14 <strong>L<strong>in</strong>de</strong> <strong>in</strong> <strong>Solar</strong>Turnkey eng<strong>in</strong>eer<strong>in</strong>g and on site gas and chemicalmanagement.<strong>L<strong>in</strong>de</strong> has <strong>in</strong>stalled hundreds of safe, efficient and robust gas systems with<strong>in</strong> the global semiconductor,TFT-LCD, solar and LED <strong>in</strong>dustries. <strong>L<strong>in</strong>de</strong>’s expertise <strong>in</strong>cludes consult<strong>in</strong>g, process design, turn-key projectmanagement, and commission<strong>in</strong>g.For on-go<strong>in</strong>g systems and materials management, <strong>L<strong>in</strong>de</strong> Electronics can offer full on-site gas and chemicalmanagement services, giv<strong>in</strong>g you full time access to <strong>in</strong>-depth gas and chemical know-how which ensuresa safe and smooth operation with m<strong>in</strong>imised downtime and risk. <strong>L<strong>in</strong>de</strong> currently operates on-site teams atmore than 50 customer sites worldwide.
<strong>L<strong>in</strong>de</strong> <strong>in</strong> <strong>Solar</strong>15Fac<strong>in</strong>g environmental challenges and enabl<strong>in</strong>gsusta<strong>in</strong>able manufactur<strong>in</strong>g.A clear focus on environmentally susta<strong>in</strong>able manufactur<strong>in</strong>g is a pillar of the <strong>L<strong>in</strong>de</strong> Group philosophy, andit is our goal to enable improvements <strong>in</strong> susta<strong>in</strong>ability <strong>in</strong> every <strong>in</strong>dustry we serve. In the solar <strong>in</strong>dustry wecan provide real solutions to reduce your CO 2 footpr<strong>in</strong>t and recycle valuable consumables. In the area ofchamber clean<strong>in</strong>g for the very large area PECVD tools, gases like NF 3 , which are consumed <strong>in</strong> significantvolumes, have some of highest Global Warm<strong>in</strong>g Potentials (GWPs) measured. In the case of NF 3 , approx1,000kg of gas is consumed per MW of module manufactur<strong>in</strong>g every year, regardless of technologyprovider. One of the highest priorities for <strong>L<strong>in</strong>de</strong>’s R&D programme <strong>in</strong> solar has been to pioneer technologiesto prevent these gases be<strong>in</strong>g released <strong>in</strong>to the atmosphere – either through recycl<strong>in</strong>g or through alternativeapplications us<strong>in</strong>g environmentally less harmful gases.NF 3 replacement<strong>L<strong>in</strong>de</strong> has pioneered the use of molecular fluor<strong>in</strong>e (F 2 ) as a replacement for NF 3 and SF 6 <strong>in</strong> PECVD chamberclean<strong>in</strong>g. While NF 3 and SF 6 are high GWP gases, F 2 has zero global warm<strong>in</strong>g impact. Replac<strong>in</strong>g NF 3 withFluor<strong>in</strong>e <strong>in</strong> a 1GW th<strong>in</strong> film Si fab would result <strong>in</strong> elim<strong>in</strong>ation of NF 3 consumption with an untreated globalwarm<strong>in</strong>g potential equivalent to nearly 17 million tonnes of CO 2 per year. <strong>L<strong>in</strong>de</strong>’s proven technology forgenerat<strong>in</strong>g F 2 on-site and on-demand elim<strong>in</strong>ates the need for large volume storage and addresses all thesafety requirements for handl<strong>in</strong>g this reactive material. In addition to its environmental benefit, F 2 reducesthe time for chamber clean<strong>in</strong>g, thereby <strong>in</strong>creas<strong>in</strong>g plant productivity, through a more efficient etch<strong>in</strong>gprocess.KOH Recycl<strong>in</strong>gThrough the <strong>L<strong>in</strong>de</strong> Group subsidiary, AUECC, based <strong>in</strong> Taiwan, <strong>L<strong>in</strong>de</strong> offers end to end recycl<strong>in</strong>g of wasteKOH for applications <strong>in</strong> mono-Si cell process<strong>in</strong>g. Via a unique reprocess<strong>in</strong>g technology, KOH recycl<strong>in</strong>gyields product purity equal to, or even better than, orig<strong>in</strong>al ‘fresh’ KOH quality. This <strong>in</strong>novative technologyis available on-site, anywhere <strong>in</strong> the world. Cost sav<strong>in</strong>g aspects <strong>in</strong>clude reduced waste neutralizationchemicals costs, reduced municipal waste effluent sewerage costs, reduced fresh purchases of potassiumhydroxide , reduced freight expenses for fresh KOH deliveries and reduced operator handl<strong>in</strong>g expenses.Overall estimated sav<strong>in</strong>gs are between 20-30% compared with the cont<strong>in</strong>ued purchase of fresh KOH.Technology development<strong>L<strong>in</strong>de</strong>, the lead<strong>in</strong>g supplier of gases, also takes leadership <strong>in</strong> solar PV research and development to drivedown the cost per watt <strong>in</strong> solar PV manufactur<strong>in</strong>g. <strong>L<strong>in</strong>de</strong> has solar research and development locations <strong>in</strong>San Marcos, California and <strong>in</strong> Europe with a jo<strong>in</strong>t development partner. <strong>L<strong>in</strong>de</strong>’s research and developmentefforts encompass both th<strong>in</strong>-film and crystall<strong>in</strong>e silicon cell manufactur<strong>in</strong>g. Areas of focus <strong>in</strong>cludedevelop<strong>in</strong>g products and services that capitalise on efficiencies of scale, improve solar cell performance,optimise process and film parameters and develop new, novel materials that drive down costs.
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