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Interstitial Supersaturation vs. Annealing Time1.E+081.E+071.E+06Formation Energy(eV)1.61.41.210.80.60.41 10 100 1000Cluster size1.E+05Experiment 600CExperiment 700C1.E+041.E+031.E+021.E+00 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06Experiment 800CDADOS 600CDADOS 700CDADOS 800CCowern et al, Phys. Rev. Lett., in press