Linde in Solar. - Linde Gas

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08 Linde in SolarThe industry continues to build capacityand make advances in crystalline silicon.Crystalline silicon solar cells are currently used in more than 80% of worldwide solar installations.Applications are primarily consumer based (on-grid) installations, but also provide a flexible means ofsupporting underdeveloped (off-grid) locations where grid power is unavailable. Crystalline silicon celloutput is expected to continue to grow at 20-30% year on year for the next several years.Silicon cost represents 60% of the overall c-Si cell manufacturing costs, although this is expected to declineas new global Si capacity comes on stream. The process materials component cost (7%) plays a critical rolein enabling higher cell efficiencies and lower production costs.Wafer Fabrication PlantHF/Nitric etch mixes pc-SiNaOH or KOH mc-Si + IPAHF/Nitric etch mixes pc-SiNaOH or KOH mc-Si & IPARaw MaterialProcessingPoly & MonoSi GrowthEtch & WashSawWash &SeparateWaferCrystalline Cell Critical Manufacturing StepsHF/Nitric etch mixes multi c-SiKOH+IPA or NaOH+IPA mono c-SiH 2 0 2 + HCl metallic removalPOCl 3 diffusionH 3 PO 4 mist + thermalEthanol + H 3 PO 4 mixO 3 /dilute HF (RENA)HF + hot airCF 4 /0 2 plasma etchHF or dilute HF etchHF +HNO 3 (multi c-Si)or YAG Laser at end of lineWafersWire Saw Damage& Texture EtchIon Doping& DiffusionPSGRemovalEdgeIsolationRemovalPre-ARCDepositionCleanPassivation& ARCLayer (SiN)BackReflectorContactMetalsCo-FiringFurnaceModuleAssemblyHCl + H 2 0HF + H 2 OSC1 clean (H 2 O 2 + NH 4 OH)SC2 clean (H 2 0 2 +HCl)SiH 4 /NH 3 /H 2 PECVDorN 2 Si PVD SputteringWet Chemistry Application ProcessGas Application Process
Linde in Solar09Linde provides a full product portfolio of high purity bulk and specialty gases as well as wet chemicalsfor c-Si cell processing. Linde has the experience and expertise to optimize such critical c-Si process stepsas etch/texturization, doping, PSG removal, edge isolation, anti-reflective coating (ARC) deposition, andvarious cleaning steps that are essential in c-Si cell performance.Screen printand dryerLaser edgeisolationOxide etchARC sputterdepositionDoping anddiffusion furnaceSaw damage andtexture etchTypical c-Si 50 MW Cell Fabrication LineCost reductionLinde has demonstrated capabilities and technologies to provide recycling and/or reuse of selectedwaste in-process chemistries. We work closely with PV cell manufacturers to develop specific systemsthat can reduce the expenses associated with chemical waste management, andenvironmental impact. Such systems enable further reductions in operational costs forour customers. One example of this is our KOH recycling capability which is detailed on page 15.
Page 3 and 4: Linde in Solar03An integral part of
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Linde in Solar. - Linde Gas

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