSCAN FC (see special data sheet).Typical Fields of Application: Laser materials processing: welding, cutting, drilling Laser deep engraving Rapid prototyping, rapid tooling Microstructuring 3D workpiece processing

How It WorksThe varioSCAN is an opto-mechanicalsystem. Relative to a fixed-positionfocusing lens, a diverging lens is movedalong the optical axis by a tilt-free linearmotor (see illustration). This changesthe overall system’s focal length. Laserbeams of two kilowatts (CO 2 ) or fourkilowatts average power (YAG) can befocused.2D ApplicationsIn an XY scan system, the varioSCANreplaces a flat field objective. During thescan process, the focal length is dynamicallyreadjusted in synchronisation withthe mirror movement to maintain thelaser focus within a flat image field.3D ApplicationsA 3-axis system – consisting of avarioSCAN, an XY scan unit andan RTC ® interface board – enablesprocessing of non-flat workpieces.The position of the laser focus can beadapted to the contours of the partbeing processed. Particularly for shortfocal lengths, the 3-axis scan system canbe combined with a flat field objectiveto achieve the smallest possible spot sizeand a large focus range in Z direction.varioSCAN 20XY scan systems with apertures upto 20 mm can be extended by thevarioSCAN 20 into a 3-axis scan system.The varioSCAN 20 features exceptionallydynamic performance.Optics are available for laserwavelengths up to 266 nm. Forhigh-laser-power applications, thevarioSCAN 20 can be equipped with awater-cooled entrance aperture.Specifications varioSCAN 20(all angles are in optical degrees)Beam Input ApertureOutput ApertureDynamic PerformanceTracking errorTypical processing speed(with XY scan system)Typical positioning speed(with XY scan system)up to max. 8 mmup to max. 20 mm1.0 ms8 rad/s18 rad/sElectrical Connections (with SSV30)Power RequirementsInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionWeight±(15+1.5) V DC,max. 1.5 A eachalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standard oroptical data interfacestatus signalsTTL levelXY2-100 standard oroptical data transfervarioSCAN 20 500 g bis 700 g (1)SSV30 servo amplifier board 190 gOperating Temperature 25 °C ± 10 °CInstallation Position(1)depending on optical configurationhorizontalDimensions varioSCAN 20Optical Setup varioSCAN 20 with Scan HeadLegend1 Water-cooled aperture(optional for varioSCAN 20)2 Motor block3 Clamping surface4 Objective adapter5 Objective6 Focusing ringA Connector for cooling airW Connector for cooling waterAll dimensions in mmTypical 3-axis scan system optical configurationsvarioSCAN 20 varioSCAN 40Laser Nd:YAG x 3 Nd:YAG CO 2 Nd:YAG Nd:YAGWavelength 355 nm 1064 nm 10.6 µm 1064 nm 1064 nmXY Scan Unit 10 mm aperture 14 mm aperture 14 mm aperture 20 mm aperture 25 mm apertureFlat Field Objective without with f = 163 mm with f = 100 mm with f = 163 mm with f = 254 mmImage Field Size (600 x 600) mm 2 (110 x 110) mm 2 (70 x 70) mm 2 (90 x 90) mm 2 (115 x 115) mm 2Focus Range in Z Direction ± 20 mm ± 16 mm ± 7.5 mm ± 5 mm ± 12 mmFocus Diameter (1/e 2 ) 110 µm (M 2 =1.3) 110 µm (M 2 =5) 180 µm (M 2 =1) 80 µm (M 2 =5) 100 µm (M 2 =5)Beam Expansion Factor 3.8 2.8 3.3 2.8 2.8Focal Length varioSCAN (1350 ± 60) mm - - - -Max. Laser Power cw 25 W 200 W 200 W 500 W 500 W

