Linde in Solar. - Linde Gas

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Linde in Solar011Linde supplies the full range of gas andchemical products necessary for PVmanufacture †Typical gas and chemical requirements for thin film and crystalline Si manufacture. Exact requirements will vary depending on the process.Thin film SiProductSilane (SiH 4 )Nitrogen trifluoride (NF 3 ) *Fluorine (F 2 ) *Sulphur hexafluoride (SF 6 ) *Nitrogen (N 2 )Hydrogen (H 2 )Helium (He)Trimethlyboron (TMB) mixturesPhosphine (PH 3 ) mixturesDiborane (B 2 H 6 ) mixturesMethane (CH 4 )Argon (Ar)Oxygen (O 2 )Diethylzinc (DEZ)Disilane (Si 2 H 6 )Trichlorosilane (SiHCl 3 )Tetrachlorosilane (SiCl 4 )Typical GradeElectronicTechnicalElectronicTechnicalElectronicElectronicTechnicalElectronicElectronicElectronicTechnicalElectronicTechnicalElectronicElectronicSolar GradeSolar GradeTypical Package (200MW)ISO module (6000kg)ISO module (8000kg)On-site plantN/AOn-site plantOn-site plantPressure tank/Tuber trailer**CylinderCylinder bundleCylinderCylinderLiquid tankCylinder /Liquid tankDrum /Tank/ISO module(20,000kg)CylinderDrum/ISO module(10000-20000kg)Drum/ISO modulec-SiProductSilane (SiH 4 )Ammonia (NH 3 )Tetrafluoromethane (CF 4 )Nitrous Oxide (N 2 0)Nitrogen (N 2 )Oxygen (O 2 )Argon (Ar)Hydrogen (H 2 )Acetic Acid (CH 3 COOH)Ammonium Hydroxide (NH 4 OH)Buffered Oxide Etchants(NH 4 F:HF)Ethanol (C 2 H 5 OH)Hydrochloric acid (HCl)Hydrogen Peroxide (H 2 0 2 )Hydrofluoric acid (HF)Isopropyl alcohol (C 3 H 8 O)Potassium Hydroxide (KOH)Nitric acid (HNO 3 )Phosphoric acid (H 3 PO 4 )Sulfuric acid (H 2 SO 4 )Sodium Hydroxide (NaOH)Custom Product Mixes AvailableTypical GradeElectronicElectronicElectronicElectronicElectronicElectronicElectronicElectronic
Page 3 and 4: Linde in Solar03An integral part of
Page 5 and 6: Linde in Solar05Thin Film Si techno
Page 7 and 8: Linde in Solar07Gas distribution an
Page 9: Linde in Solar09Linde provides a fu
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Page 15: Linde in Solar15Facing environmenta

Linde in Solar. - Linde Gas

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