Linde in Solar. - Linde Gas
Linde in Solar. - Linde Gas
Linde in Solar. - Linde Gas
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<strong>L<strong>in</strong>de</strong> <strong>in</strong> <strong>Solar</strong>011<strong>L<strong>in</strong>de</strong> supplies the full range of gas andchemical products necessary for PVmanufacture †Typical gas and chemical requirements for th<strong>in</strong> film and crystall<strong>in</strong>e Si manufacture. Exact requirements will vary depend<strong>in</strong>g on the process.Th<strong>in</strong> film SiProductSilane (SiH 4 )Nitrogen trifluoride (NF 3 ) *Fluor<strong>in</strong>e (F 2 ) *Sulphur hexafluoride (SF 6 ) *Nitrogen (N 2 )Hydrogen (H 2 )Helium (He)Trimethlyboron (TMB) mixturesPhosph<strong>in</strong>e (PH 3 ) mixturesDiborane (B 2 H 6 ) mixturesMethane (CH 4 )Argon (Ar)Oxygen (O 2 )Diethylz<strong>in</strong>c (DEZ)Disilane (Si 2 H 6 )Trichlorosilane (SiHCl 3 )Tetrachlorosilane (SiCl 4 )Typical GradeElectronicTechnicalElectronicTechnicalElectronicElectronicTechnicalElectronicElectronicElectronicTechnicalElectronicTechnicalElectronicElectronic<strong>Solar</strong> Grade<strong>Solar</strong> GradeTypical Package (200MW)ISO module (6000kg)ISO module (8000kg)On-site plantN/AOn-site plantOn-site plantPressure tank/Tuber trailer**Cyl<strong>in</strong>derCyl<strong>in</strong>der bundleCyl<strong>in</strong>derCyl<strong>in</strong>derLiquid tankCyl<strong>in</strong>der /Liquid tankDrum /Tank/ISO module(20,000kg)Cyl<strong>in</strong>derDrum/ISO module(10000-20000kg)Drum/ISO modulec-SiProductSilane (SiH 4 )Ammonia (NH 3 )Tetrafluoromethane (CF 4 )Nitrous Oxide (N 2 0)Nitrogen (N 2 )Oxygen (O 2 )Argon (Ar)Hydrogen (H 2 )Acetic Acid (CH 3 COOH)Ammonium Hydroxide (NH 4 OH)Buffered Oxide Etchants(NH 4 F:HF)Ethanol (C 2 H 5 OH)Hydrochloric acid (HCl)Hydrogen Peroxide (H 2 0 2 )Hydrofluoric acid (HF)Isopropyl alcohol (C 3 H 8 O)Potassium Hydroxide (KOH)Nitric acid (HNO 3 )Phosphoric acid (H 3 PO 4 )Sulfuric acid (H 2 SO 4 )Sodium Hydroxide (NaOH)Custom Product Mixes AvailableTypical GradeElectronicElectronicElectronicElectronicElectronicElectronicElectronicElectronic