Dimensions varioSCAN 40 / 60 / 80 Specifications varioSCAN 40 / 60 / 80varioSCAN 40 varioSCAN 60 varioSCAN 80Total length (Dimension l) (1) ca. 190 mm ca. 220 mm ca. 240 mmObjective diameter (Dimension d) (1) ca. 60 mm ca. 81 mm ca. 98 mm(1)depending on optical configurationOptical Setup varioSCAN 40 / 60 / 80 with powerSCAN(all angles are in optical degrees)Beam Input ApertureOutput AperturevarioSCAN 40varioSCAN 60varioSCAN 80Dynamic PerformanceTracking errorTypical processing speed(with XY scan system)Typical positioning speed(with XY scan system)up to max.16 mmup to max. 40 mmup to max. 60 mmup to max. 80 mm1.4 ms5 rad/s9 rad/sElectrical Connections (with SSV30)Power RequirementsInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionWeight±(15+1.5) V DC,max. 1.5 A eachalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standard oroptical data interfacestatus signalsTTL levelXY2-100 standard oroptical data transfervarioSCAN 40 approx. 2.4 kg (1)varioSCAN 60 approx. 2.7 kg (1)varioSCAN 80 approx. 3 kg (1)SSV30 servo amplifier board 190 gOperating Temperature 25 °C ± 10 °CInstallation Position(1)depending on optical configurationhorizontalvarioSCAN 40 / 60 / 80These three varioSCAN employ the samemotor unit and therefore exhibit identicaldynamics.Customers can change thevarioSCAN 40 / 60 / 80’s image field sizeby self-installing various optics sets.Integrated air and water cooling ensurestable operation, even with very highlaser powers.OpticsSCANLAB develops and designs the opticalconfigurations for varioSCAN andXY scan systems individually, based onthe customer’s specific application. Thus,a maximum image field size is achievedwith the minimum spot size.ControlIn a 3-axis system, the servo amplifierboards of the varioSCAN and theXY scan system are linked with the RTC ®interface board by a common digitalinterface. The RTC ® ’s processor performsvital steps such as micro-vectorization,coordinate transformations and imagefield correction.QualityThe high quality of SCANLAB’s scansolutions is the result of more than 15years of experience in the developmentand manufacture of galvanometer scannersand scan systems. In addition, everyscan system must first pass a final burnintest before it is released for shipmentto the customer.varioSCAN 40 varioSCAN 60 varioSCAN 80CO 2 CO 2 CO 2 CO 2 CO 2 CO 210.6 µm 10.6 µm 10.6 µm 10.6 µm 10.6 µm 10.6 µm33 mm aperture 33 mm aperture 50 mm aperture 50 mm aperture 70 mm aperture 70 mm aperturewithout without without without without without(270 x 270) mm 2 (1500 x 1500) mm 2 (400 x 400) mm 2 (800 x 800) mm 2 (1000 x 1000) mm 2 (1600 x 1600) mm 2± 5 mm ± 75 mm ± 10 mm ± 50 mm ± 75 mm ± 200 mm275 µm (M 2 =1) 1.3 mm (M 2 =1) 250 µm (M 2 =1) 500 µm (M 2 =1) 450 µm (M 2 =1) 650 µm (M 2 =1)2.3 2.2 3.8 3.5 4.5 4.6(515 ± 28) mm (2300 ± 500) mm (750 ± 50) mm (1350 ± 150) mm (1680 ± 200) mm (2440 ± 400) mm2000 W 2000 W 2000 W 2000 W 2000 W 2000 W

