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Conclusions• Atomistic Process <strong>Simulator</strong>s provide a bridgebetween ab initio calculations and standardprocess experimental data.• Efficient and accurate 3D simulation.• Straighforward implementation of newmechanisms.• Microelectronics Device Processing:“Continuum physics models are no longersufficient below 100 nm. Tools are needed forthe physical and chemical processes at anatomic level” (1997 USA National TechnologyRoadmap for Semiconductors)
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