Analysis of 320X240 uncooled microbolometer focal plane array ...
Analysis of 320X240 uncooled microbolometer focal plane array ... Analysis of 320X240 uncooled microbolometer focal plane array ...
TABLE OF CONTENTSChapterPage1 INTRODUCTION 11.1 Background 22 UNCOOLED MICROBOLOMETER FOCAL PLANE ARRAY 32.1 Theory 32.1.1 General Analysis 32.1.2 Responsivity 132.1.3 Noise 172.2 The UFPA Structure 212.3 Fabrication 242.4 Timing 283 CAMERA HARDWARE 304 THERMOELECTRIC COOLER CONTROLLER 354.1 Thermoelectric Cooler 354.2 The Controller Design 405 CONCLUSION 52vii
LIST OF FIGURESFigurePage1.1 System configuration for the microbolometer imaging system 32.1 Simplified bolometer structure 72.2 A simple bolometer circuit 112.3 Microbolometer thermal equivalent model 142.4 UFPA responsivity for 300K irradiance in the 8 to 13ium 162.5 Typical microbolometer values for U3000 microbolometer array 162.6 NETD temperature fluctuation and background fluctuation noise limits 202.7 320X240 Microbolometer array structure with readoout electronics 222.8 Diagram showing FPA and a unit cell 232.9 A photograph of microbolometer array 242.10 A figure of a microbridge or air-bridge 242.11 A photograph of a microbolometer unit cell, where the bridge structure isshown 252.12 UFPA packaging 252.13 Array package 262.14 Simplified fabrication steps for the microbridge structure 282.15 Three external clock to operate UFPA: mater clock ICLOCK, line sync pulseLSYNC, and frame sync pulse FSYNC 293.1 UFPA interface board block diagram 323.2 Microbolometer test fixture 34viii
- Page 1 and 2: Copyright Warning & RestrictionsThe
- Page 3 and 4: ABSTRACTANALYSIS OF 320X240 UNCOOLE
- Page 6 and 7: APPROVAL PAGEANALYSIS OF 320X240 UN
- Page 8 and 9: This thesis is dedicated tomy famil
- Page 13 and 14: CHAPTER 1INTRODUCTIONIn recent year
- Page 17 and 18: 5radiation (LWIR) between 811m to 1
- Page 19 and 20: Figure 2.1 Simplified bolometer str
- Page 21 and 22: 9The first function of the right ha
- Page 23 and 24: 11corresponding to T 1 . With radia
- Page 25 and 26: 13then the transient term goes to z
- Page 27 and 28: 15The signal voltage (Eauation 2.26
- Page 29 and 30: 172.2.3 NoiseThe detection capabili
- Page 31 and 32: 19F is the f/# of the optics, VN is
- Page 33 and 34: 21To obtain the temperature fluctua
- Page 35 and 36: 23provide protection against detect
- Page 37 and 38: ZE1 L4t46LII C. 10 aft( IL.The UFPA
- Page 39 and 40: 27reflection (AR) coated Ge window
- Page 41 and 42: 29170 synchronization standard sign
- Page 43 and 44: 31amplified and integrated detector
- Page 45 and 46: 33processing module by a scan conve
- Page 47 and 48: Figure 3.3 UFPA camera platform.35
- Page 49 and 50: 37high mechanical strength as shown
- Page 51 and 52: Unlike the photon sensors, the micr
- Page 53 and 54: 414.2 The Controller DesignThe cont
- Page 55 and 56: 43performed at Inframetrics to dete
- Page 57 and 58: 45c) Heating of the TEC without hea
- Page 59 and 60: 47[(RiR2C1)s + — (R1 + R2) 4.1( )
TABLE OF CONTENTSChapterPage1 INTRODUCTION 11.1 Background 22 UNCOOLED MICROBOLOMETER FOCAL PLANE ARRAY 32.1 Theory 32.1.1 General <strong>Analysis</strong> 32.1.2 Responsivity 132.1.3 Noise 172.2 The UFPA Structure 212.3 Fabrication 242.4 Timing 283 CAMERA HARDWARE 304 THERMOELECTRIC COOLER CONTROLLER 354.1 Thermoelectric Cooler 354.2 The Controller Design 405 CONCLUSION 52vii
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