varioSCAN 40 FLEXThe varioSCAN 40 FLEX combines thevarioSCAN 40’s high-performancefocusing (for positioning the laser focusalong the optical axis) with an additionalmotorized lens for continuously varyingthe image field size and workingdistance.Both dynamic focusing and imagefield size can be controlled via theSCANLAB RTC ® 4 PC Interface Board incombination with an extension card.The varioSCAN 40 FLEX ’s housing containsthe optical components and electronics.The bore layout at the varioSCAN 40 FLEX ’sbeam exit side is designed for mountingto a SCANLAB hurrySCAN ® 20/25/30scan head.Specifications varioSCAN 40 FLEX(all angles are in optical degrees)Beam Input ApertureOutput ApertureDynamic PerformanceTracking errorTypical processing speed(with XY scan system)Typical positioning speed(with XY scan system)Power RequirementsInput SignalsAnalog versionDigital versionOutput SignalsAnalog versionDigital versionup to max.16 mmup to max. 39 mm1.4 ms5 rad/s9 rad/s±(15+1.5) V DC,max. 1.5 A eachalternatively:±4.8 V; ±9.6 V;±4.8 mA; ±9.6 mAXY2-100 standard oroptical data interfacestatus signalsTTL levelXY2-100 standard oroptical data transferWeight approx. 4.5 kg (1)Operating Temperature 25 °C ± 10 °C(1)depending on optical configurationTypical optical configurations varioSCAN 40 FLEX with hurrySCAN ® 30Type AType BWavelength 10.6 µm 10.6 µmImage Field Size (200 x 200) mm 2 - (600 x 600) mm 2 (600 x 600) mm 2 - (2000 x 2000) mm 2Working Distance 240 mm to 735 mm 735 mm to 2500 mmFocus Range in Z Direction±2 mm to ±40 mm±2 mm to ±400 mmFocus Diameter (1/e 2 ) 200 µm (M 2 =1) to 550 µm (M 2 =1) 550 µm (M 2 =1) to 1.8 mm (M 2 =1)Beam Expansion Factor 2.4 to 2.1 2.1 to 1.9Focal Length (395 ± 18) mm to (940 ± 140) mm (940 ± 60) mm to (2850 ± 600) mmhurrySCAN ® 20 / 25 / 30varioSCAN 40 FLEXLegend1 Beam in with water-cooled aperture2 Linear motor with diverging optic3 Motorized focusing optic4 Deflection mirrors5 Beam outA Connectors for cooling airW Connectors for cooling waterAll dimensions in mmSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com06 / 2005 Information is subject to change without notice.

maximum-power laser scanningvarioSCAN FCThe varioSCAN FC is a new type of dynamic focusing unitthat can be combined with a powerSCAN to realize a 3D beamdeflection system for fiber-coupled multi-kilowatt lasers.Beam delivery is based on a variable collimator, with opticalelements driven by the linAXIS linear axis from SCANLAB. Thelaser focus can thus be moved quickly and precisely along theoptical axis. The beam focus is optimized to remain a virtuallyconstant focus diameter throughout the entire working volume.Adaptation to various fiber connector types and numericalapertures is possible.The varioSCAN FC is designed to handle a laser power of up tofive kilowatts. To ensure reliable operation also with very highlaser powers, the varioSCAN FC is equipped for water cooling.The varioSCAN FC‘s dynamics and optical layout are designedfor use with SCANLAB‘s powerSCAN systems. Both, thevarioSCAN FC and the powerSCAN are easily controlled withSCANLAB’s RTC ® PC interface boards.Typical Applications: Remote welding Laser materials processing: welding, soldering,surface treatment (hardening, texturing ...) Rapid manufacturing 3D applications Processing-on-the-fly

