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smartec capacitive humidity sensor. - Prctechnologies.co.th

smartec capacitive humidity sensor. - Prctechnologies.co.th

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Humidity <strong>sensor</strong>Version : 0.1DRAFT VERSIONSMARTEC CAPACITIVE HUMIDITY SENSOR.The <strong>capacitive</strong> <strong>humidity</strong> <strong>sensor</strong> of Smartec is based on sili<strong>co</strong>n technology on glass wafer.Due to <strong>th</strong>e use of <strong>th</strong>is process it is possible to make <strong>sensor</strong>s on a high volume scale on a low<strong>co</strong>st way.The Smartec <strong>humidity</strong> <strong>sensor</strong> <strong>co</strong>nsists of <strong>th</strong>ree layers. The base and top layer are <strong>co</strong>nductiveand <strong>th</strong>e layer in between is <strong>humidity</strong> sensitive polyimide. The selection of <strong>th</strong>is sensitiveinterface makes <strong>th</strong>e <strong>sensor</strong> highly independent to temperature effects. The top layer has gridlike structure. The <strong>sensor</strong> <strong>co</strong>nverts <strong>th</strong>e <strong>humidity</strong> into a capacitance. Due to <strong>th</strong>e <strong>co</strong>nstruction<strong>th</strong>e response to <strong>humidity</strong> is very fast (


Humidity <strong>sensor</strong>Version : 0.1DRAFT VERSIONLong term stability 0,2 %RH/yearTemperature range -40 120 °COperating <strong>humidity</strong>range 0 100 % RHFrequency range 1 100 kHzUnderstanding <strong>th</strong>e specifications.The measuring of <strong>humidity</strong> is difficult. Generally <strong>th</strong>e <strong>humidity</strong> in air is measured as <strong>th</strong>efraction of <strong>th</strong>e maximum amount of water <strong>th</strong>at air can absorbed at a certain temperature. Atatmospheric <strong>co</strong>nditions and a given temperature <strong>th</strong>is fraction can vary between 0 (absolutedry) and 100% (<strong>th</strong>e point where <strong>co</strong>ndensation will begin to form). This relative <strong>humidity</strong> isonly valid at a certain temperature and atmospheric pressure. Therefore it is important <strong>th</strong>at a<strong>humidity</strong> <strong>sensor</strong> should not be affected by ei<strong>th</strong>er temperature or pressure. Many sensingtechniques, such as mechanical devices and resistive type <strong>sensor</strong>s are temperaturedependent and even <strong>th</strong>e wet and dry bulb is pressure dependent.The HS11 <strong>humidity</strong> <strong>sensor</strong>s can by used in a wide range of applications. The <strong>sensor</strong> can beused for low <strong>co</strong>st <strong>co</strong>mmercial application as well in medical and industrial products. Toachieve more feeling for <strong>th</strong>e specifications as give above some details are given below.ABOUT THE RELATION BETWEEN CAPACITANCE AND THE RELATIVE HUMIDITY.The relation between <strong>th</strong>e measured capacitance and <strong>th</strong>e Relative Humidity (RH) is depictedbelow:C c = C s + S *(X rh – 55)Wi<strong>th</strong>:C c = measured capacitance(pF)C s = capacitance value at 55% RH (pF)X rh = measured Relative Humidity(%)S = sensitivityThis means <strong>th</strong>e Relative Humidity can be calculated by:X rh = (C c - C s )/S + 55Due to <strong>th</strong>e tolerance of C s it is needed to perform a calibration.CALIBRATION.Due to <strong>th</strong>e high linearity of <strong>th</strong>e <strong>humidity</strong> <strong>sensor</strong> it is only needed to calibrate on one point.In one of <strong>th</strong>e Smartec’s application notes (on www.<strong>smartec</strong>.nl, support shop) salt solutionsfor calibration can be found. A poor mans solutions is to place <strong>th</strong>e <strong>humidity</strong> <strong>sensor</strong> into afrigidaire. Inside a frigidaire <strong>th</strong>e <strong>humidity</strong> is always 100%.The factory tests are done at 55% relative <strong>humidity</strong>. Depending on <strong>th</strong>e application of <strong>th</strong>e<strong>humidity</strong> <strong>sensor</strong> calibration can be done at higher <strong>humidity</strong> level as well on lower <strong>humidity</strong>level. The long term stability (0.2 %/yr) guarantees a stable working for over <strong>th</strong>e years.- 2 -SMARTEC BV, Delpratsingel 26WWW.SMARTEC.NL4811 AP BREDA, The Ne<strong>th</strong>erlands Tel: +31 (0)76 5205353


Humidity <strong>sensor</strong>Version : 0.1DRAFT VERSIONTOLERANCE.The specified tolerance is <strong>th</strong>e tolerance of <strong>th</strong>e capacitor at 60% RH. This tolerance can be<strong>co</strong>nsidered as an effect of <strong>th</strong>e production technology. When <strong>th</strong>e capacitor is f.i. 2 % to high(@ 0% RH) also <strong>th</strong>e sensitivity will be around 2% to high.LINEARITY.The linearity is <strong>co</strong>nsidered as <strong>th</strong>e maximum deviation from a straight line between 0% RHand 100% RH. In <strong>th</strong>e <strong>co</strong>ndensing area some drift can be expected; but <strong>th</strong>is drift is reversible.The device is resistant against submerge in water.MECHANICAL OUTLINE.2.5450.5 x 0.3117- all sizes in mm.- do not touch active area or use glove- base material: glass (0.3 mm)- wires5ORDERING CODE:SMTHS07- 3 -SMARTEC BV, Delpratsingel 26WWW.SMARTEC.NL4811 AP BREDA, The Ne<strong>th</strong>erlands Tel: +31 (0)76 5205353

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