varioSCAN FCHow it worksThe varioSCAN FC is an opto-mechanicalsystem consisting of a variablecollimator, a beam expander andfocusing optics.The variable collimator‘s optics isdynamically driven along the optical axisby the linAXIS linear axis. This allowsthe laser beam‘s divergence, and thusthe overall system‘s focal length, to bevaried.In addition, there are provisions formanual adjustment of the nominalworking distance.Two deflection mirrors fold thebeam path to keep the total systemdimensions of the powerSCAN andvarioSCAN FC as compact as possible.SCANLAB offers a variety of opticalconfigurations for adapting the systemto the customer’s particular application.Working distance and field size can beadjusted by the selection of focusingoptics. By exchanging the fiber adapteror collimator optics the varioSCAN FCcan be adapted to various laser types.ControlIn a 3-axis system, the servo amplifierboards of the varioSCAN and theXY scan system are linked with aSCANLAB RTC ® PC interface board bya common digital interface. The RTC ® ’sprocessor performs vital steps such asmicro-vectorization, coordinate transformationsand image field correction.ApplicationsIn 2D applications, the varioSCAN – asa dynamic focusing unit – replaces aflat field objective. During the scanprocess, the focal length is dynamicallyreadjusted to maintain the laser focuswithin a flat image field.In 3D applications, the varioSCANenables processing of non-flat workpieces.The position of the laser focuscan be adapted to the contours of thepart being processed.Preliminary Specificationsfor varioSCAN FC withpowerSCAN 50(all angles are in optical degrees)Beam Input Couplerdirect connection tofiber cableConnector typeOptoskand QBH,Optoskand MMI orTrumpf LLK-B (1)Numerical aperture 0.12 or 0.20 (1)Dynamic PerformanceTracking errorTypical processing speedTypical positioning speedPower RequirementsInterface0.9 ms2.5 rad/s15 rad/s±(24+1.5) V DC,max. 10 A each(20 A peak current)optical data transfer orXY2-100 standardWeight approx. 50 kg (2)OperatingTemperatureTypical WaterRequirements(1)other customizations possible(2)depending on optical configuration25 °C ± 10 °Cmax. 4.5 barTypical optical configurations withpowerSCAN 50Wavelength Range1030 nm - 1090 nmWorking Volume (200 x 200 x 100) mm 3Focus Diameter (3) approx. 625 µmMax. Laser Power cwWorking Distance (4)From lower edgeFrom protective window5 kW450 mm465 mmLegend1 Fiber cable *2 Fiber connector *3 Fiber adapter4 Variable collimator withlinAXIS linear axis5 Beam expander6 Focusing optics7 powerSCAN 508 Base plate* not included(3)with the following beam parameter product at the fiber output:- BPP = 12 mm·mrad (M 2 = 36) for top hat intensity profile or- BPP = 8 mm·mrad (M 2 = 24) for gaussian intensity profile(4)distance to central working planeSCANLAB AG · Benzstrasse 28 · 82178 Puchheim · GermanyTel. +49 (89) 89 02 58-0 · Fax +49 (89) 89 02 04 62 · info@scanlab.de · www.scanlab.deSCANLAB America, Inc. · Suite 120 · 11427 Reed Hartman Highway · Cincinnati, OH 45241 · USATel. +1 (513) 618-6425 · Fax +1 (513) 618-6526 · info@scanlab-america.com · www.scanlab-america.com07 / 2004 Information is subject to change without notice.

control and versatilityRTC ® 3, RTC ® 4SCANLAB’s RTC ® PC interface boards provide synchronous, interferenceresistantcontrol of scan systems and lasers in real time.A high-performance signal processor and the supplied DLL simplify programmingunder Windows. Alternatively, industry-proven software packagesfrom various third-party vendors are also available for handling apalette of standard applications.Software instructions are loaded alternately in the RTC ® ’s two list buffers,processed by the DSP, and output as 16-bit control signals every 10 µs tothe scan system. The RTC ® ’s processor automatically performs vital stepssuch as micro-vectorization and image field correction. Laser control issynchronized with the scanner movements. Various programmable lasersignals are available for vector and bitmap processing (see diagram onreverse side).The RTC ® 4 is downward-compatible with the RTC ® 3. Additionally, theRTC ® 4 is capable of communicating with the processors onboard SCAN-LAB’s new intelliSCAN ® scan heads – thus, it furnishes to the control PCthe real-time stream of scan head axis status parameters and enablesextensive scan system diagnosis possibilities. Optimized intelliSCAN ® scanhead tuning profiles for diverse processing tasks can be selected via softwarecommands. Compared to the RTC ® 3, the RTC ® 4 offers more memory,faster performance and additional software instructions (e.g. arc command).For controlling external components, the RTC ® 4 provides 16 digitalinput ports and 16 digital output ports.SCANLAB’s RTC ® PC interface boards are available with numerous options,providing the extensive flexibility system integrators need for meeting diversecustomer requirements. Furthermore, an I/O extension board is availablefor controlling additional external components.

RTC ® 3, RTC ® 4Specifications PCI bus interface 16-bit positioning resolution 10 µs output period Software drivers (DLL) forWindows XP / 2000 / NT4 / Me / 9x Outputs for control of one scan headand one laser Various laser modes selectable(e.g. YAG modes, CO 2 mode, polarity) Two analog outputs with 10-bit resolution;one 8-bit digital output Up to four RTC ® boards in one PCRTC ® 4 Enhanced Features Scan system diagnosis and selectionof intelliSCAN ® tuning profiles Additional software instructions(e.g. arc command) One 16-bit digital input and one16-bit digital output for controllingexternal componentsOptions Control of 3-axis scan systems Optical data transfer via optical fiberinterface Processing-on-the-fly functionality forobjects in motion Dual-head capability for simultaneouscontrol of two scan systemsI/O Extension Board (optional) 16-bit digital input,4 bits are opto-decoupled 16-bit digital output,4 bits are opto-decoupled 4 differential analog inputs,each with 10-bit resolution 4 analog outputs,each with 10-bit resolutionSCANLAB AG · Benzstrasse 2882178 Puchheim · GermanyTel. +49 (89) 89 02 58-0Fax +49 (89) 89 02 04 62info@scanlab.dewww.scanlab.deSCANLAB America, Inc. · Suite 12011427 Reed Hartman HighwayCincinnati, OH 45241 · USATel. +1 (513) 618-6425Fax +1 (513) 618-6526info@scanlab-america.comwww.scanlab-america.com08 / 2003 Information is subject to change without notice.

independent controlRTC ® SCANaloneSCANLAB’s RTC ® SCANalone Board enables real-time control of scansystems and lasers without requiring a PC. The board’s high-performancesignal processor and extensive internal memory make this possible. Theonly item required for operation is an external power supply.Marking data can be loaded via a removable MMC memory card or byusing the built-in USB 1.1 interface. The board’s internal memory canaccommodate up to one million list commands – a capacity that meets theneeds of both today’s and tomorrow’s complex applications.External control signals can be used to start or otherwise influence theexecution of applications loaded in memory. For this purpose, the board isequipped with an additional 16-bit digital input and 16-bit digital output.Control commands to the scan system are issued synchronously every10 µs as 16-bit digital output signals.The RTC ® SCANalone can also be operated via a PC connected to theboard’s USB interface. In this mode, the RTC ® SCANalone offers the samefunctionality as an RTC ® 4 PC interface board.The RTC ® SCANalone software interface and hardware connectioncapabilities are largely compatible with those of the RTC ® 4 PC interfaceboard. All options offered for the RTC ® 4 PC interface board (e.g. 3D orprocessing on the fly) are also available for the RTC ® SCANalone.

RTC ® SCANaloneSpecifications Outputs for controlling a scan headand a laser Various laser modes selectable (e.g.YAG mode, CO 2 mode, polarity)– see illustration USB 1.1 interface to PC MMC memory card included 16-bit positioning resolution 10 µs output period Software driver (DLL) forWindows XP / 2000 andWindows ME / 98 Two 10-bit analog outputs One 8-bit digital output One 16-bit digital input and one 16-bit digital output Two 10-bit analog inputs Battery-powered clock/calender PowerOK/BUSY status LED Power requirement +7...+30 V DC(max. 10 W)Options Control of 3-axis scan systems Optical data transfer via optical fiberinterface Processing-on-the-fly functionality forobjects in motion Dual-head capability for simultaneouscontrol of two scan systems withindividual image field correction Opto-decoupled laser signals Extension board with D-SUBconnectors for easy front panelmounting 19’’ rack-mountable versionSCANLAB AG · Benzstrasse 2882178 Puchheim · GermanyTel. +49 (89) 89 02 58-0Fax +49 (89) 89 02 04 62info@scanlab.dewww.scanlab.deSCANLAB America, Inc. · Suite 12011427 Reed Hartman HighwayCincinnati, OH 45241 · USATel. +1 (513) 618-6425Fax +1 (513) 618-6526info@scanlab-america.comwww.scanlab-america.com01 / 2004 Information is subject to change without notice.